The present invention enables highly accurate analysis when visualizing analysis results in spectral imaging.

An surface analysis method includes: acquiring spectral image data regarding a sample surface with use of a spectral camera; extracting n wavelengths dispersed in a specific wavelength range in the acquired spectral image data, and converting spectrums of the wavelengths in the spectral image data into n-dimensional spatial vectors for each pixel; normalizing the spatial vectors of the pixels; clustering the normalized spatial vectors into a specific number of classifications; and identifying and displaying pixels clustered into the classifications, for each of the classifications.

Quality control of a periodic structure is performed using the damping rate of acoustic waves generated in the periodic structure. In this technique, an excitation light beam illuminates the first layer in the periodic structure to excite an acoustic wave. Possible irregularities in the periodic structure can scatter the acoustic wave, thereby increasing the damping rate of the acoustic wave. A sequence of probe light beams illuminates the periodic structure to measure the acoustic wave as a function of time to generated a temporal signal representing the damping rate of the acoustic signal. The acquired damping rate is employed to evaluate the quality of the periodic structure.

A method for determining properties of a coating on a transparent film, a method for manufacturing a capacitor film and a device configured to determine properties of a coating on a transparent film are disclosed. In an embodiment a method includes moving the transparent film with the coating on a path which passes between a light source and a sensor, illuminating, by the light source, the coating on the transparent film, detecting, by the sensor, an intensity of transmitted light from the light source and calculating, by a processor, the properties of the coating on the transparent film based on the detected intensity of transmitted light.

A photoelectric sensor includes: a placement table configured to allow a workpiece to be placed thereon; a light projecting device including a light emitting element configured to emit light and a converging element configured to converge the light emitted from the light emitting element toward a detection area; and a light receiving device configured to receive the light passing through the detection area from the converging element at a position located on a same plane as the placement table in a direction along an optical axis of the light. The optical axis of the light projected from the light projecting device is set such that the light is incident in a direction perpendicular to an incident surface of the light receiving device and focused on the incident surface of the light receiving device.

An optical system and method are presented for use in measurements on an upper surface of a layered sample when located in a measurement plane. The optical system is configured as a normal-incidence system having an illumination channel and a collection channel, and comprises an objective lens unit and a light propagation affecting device. The objective lens unit is accommodated in the illumination and collection channels, thereby defining a common optical path for propagation of illuminating light from the illumination channel toward an illuminating region in the measurement plane and for propagation of light returned from measurement plane to the collection channel. The light propagation affecting device comprises an apertured structure located in at least one of the illumination and collection channels, and configured to provide angular obscuration of light propagation path for blocking angular segments associated with light propagation from regions outside the illuminated region.

An inspection system for a fabricated object formed by layering powder includes an acquisition unit that acquires an image of a surface of each of layers, an identification unit that identifies a defect portion (protruding portion or recessed portion) on the surface of the powder and a position of the defect portion based on the acquired image, and a determination unit that determines that an abnormality occurs when the defect portion successively occurs at a same position in the plurality of layers.

An optical coherence tomography (OCT) system (63) is used to inspect bonding points (66A, 66B, 66C) sandwiched between two materials (layers 62, 64 of e.g. displays). The OCT differentiates between a bonding point, e.g. a weld, and air gaps between the two materials. The bonding points are identified as breaks in the air gap between the materials. By extracting various physical characteristics of the bonding points and the gap between the two materials, the present system determines whether the bonding is faulty.

A system may include a broadband light source emitting polarized light that is polarized to two orthogonal polarization states, multiple beam splitters for combining and splitting the polarization states, and interferometric cell for creation of interference patterns with respect to a sample surface, lenses of appropriate design that focus the polarized light at predefined locations, and sensors that analyze the polarized light as a function of angle and wavelength. The system may also include a controller configured to modulate the reference arm through operation of an optical chopper and allow for different data analysis modes to be used on the system produced data.

A device for determining a layer thickness in a multilayer film includes a radiation source configured to generate an electromagnetic primary radiation, a detector configured to detect an electromagnetic secondary radiation emitted by the multilayer film, the secondary radiation being induced by an interaction of the primary radiation with the multilayer film, and a first contact block transparent to the electromagnetic primary radiation and having a first contact surface for creating contact with the multilayer film. The radiation source is arranged on the first contact block in such a way that the electromagnetic primary radiation is guided from the first contact block onto the multilayer film.

A sensing apparatus that senses structure of electrode of electrical battery. The electrode is arranged to have layers spatially adjacent thereto that provide a waveguide region that includes a surface of the electrode that changes in structure. The sensing apparatus includes a source of Terahertz electromagnetic radiation, and a coupling arrangement that couples Terahertz electromagnetic radiation from the source into the waveguide region. The Terahertz electromagnetic radiation interacts with features present at the surface. The sensing apparatus includes detector that receives Terahertz electromagnetic radiation that is reflected and/or transmitted through the waveguide region, and processes the Terahertz electromagnetic radiation to determine temporal changes therein that are indicative of dendritic growths occurring at the surface of the electrode or any manufacturing or structural faults.