A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the light source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.

A defect inspection system includes an X-ray generator that generates X-ray to be irradiated to a structure, and an X-ray detector that detects the X-ray generated by the X-ray generator and transmitted through the structure. In particular, the X-ray generator is configured to be moved by a first transporting means, and the X-ray detector is configured to be moved by a second transporting means. The system further includes a control unit configured to control and operate the first transporting means and the second transporting means.

In a Schottky emitter or a thermal field emitter using a hexaboride single crystal, side emission from portions other than an electron emission portion is reduced. An electron source according to the invention includes: a protrusion (40) configured to emit an electron when an electric field is generated; a shank (41) that supports the protrusion (40) and has a diameter decreasing toward the protrusion (40); and a body (42) that supports the shank (41), in which the protrusion (40), the shank (41), and the body (42) are each made of a hexaboride single crystal, and a part including the shank (41) and the body (42) excluding the protrusion (40) is covered with a material having a work function higher than that of the hexaboride single crystal.

A device for measuring short-wavelength characteristic X-ray diffraction based on array detection, and a measurement and analysis method based on the device are provided. An array detector of the device only detects and receives a diffraction ray which is diffracted by a material of a to-be-measured part inside a sample and passes through a through hole of a receiving collimator, and rays passing through a positioning hole. The to-be-measured part inside the sample is placed at the center of the diffractometer circle of the device. The method is performed with the device. With the present disclosure, a diffraction pattern of a part inside the sample with a centimeter thickness, i.e. Debye rings, can be rapidly and non-destructively measured, thereby rapidly and non-destructively measuring and analyzing crystal structures, and its crystal structural change of the part inside the sample, such as phase, texture, and stress.

The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.

A method of detecting a defect in a wind turbine blade uses a system that includes an X-ray generator, moved by a first transporting means, that generates X-ray to be irradiated to the wind turbine blade; an X-ray detector, moved by a second transporting means, that detects the X-ray generated by the X-ray generator and transmitted through the wind turbine blade; and a control unit. To detect a defect, the control unit divides virtually the wind turbine blade into a plurality of lengthwise sections based on a thickness profile thereof, receives a location of the X-ray generator, and controls output of the X-ray generator based on the location of the X-ray generator relative to the plurality of lengthwise sections. In particular, the output of the X-ray generator is decreased for a section among the plurality of lengthwise sections that is farther from a hub of the wind turbine blade.

A method and a device for determining the material properties of a polycrystalline, in particular metallic, product during production or quality control of the polycrystalline, in particular metallic, product by means of X-ray diffraction using at least one X-ray source and at least one X-ray detector. In this case, an X-ray generated by the X-ray source is directed onto a surface of the polycrystalline product and the resulting diffraction image of the X-ray is recorded by the X-ray detector. After exiting the X-ray source, the X-ray is passed through an X-ray mirror, wherein the X-ray is both monochromatized and focused, by the X-ray mirror, in the direction of the polycrystalline product and/or the X-ray detector, and then reaches a surface of the metallic product.

An on-line energy dispersive X-ray diffraction (EDXRD) analyser for mineralogical analysis of material in a process stream or a sample is disclosed. The analyser includes a collimated X-ray source to produce a diverging beam of polychromatic X-rays, and an energy resolving X-ray detector, and a substantially X-ray transparent member having the form of a solid of revolution which is circularly symmetric about a central axis between the collimated X-ray source and the energy resolving X-ray detector, an outer surface of the X-ray transparent member positionable adjacent the material to be analysed. A primary beam collimator is disposed adjacent to or within the substantially X-ray transparent member to substantially prevent direct transmission of polychromatic X-rays emitted from the source to the detector. The analyser is configured such that the diverging beam of polychromatic X-rays are directed towards the substantially X-ray transparent member, and where the energy resolving X-ray detector collects a portion of the beam of X-rays diffracted by the material and outputs a signal containing energy information of the collected, diffracted X-rays.

According to the present invention, a desired one of multiple beams can be aligned with a small-diameter aperture quickly. A multi-electron beam inspection apparatus includes a beam selection aperture substrate including a first passage hole that passes all the multiple electron beams, a second passage hole through which one of the multiple electron beams is able to pass, a first slit, and a second slit not parallel to the first slit, an aperture moving unit moving the beam selection aperture substrate, a first detector detecting a current of a beam having passed through the first slit and a current of a beam having passed through the second slit, of the multiple electron beams, and a second detector detecting multiple secondary electron beams including reflected electrons, discharged from a substrate, due to application of the multiple electron beams, having passed through the first passage hole, to the substrate. The substrate is inspected based on an output signal from the second detector.

The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.