A system for inspecting thin glass includes: a housing including a body and a cover; a first shuttle which fixes an edge portion of the thin glass and reciprocates in a first axis direction; a first inspection part disposed on the body and which measures a position of a defect formed in the thin glass by taking a picture of the thin glass; a transport shuttle which separates the thin glass from the first shuttle, a second shuttle which separates the thin glass from the transport shuttle, fixes the thin glass, and reciprocates the upper surface of the body; and a second inspection part disposed on the body and spaced apart from the first inspection part and which inspects the position of the defect by taking an enlarged picture of the position of the defect. The first shuttle tensions and fixes the thin glass.

In a processing apparatus, a vibration detecting unit includes a light source, an interference unit configured to apply light emitted from the light source to a measurement target member and generate an interference pattern image. A control unit includes a storage section configured to store a first interference pattern image captured at a predetermined timing by the imaging unit and a second interference pattern image captured at a timing different from the timing of the first interference pattern image by the imaging unit, a comparing section configured to compare the first interference pattern image and the second interference pattern image stored in the storage section with each other, and a vibration detecting section configured to detect vibration on the basis of the first interference pattern image and the second interference pattern image compared with each other by the comparing section.

Methods of autonomous diagnostic verification and detection of defects in the optical components of a vision-based inspection system are provided. The method includes illuminating a light panel with a first light intensity pattern, capturing a first image of the first light intensity pattern with a sensor, illuminating the light panel with a second light intensity pattern different than the first light intensity pattern, capturing a second image of the second light intensity pattern with the sensor, comparing the first image and the second image to generate a comparison of images, and identifying defects in the light panel or the sensor based upon the comparison of images. Systems adapted to carry out the methods are provided as are other aspects.

A reticle inspection system may include two or more inspection tools to generate two or more sets of inspection images for characterizing a reticle, where the two or more inspection tools include at least one reticle inspection tool providing inspection images of the reticle. The reticle inspection system may further include a controller to correlate data from the two or more sets of inspection images to positions on the reticle, detect one or more defects of interest on the reticle with the correlated data as inputs to a multi-input defect detection model, and output defect data associated with the defects of interest.

The present invention addresses to a multidirectional dynamic phase shifting interferometry (DPSI) shearography and interferometry sensor. The present invention uses a configuration with three fixed prisms, or a single fixed three-facet optical prism constructed so as to achieve the same effect as three prisms and thus simultaneously obtain three images with phase shifting. The present invention also encompasses a method of inspection and measurement of vibration modes using said sensor.

The present invention addresses to a multidirectional dynamic phase shifting interferometry (DPSI) shearography and interferometry sensor. The present invention uses a configuration with three fixed prisms, or a single fixed three-facet optical prism constructed so as to achieve the same effect as three prisms and thus simultaneously obtain three images with phase shifting. The present invention also encompasses a method of inspection and measurement of vibration modes using said sensor.

Block-to-block reticle inspection includes acquiring a swath image of a portion of a reticle with a reticle inspection sub-system, identifying a first occurrence of a block in the swatch image and at least a second occurrence of the block in the swath image substantially similar to the first occurrence of the block and determining at least one of a location, one or more geometrical characteristics of the block and a spatial offset between the first occurrence of the block and the at least a second occurrence of the block.

A fast method for batch screening diamonds includes placing diamonds on a worktable, turning on a light source arranged on one side of the worktable to shed light on the diamonds where the light includes visible light, photographing the diamonds on the worktable through an imager to obtain a basal image showing the distribution of the diamonds, switching the light source to shortwave UV light with a wavelength ranging from 180 nm to 250 nm, maintaining the light source in work condition for a period of time and then turn it off, photographing the diamonds on the worktable through the imager to obtain a phosphorescence distribution image showing phosphorescent diamonds, overlapping the basal image with the phosphorescence distribution image to obtain a phosphorescence comparison map, marking the phosphorescent diamonds on the phosphorescence comparison map through image recognition technology, and then picking out the phosphorescent diamonds as suspicious diamonds.

A system for visualizing melanin present in tissue can include an imaging system to record a signal based on a presence of melanin in tissue and a display device to display an image based on the signal. A first laser source can emit a Stokes pulse train and a second laser source can emit a pump pulse train. Both the first laser source and the second laser source comprise a tunable center wavelength or frequency. An energy difference between a frequency of the Stokes pulse train and a frequency of the pump pulse train is from 1750 cm.sup.−1 to 2250 cm.sup.−1. The Stokes and the pump pulse train overlap in space and time. A scanning mechanism focuses the combined Stokes pulse train and pump pulse train within the tissue and scans across the tissue. A detector detects the signal based on a presence of melanin within the tissue.

An inspection system is provided with an inspection device configured to examine the external features of an object; and a control device for controlling the inspection device;

the inspection device including: a substantially column-shaped first barrel that includes a first through hole configured for an object to pass therethrough; and a plurality of imaging units provided on the inner peripheral surface which forms the first through hole in the first barrel; and the control device including: an image processing unit configured to process an image captured and output by each of the imaging units for the purpose of inspection.