An inspection device for inspecting a state of a coating agent applied to a target surface having a protruding portion includes: an image capture device configured to capture an image of a predetermined inspection target region of the target surface; and an illumination device configured to emit light possible to be captured by the image capture device, toward the inspection target region, wherein the illumination device includes: a first light source configured to emit diffuse light toward an entirety of the inspection target region; and a second light source configured to emit direct light toward a shadow that is cast by the protruding portion due to emission of the diffuse light by the first light source.

Disclosed is a defect inspection device for determining anomaly of an inspection object. The defect inspection device may include: a lighting system which includes a light source for transmitting light onto the inspection object; and a dynamic diffuser located between the light source and the inspection object and capable of controlling a diffusivity of light transmitted onto the inspection object; and one or more processors for controlling the dynamic diffuser based on characteristics of the inspection object.

Reflective or embossed regions are supposed to be illuminated as uniformly as possible over the greatest possible angle range for optical inspection using in one aspect an apparatus for inspection having a passive lighting body spotlighted by a spotlight light source, which body illuminates a test region, as well as at least one optical sensor directed at the test region. The lighting body is configured to be partially transmissible, and the optical sensor is disposed, with reference to the test region, optically beyond the lighting body, detecting the test region through the lighting body, and/or the spotlight light source is directed at the lighting body and the lighting body extends continuously over at least 120° in a section plane that stands perpendicular to the surface of the flat items to be tested or inspected.

A method and system for selectively varying the performance of a test chamber are disclosed. According to one aspect, the performance is affected by a variable absorbing structure of the test chamber. The absorbing structure enables selective exposure of absorbing material to achieve a specific performance.

In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.

Incoherent millimeter wave, sub-millimeter wave and terahertz test signals are used to probe metal substrates covered by a protective coating or outer layer, such as paint or thermal insulation, obscuring direct assessment of the substrate. The incoherent test signals, provide signal dispersion and angular variation of the test signals with respect to angular incidence to the substrate. Illumination of the substrate permits differentiation between un-corroded and corroded sections of the sample because reflectivity (and emissivity) from a metal-based substrate is heavily dependent on the surface resistivity which is dependent on the corroded state. A detector/camera is arranged to pick up reflections from the substrate and an associated control system identifies regions of the sample that reflect the test signal illumination differently or otherwise indicate a variation from a reference value. The differences therefore signify the presence or lack of corrosion or other abnormalities within or on the substrate.

A visual inspection device is an inspection device using an image obtained by shooting an inspection surface of an object to be inspected with a camera disposed so as to face the inspection surface. The object to be inspected is a rolling bearing and the inspection surface is a surface included in an outer ring of the rolling bearing. A lighting device emits light from a light source as diffused light to the inspection surface in a direction different from a direction in which the camera shoots the inspection surface, and the camera shoots the inspection surface irradiated with the diffused light.

A device and method for reliably and accurately detecting impurities in a bulk material comprising two opposing tunnel sections arranged such that a bulk material stream flows between or through the tunnel sections. At least one of the tunnel sections has a lighting means configured for indirectly illuminating the bulk material stream. Furthermore, an optical detector receives the light emitted from the illuminated bulk material. The lighting means and optical detector are configured about the tunnel sections such that the optical radiation optical radiation does not pass directly from the lighting means to the bulk material, nor from the bulk material stream to the optical detector An evaluation apparatus, responsive to measured data from the optical detector, identifies impurities in the bulk material. The invention moreover relates to a method for operating such a device.

A component inspection process includes positioning a component (e.g., a semiconductor component or other object) such that component sidewalls are disposed along an optical path corresponding to sidewall beam splitters configured for receiving sidewall illumination provided by a set of sidewall illuminators, and transmitting this sidewall illumination therethrough, toward and to component sidewalls. Sidewall illumination incident upon component sidewalls is reflected from the component sidewalls back toward the sidewall beam splitters, which reflect or redirect this reflected sidewall illumination along an optical path corresponding to an image capture device for sidewall image capture to enable component sidewall inspection. Sidewall illuminators and sidewall beam splitters can form portions of a five sided inspection apparatus that includes a brightfield illuminator, a darkfield illuminator, and an image capture beam splitter such that the five sided inspection apparatus is configurable for inspecting component bottom surfaces and/or component sidewalls in a selective/selectable manner.

A fixture retains a housing in a fixed position relative to an imaging device. The housing has an aperture through which a surface recessed into the housing is aligned with the imaging device by the fixture. A planar electroluminescent illuminator is held in the fixture within a pocket of the fixture in which the housing is received. The illuminator uniformly emits light in response to electrical power applied thereto and the illuminator has an aperture formed therein held in alignment by the fixture with the aperture in the housing such that the light emitted by the illuminator is directed towards the recessed surface. An imaging device generates an image of the recessed surface through the aperture in the housing and the aperture in the illuminator.