Patent classifications
G01N2021/9511
Optical Sample Characterization
Optical sample characterization facilitates measurement and testing at any angle in a full range of angles of light propagation through an optical sample, such as a coated glass plate, having a higher than air index of refraction. A rotatable assembly includes a cylinder having a hollow, and a receptacle including the hollow. The receptacle also contains a fluid with a known refractive index. An optical light beam is input normal to the surface of the cylinder, travels through the cylinder, then via the fluid, to the optical sample, where light beam is transmitted and/or reflected, then exits the cylinder and is collected for analysis. Due at least in part to the fluid surrounding the optical sample, the optical sample can be rotated through a full range of angles (±90°, etc.) for full range testing of the optical sample.
DETECTION APPARATUS
A detection apparatus according to one aspect of this disclosure includes: two or more housings connectable to each other; a first photodetector connectable to a corresponding one of the two or more housings; and a second photodetector connectable to a corresponding one of the two or more housings. Each of the housings includes a first connecting portion to which the first photodetector is connectable, a second connecting portion to which the second photodetector is connectable, and a third opening facing the first connecting portion. At least one of the housings includes a dichroic mirror placed between a first opening and the third opening. The dichroic mirror allows light having a first wavelength in incident light from the third opening to pass through the dichroic mirror toward the first opening, while the dichroic mirror reflects light having a second wavelength in the incident light toward the second opening.
METHOD FOR EVALUATING ORIENTATION OF NANOWIRE IN TRANSPARENT MATERIAL, METHOD FOR MANAGING STEPS IN WHICH SAID METHOD IS USED, AND METHOD FOR PRODUCING RESIN CURED ARTICLE
An evaluation method includes a step of disposing a sensitive color plate between two polarization plates disposed in a crossed Nicols shape, a step of disposing a measurement material that is a transparent material containing a nanowire between any of one polarization plate or the other polarization plate of the polarization plates and the sensitive color plate, a step of making white light incident from a side of one of the disposed polarization plates, a step of observing a color of the measurement material from a side of the other polarization plate, and a step of evaluating an orientation direction of the nanowire from the color of the measurement material obtained by observation.
FREEFORM SURFACE METROLOGY AND DEFLECTOMETRY
Methods, devices and systems describe compact and simple deflectometry configurations that can measure complex shapes of freeform surfaces. One deflectometry system includes a first panel and a second panel positioned at an offset position from each other to provide illumination for an object. The second panel, positioned closer to the object, is operable as a substantially transparent panel, and as a pixelated panel to provide structured light patterns. The system also includes two or more cameras positioned on the second panel an is operable in a first mode where the first panel provides a first structured illumination and the second panel is configured as a substantially transparent panel that allows the first structured illumination from the first panel to transmit toward the object. The system is also operable in a second mode where the second panel is configured to provide a second structured illumination for illuminating the object.
Product Inspection System and Method
A product inspection system includes an image acquisition system having a camera generating an inspection image of a product arranged between a plurality of mirrors. The inspection image has a plurality of sub images of different sides of the product. The inspection system has a calibration member with a plurality of correction patterns on different sides; the camera receives light from the calibration member reflected by the mirrors to generate a calibration image of the calibration member. A computer of the product inspection system receives the inspection image and the calibration image and determines a relative mirror position relationship between the mirrors. The computer forms a single spliced image of the product.
THz MEASURING DEVICE AND THz MEASURING METHOD FOR MEASURING A TRANSPORTED MEASURING OBJECT
The present disclosure relates to a THz measuring device for measuring an extruded measuring object.
WORKPIECE HOLDER FOR UTILIZATION IN METROLOGY SYSTEM FOR MEASURING WORKPIECE IN DIFFERENT ORIENTATIONS
A workpiece holder is configured to hold a workpiece and is utilized in a metrology system which includes a sensing configuration for obtaining 3-dimensional surface data for the workpiece. The workpiece holder includes at least three reference features (e.g., spherical reference features extending from sides) that are configured to be sensed by the sensing configuration when the workpiece holder is in different orientations (e.g., as rotated 180 degrees between first and second orientations for presenting front and back sides of the workpiece towards the sensing configuration). A determination of 3-dimensional positions of the reference features for each orientation enables a combining (e.g., in a common coordinate system) of 3-dimensional surface data that is acquired for the workpiece in each orientation. Interchangeable workpiece holding portions may be provided that fit within the workpiece holder for holding workpieces with different characteristics (e.g., having different sizes and/or shapes).
METHOD FOR ASSESSING THE QUALITY OF A COMPONENT OF OPTICAL MATERIAL
A method and system for assessing the quality of at least one component of optical material which has at least one first center axis includes directing at least one light beam towards at least one detector device such that while changing the position and/or orientation of the component relative to the light beam, the light beam crosses at least from time to time the component and determining, with at least one determination device, at least one characterizing value of at least one figure of merit of the component based on analyzing, with at least one analyzing device, the dependency of a parameter of the light beam detected by the detector device on the position and/or orientation of the component.
Method and apparatus for an advanced charged controller for wafer inspection
A system and method for advanced charge control of a light beam is provided. The system comprising a laser source comprising a laser diode for emitting a beam and a beam homogenizer to homogenize the emitted beam. The system and methods further comprise a beam shaper configured to shape the emitted beam using an anamorphic prism group and a driver configured to direct the shaped beam to a specified position on a wafer, wherein the laser source, the beam shaper, and the driver are coaxially aligned.
Workpiece holder for utilization in metrology system for measuring workpiece in different orientations
A workpiece holder is configured to hold a workpiece and is utilized in a metrology system which includes a sensing configuration for obtaining 3-dimensional surface data for the workpiece. The workpiece holder includes at least three reference features (e.g., spherical reference features extending from sides) that are configured to be sensed by the sensing configuration when the workpiece holder is in different orientations (e.g., as rotated 180 degrees between first and second orientations for presenting front and back sides of the workpiece towards the sensing configuration). A determination of 3-dimensional positions of the reference features for each orientation enables a combining (e.g., in a common coordinate system) of 3-dimensional surface data that is acquired for the workpiece in each orientation. Interchangeable workpiece holding portions may be provided that fit within the workpiece holder for holding workpieces with different characteristics (e.g., having different sizes and/or shapes).