A thin film liquid cell suitable for transmission electron microscopy at room temperature is fabricated as follows. A thin film floating on a liquid is prepared. A droplet of the liquid with the thin film floating thereon is transferred to a support by means of a loop. The loop carries the droplet and the droplet carries the thin film during this transfer. Sufficient liquid from the droplet on the support is removed to form the thin film liquid cell.

A measurement device includes an analyzer configured to analyze a diffraction image of X-rays scattered from a subject; estimate a surface contour shape of a measurement area of the subject; extract feature data from shape information, and determine shape parameters for representing the surface contour shape; calculate a theoretical scattering intensity of each of the scattered X-rays when values of the shape parameters are changed; calculate a difference between a measured scattering intensity of each scattered X-ray and the corresponding theoretical scattering intensity, and generate a regression model of a relationship between a corresponding value of the shape parameter and the difference for each shape parameter; extract one shape parameter candidate value reducing the difference from the regression model, and calculate a theoretical scattering intensity of the shape parameter candidate value; and estimate the value of the shape parameter minimizing the difference while repeatedly changing the shape parameter candidate value.

Systems and methods for robotic inspection of above-ground pipelines are disclosed. Embodiments may include a robotic crawler having a plurality of motors that are individually controllable for improved positioning on the pipeline to facilitate image acquisition. Embodiments may also include mounting systems to house and carry imaging equipment configured to capture image data simultaneously from a plurality of angles. Such mounting systems may be adjustable to account for different sizes of pipes (e.g., 2-40+ inches), and may be configured to account for traversing various pipe support structures. Still further, mounting systems may include quick-release members to allow for removal and re-mounting of imaging equipment when traversing support structures. In other aspects, embodiments may be directed toward control systems for the robotic crawler which assist in the navigation and image capture capabilities of the crawler.

Methods and systems for characterizing dimensions and material properties of semiconductor devices by transmission small angle x-ray scatterometry (TSAXS) systems having relatively small tool footprint are described herein. The methods and systems described herein enable Q space resolution adequate for metrology of semiconductor structures with reduced optical path length. In general, the x-ray beam is focused closer to the wafer surface for relatively small targets and closer to the detector for relatively large targets. In some embodiments, a high resolution detector with small point spread function (PSF) is employed to mitigate detector PSF limits on achievable Q resolution. In some embodiments, the detector locates an incident photon with sub-pixel accuracy by determining the centroid of a cloud of electrons stimulated by the photon conversion event. In some embodiments, the detector resolves one or more x-ray photon energies in addition to location of incidence.

An X-ray inspection apparatus suppresses anomalies in inspection results caused by the X-ray inspection apparatus being used while an unsuitable setting is in effect. The X-ray inspection apparatus is provided with an inspection unit, a setting unit, a storage unit, an assessment unit, and a notification unit. The inspection unit inspects an irradiated article using detection data obtained by detecting X-rays. The setting unit sets a setting value used in inspection of the article by the inspection unit. The storage unit stores a detection value based on the detection data. The assessment unit assesses, on the basis of the detection value stored in the storage unit, whether or not the setting value set by the setting unit is suitable. When the assessment unit has assessed that the setting value is not suitable, the notification unit issues a notification to indicate that the setting value is not suitable.

Systems and methods for robotic inspection of above-ground pipelines are disclosed. Embodiments may include a robotic crawler having a plurality of motors that are individually controllable for improved positioning on the pipeline to facilitate image acquisition. Embodiments may also include mounting systems to house and carry imaging equipment configured to capture image data simultaneously from a plurality of angles. Such mounting systems may be adjustable to account for different sizes of pipes (e.g., 2-40+ inches), and may be configured to account for traversing various pipe support structures. Still further, mounting systems may include quick-release members to allow for removal and re-mounting of imaging equipment when traversing support structures. In other aspects, embodiments may be directed toward control systems for the robotic crawler which assist in the navigation and image capture capabilities of the crawler.

Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.

Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.

An example embodiment includes a large observation device that observes the object using a quantum beam; a reproduction device that is installed in the large observation device and reproduces an input to the object in a state where the object can be observed by the large observation device; a dynamic state observation device that observes a dynamic state of a functional object functioning by a combination of a plurality of elements; a first information acquisition unit that functionally decomposes the functional object up to an element corresponding to the object and acquires first information that is input information to the element corresponding to the object; and a transmission unit that transmits the first information to the reproduction device, in which the reproduction device reproduces the input to the object on the basis of the first information.

A system and corresponding method for electron cryomicroscopy, comprising: a field-emission gun for generating an electron beam, the field-emission gun being energized, in use, to generate a 80 keV to 120 keV electron beam which is emitted into a vacuum enclosure and towards a specimen holder; the vacuum enclosure containing, at least in part: an objective lens for focusing an image of the specimen, the objective lens being disposed in the path of the electron beam and having a chromatic aberration coefficient, Cc, selected to achieve a resolution value better than a desired amount; the specimen holder for holding a specimen, the specimen holder being disposed in the path of the electron beam; a cryostage for cooling a specimen; a cryo-shield for surrounding a specimen and reducing an ice contamination rate of the specimen; and a direct electron detector comprising an array of pixels, each pixel capable of detecting an incident electron that has passed through a sample and struck the pixel.