An object is to shorten time required for visual inspection. A visual inspection device (1) configured to inspect an appearance of an inspection object (30), the visual inspection device (1) including: an imager (3) configured to image the inspection object (30) arranged at a predetermined position of the visual inspection device (1); and a height measurer (11, 12) configured to measure a height of the inspection object (30) carried into the visual inspection device (1) or carried out from the visual inspection device (1).

Provided is a sheet inspection device capable of saving space, reducing member costs, and reducing the number of maintenance steps. A first light source Ls1 and a first inspection part S1 for inspecting a flaw on the front surface of a sheet and a second light source Ls2 and a second inspection part S2 for inspecting a flaw on the back surface of the sheet are disposed in such a positional relationship that when the sheet has a hole, the first inspection part S1 can detect light emitted by the second light source and transmitted through the hole in the sheet.

A surface inspection method includes: an irradiating step of emitting oblique illumination light onto an inspection target region of steel material using two or more oblique line light sources; an imaging step of receiving each of reflected light beams of the oblique illumination light from the respective oblique line light sources, the reflected light beams being from the inspection target region, and capturing images of the inspection target region, by one or more line sensors; and a detecting step of detecting a linear surface defect at the inspection target region using the images captured at the imaging step, wherein orthographic projections of at least two oblique illumination light beams, out of the oblique illumination light from the two or more oblique line light sources, onto a surface of the steel material are orthogonal to each other on the inspection target region.

The present disclosure relates to a THz measuring device for measuring a measuring object and a THz measuring method for measuring a measuring object.

An inspection device includes a scanning device, a first recognition unit, and a second recognition unit. The scanning device includes a laser sensor that emits laser slit light for measuring a two-dimensional shape, and a movement mechanism that moves the laser sensor in a predetermined direction. The first recognition unit obtains three-dimensional shape data of an inspection object and a workpiece by associating a plurality of two-dimensional shape data obtained by the laser sensor with position data of the laser sensor at the time of measuring the two-dimensional shape. The second recognition unit derives a three-dimensional shape of the workpiece by obtaining a difference between first three-dimensional shape data indicating a three-dimensional shape before the workpiece is laminated on the mold and second three-dimensional shape data indicating a three-dimensional shape after the workpiece is laminated on the mold.

A light 2 for reflected light that emits visible light for reflected light onto a front side of a veneer 6, a light 32 for invisible light that emits near-infrared light for transmitted light onto a back side of the veneer 6, and an image processing device 1 that detects defects of the veneer 6 by analyzing a captured image generated by a line sensor camera 4 are provided. Defects of the veneer 6 are discriminated on the basis of a set of shading and shapes in an infrared-transmitted-light image based on the transmitted light, and colors in a visible-light image based on the reflected light. Consequently, even if a defect has a small color difference from a normal part in the visible-light image, difference of shading between the defective part and the normal part appears in the infrared-transmitted-light image, and a defect that is difficult to detect by seeing only a color difference in a visible-light image can be relatively easily detected.

An apparatus and methods of inspecting, analyzing, classifying, and/or grading quality of a transparent sheet using a data set of photoelasticity measurements, thickness measurements, segmentation specifications, measurement specifications and quality control specifications of the transparent sheet. A results measurement is calculated on a computing system, quality control specifications are applied to the results measurement allowing writing to the database and creating reports, sending results to an operator interface and machine control.

A system for forming a homogenized illumination line which can be imaged as a low-speckle line is disclosed. The system includes a laser configured to emit a collimated laser beam; and an illumination-fan generator that includes one or more linear diffusers. The illumination-fan generator is arranged and configured to (i) receive the collimated laser beam, (ii) output a planar fan of diffused light, such that the planar fan emanates from a light line formed on the distal-most one of the one or more linear diffusers, and (iii) cause formation of an illumination line at an intersection of the planar fan and an object.

A method and apparatus for quantitatively characterizing performance of a laser steering galvanometer mirror directs a laser beam from a calibration “sensor” onto a side region of the mirror to directly determine rotational positioning, velocity, and/or acceleration thereof using interferometry, time-of-flight measurements, and Doppler measurements. Measured positioning errors can be compared with a database to predict required calibration adjustments. Embodiments automatically adjust digital calibrations. Mirrors, splitters, and/or a plurality of sensors can apply measurement beams simultaneously or sequentially to both sides of a mirror, and/or to more than one mirror. Large rotation ranges, for example larger than +/−15 degrees, can be accommodated by applying measurement beams from a plurality of directions. The calibration apparatus can be distinct, or integral with the galvanometer, and can be used to monitor and/or to control the mirror positioning.

Embodiments of the present disclosure relate to methods for defect inspection. After pattern features are formed in a structure layer, a dummy filling material having dissimilar optical properties from the structure layer is filled in the pattern features. The dissimilar optical properties between materials in the pattern features and the structure layer increase contrast in images captured by an inspection tool, thus increasing the defect capture rate.