A radiation imaging system is provided. The system comprises a radiation imaging apparatus including a plurality of pixels for acquiring radiation image data and a detection unit for performing exposure control during radiation irradiation, and a radiation control apparatus configured to control a radiation source that irradiates radiation to the radiation imaging apparatus. The radiation imaging apparatus and the radiation control apparatus transmit signals that relate to exposure control by wireless communication. The radiation imaging apparatus, in a case where an irradiation stop signal indicating that radiation irradiation has been stopped is not received from the radiation control apparatus after a signal instructing to stop radiation irradiation has been transmitted to the radiation control apparatus and until a first time interval has elapsed, transmits a signal instructing to stop radiation irradiation to the radiation control apparatus again.

A quantitative analysis apparatus, a method, a program, and a manufacturing control system are provided. A WPPF section 320 for determining parameters of theoretical diffraction intensity by performing whole powder pattern fitting with respect to an X-ray diffraction profile to be analyzed, a scale factor acquiring section 325 for acquiring a scale factor of a test component among the determined parameters, a calibration curve storing section 350 for storing a calibration curve indicating a correlation between scale factors of the test component acquired with respect to a standard sample and content ratios of the test component in the standard sample, and a conversion section 370 for converting the scale factor of the test component acquired with respect to an objective sample into the content ratio of the test component in the objective sample using the stored calibration curve, are comprised.

Methods and systems for improving a measurement recipe describing a sequence of measurements employed to characterize semiconductor structures are described herein. A measurement recipe is repeatedly updated before a queue of measurements defined by the previous measurement recipe is fully executed. In some examples, an improved measurement recipe identifies a minimum set of measurement options that increases wafer throughput while meeting measurement uncertainty requirements. In some examples, measurement recipe optimization is controlled to trade off measurement robustness and measurement time. This enables flexibility in the case of outliers and process excursions. In some examples, measurement recipe optimization is controlled to minimize any combination of measurement uncertainty, measurement time, move time, and target dose. In some examples, a measurement recipe is updated while measurement data is being collected. In some examples, a measurement recipe is updated at a site while data is collected at another site.

A radiation image imaging apparatus which generates an image from irradiated radiation, the radiation image imaging apparatus including: a communication unit which directly communicates by wireless communication with an information processing apparatus, which performs wireless communication, and receives installation setting information transmitted from the information processing apparatus to perform a predetermined setting at a time of an installation; and a hardware processor which performs the predetermined setting of the radiation image imaging apparatus in accordance with the installation setting information received by the communication unit.

An analysis and observation device includes an analysis unit, a primary storage device that reads a substance library in which types of substances are associated with a plurality of characteristics, and a processor that executes processing based on the substance library. The substance library is configured by storing hierarchical information of superclasses each of which represents a general term of a substance and subclasses each of which represents a type of the substance. A processor includes: a spectrum acquirer that acquires an intensity distribution spectrum; a characteristic extractor that extracts a characteristic of a substance based on the intensity distribution spectrum; a substance estimator that estimates the type of the substance from subclasses based on the extracted characteristic; and a user interface controller that causes a display to display the estimated subclass and the superclass to which the subclass belongs in a hierarchical manner.

An X-ray inspection apparatus suppresses anomalies in inspection results caused by the X-ray inspection apparatus being used while an unsuitable setting is in effect. The X-ray inspection apparatus is provided with an inspection unit, a setting unit, a storage unit, an assessment unit, and a notification unit. The inspection unit inspects an irradiated article using detection data obtained by detecting X-rays. The setting unit sets a setting value used in inspection of the article by the inspection unit. The storage unit stores a detection value based on the detection data. The assessment unit assesses, on the basis of the detection value stored in the storage unit, whether or not the setting value set by the setting unit is suitable. When the assessment unit has assessed that the setting value is not suitable, the notification unit issues a notification to indicate that the setting value is not suitable.

A radiation imaging system comprising a radiation imaging apparatus configured to detect radiation emitted from a radiation source, an irradiation control apparatus configured to control the radiation source, a communication control apparatus configured to perform communication between the radiation imaging apparatus and the irradiation control apparatus, and a controller, is provided. The radiation imaging apparatus is configured to communicate with the communication control apparatus in accordance with a setting selected from a plurality of settings by the controller. The controller acquires a communication time for a predetermined communication amount between the radiation imaging apparatus and the communication control apparatus, and switches, in accordance with the communication time, the setting for communication of the radiation imaging apparatus with the communication control apparatus from a currently selected setting to another setting among the plurality of settings.

An article handling system includes: an article handling device including an article handling unit that executes handling with respect to an article, and a conveying unit configured to convey the article into the article handling unit and configured to convey out the article from the article handling unit; a remote device that is connected at a location spaced apart from the article handling device in a communication possible manner through a network, and includes a remote control unit that remotely controls the article handling device; an acquisition unit that acquires information on an ambient environment of the article handling device; a determination unit that determines whether or not a worker is present in a vicinity of the article handling device on the basis of the information on the ambient environment; and a transmission unit that transmits a determination result in the determination unit to the remote control unit.

The present invention provides a charged particle beam device with which optimal parameters for the device can be effectively derived in a short time period. This charged particle beam device comprises: an electron gun (1) that irradiates a sample (10) with an electron beam (2); an image processing unit (901) that acquires an image of the sample (10) from a signal (12) generated by the sample (10) due to the electron beam (2); a database (604) that holds correspondence between a first parameter that is an optical condition, a second parameter that is a value pertaining to device performance, and a third parameter that is information pertaining to the device configuration, and stores a plurality of analysis values and measurement values; and a learning machine (605) that searches the database (604) and derives a first parameter that satisfies a target value of the second parameter.

In an inspection device having a storage unit and an exposure dose calculation unit, the exposure dose calculation unit executes a first step for calculating the dose when an image is acquired by irradiating radiation from a radiation generator based on the reference dose stored in the storage unit, a second step for calculating the dose when the relative position between the radiation generator and an inspection object is changed, a third step for calculating the total value of the dose irradiated to the inspection object, and a fourth step for outputting the total value.