Provided are a light-emitting apparatus that can suppress manufacturing cost to a low level and perform light emission with high uniformity using a simple configuration, a calibration coefficient calculation method using the light-emitting apparatus, and a method for calibrating a captured image of an inspection target object. A plurality of light-emitting diodes arranged at equal intervals on the circumference of a virtual circle, and a milky white-colored emission window, which is provided on a top surface portion separated from the light-emitting diodes, has an outer edge that is smaller than the circumference on which the light-emitting diodes are arranged, and allows light of the light-emitting diodes to pass therethrough, are included. The diameter of the virtual circle on which the light-emitting diodes are arranged and a separation distance between the light-emitting diodes and the emission window are set to predetermined distances.

Metrology targets and methods are provided, which comprise at least two overlapping structures configured to be measurable in a mutually exclusive manner at least at two different corresponding optical conditions. The targets may be single cell targets which are measured at different optical conditions which enable independent measurements of the different layers of the target. Accordingly, the targets may be designed to be very small, and be located in-die for providing accurate metrology measured of complex devices.

Inspection method for inspecting containers, such as bottles, where an image of a container moved past an inspection device is recorded by the inspection device and the recorded image is compared with a reference image, where the reference image is formed from a number of previously recorded images of containers moved past the inspection device and it is determined in dependence of the comparison of the recorded image with the reference image whether the inspection device is operational.

Inspection method for inspecting containers, such as bottles, where an image of a container moved past an inspection device is recorded by the inspection device and the recorded image is compared with a reference image, where the reference image is formed from a number of previously recorded images of containers moved past the inspection device and it is determined in dependence of the comparison of the recorded image with the reference image whether the inspection device is operational.

An optical sensing device includes a first sensor, a second sensor, a third sensor and a fourth sensor for sensing light to generate a first sensing signal, a second sensing signal, a third sensing signal and a fourth sensing signal, respectively. A spectrum of a coating of the first sensor includes a first peak of a X spectrum. A spectrum of a coating of the second sensor includes a second peak of the X spectrum. A spectrum of a coating of the third sensor includes a Y spectrum. A spectrum of a coating of the fourth sensor includes a Z spectrum. The first sensing signal and the second sensing signal are used to determine a X output value. The third sensing signal and the fourth sensing signal are used to determine a Y output value and a Z output value, respectively.

An optical sensing device includes a first sensor, a second sensor, a third sensor and a fourth sensor for sensing light to generate a first sensing signal, a second sensing signal, a third sensing signal and a fourth sensing signal, respectively. A spectrum of a coating of the first sensor includes a first peak of a X spectrum. A spectrum of a coating of the second sensor includes a second peak of the X spectrum. A spectrum of a coating of the third sensor includes a Y spectrum. A spectrum of a coating of the fourth sensor includes a Z spectrum. The first sensing signal and the second sensing signal are used to determine a X output value. The third sensing signal and the fourth sensing signal are used to determine a Y output value and a Z output value, respectively.

Various embodiments of systems and methods for calibrating wafer inspection system modules are disclosed herein. More specifically, the present disclosure provides various embodiments of systems and methods to calibrate the multiple spectral band values obtained from a substrate by a camera system included within a WIS module. In one embodiment, multiple spectral band values are red, green, and blue (RGB) values. As described in more detail below, the calibration methods disclosed herein may use a test wafer having a predetermined pattern of thickness changes or color changes to generate multiple spectral band offset values. The multiple spectral band offset values can be applied to the multiple spectral band values obtained from the substrate to generate calibrated RGB values, which compensate for spectral responsivity differences between camera systems included within a plurality of WIS modules.

A product inspection system includes an image acquisition system having a camera generating an inspection image of a product arranged between a plurality of mirrors. The inspection image has a plurality of sub images of different sides of the product. The inspection system has a calibration member with a plurality of correction patterns on different sides; the camera receives light from the calibration member reflected by the mirrors to generate a calibration image of the calibration member. A computer of the product inspection system receives the inspection image and the calibration image and determines a relative mirror position relationship between the mirrors. The computer forms a single spliced image of the product.

There is provided a quantitative method for determining a level of a sanding surface preparation of a carbon fiber composite surface, prior to the carbon fiber composite surface undergoing a post-processing operation. The quantitative method includes fabricating a ladder panel of levels of sanding correlating to an amount of sanding of sanding surface preparation standards for a reference carbon fiber composite surface of reference carbon fiber composite structure(s); using surface analysis tools to create target values for quantifying the levels of sanding; measuring, with the surface analysis tools, sanding surface preparation location(s) on the carbon fiber composite surface of a test carbon fiber composite structure, to obtain test result measurement(s); comparing the test result measurement(s) to the levels, to obtain test result level(s); determining if the test result level(s) meet the target values; and determining whether the carbon fiber composite surface is acceptable to proceed with the post-processing operation.

The method includes detecting a COP in a surface of a reference wafer with a laser surface inspection apparatus to be calibrated and an apparatus for calibration that obtains an X coordinate position and a Y coordinate position of the COP; determining a COP that is detected as the same COP with a determination criterion that a positional difference between a detected position obtained by the laser surface inspection apparatus to be calibrated and a detected position obtained by the apparatus for calibration on the reference wafer surface is within a threshold range; and calibrating the coordinate position identification accuracy of the laser surface inspection apparatus to be calibrated by adopting the X and Y coordinate positions obtained by the apparatus for calibration as true values of the X and Y coordinate positions.