A radiation imaging system includes a radiation imaging apparatus and an imaging control apparatus, the radiation imaging apparatus includes a dose detection pixel that detects a dose of radiation irradiated from a radiation source, and the imaging control apparatus controls the radiation imaging apparatus. Before radiation imaging, the imaging control apparatus specifies a position of the dose detection pixel in a region of interest for calculating a dose indicator value of a radiation image, determines a threshold according to the position of the dose detection pixel, and transmits the position of the dose detection pixel and the threshold to the radiation imaging apparatus. The radiation imaging apparatus makes a setting of the position of the dose detection pixel in the region of interest and the threshold transmitted from the imaging control apparatus, and performs imaging based on the setting.

The present disclosure provides a sample rotation system and method. The sample rotation system includes a rotation device, and the rotation device includes: a first carrier connected to a sample; a drive portion connected to the first carrier, wherein the drive portion is configured to drive the first carrier to rotate; and the first carrier drives the sample to rotate from an initial position to a target position; an acquisition device, configured to acquire a rotation state of the sample; and a control unit, electrically connected to the drive portion, and configured to control operation of the drive portion.

There is provided a system and method of measuring a lateral recess in a semiconductor specimen, comprising: obtaining a first image acquired by collecting SEs emitted from the surface of the specimen, and a second image acquired by collecting BSEs scattered from an interior region of the specimen between the surface and a target second layer, the specimen scanned using an electron beam with a landing energy selected to penetrate to a depth corresponding to the target second layer; generating a first GL waveform based on the first image, and a second GL waveform based on the second image; estimating a first width of the first layers based on the first GL waveform, and a second width with respect to at least the target second layer based on the second GL; and measuring a lateral recess based on the first width and the second width.

According to one embodiment, a charged-particle measurement apparatus comprising: a plurality of gas detectors in each of which gas for detecting passage of a charged particle is enclosed; a trajectory calculator configured to calculate a trajectory of the charged particle based on detection signals outputted from the gas detectors and each of the parameters associated with the gas detectors; a measurer configured to measure an object based on the trajectory of the charged particle, the object being a measurement target; a signal intensity acquirer configured to acquire signal intensity of the detection signals; an operating state monitor configured to evaluate the operating states of the gas detectors based on the signal intensity corresponding to the gas detectors; and a parameter updating processor configured to update at least one parameter when at least one of the operating states of the gas detectors associated with this parameter changes.

A metrology system is disclosed. In one embodiment, the metrology system includes a controller communicatively coupled to a reference metrology tool and an optical metrology tool, the controller including one or more processors configured to: generate a geometric model for determining a profile of a test HAR structure from metrology data from a reference metrology tool; generate a material model for determining one or more material parameters of a test HAR structure from metrology data from the optical metrology tool; form a composite model from the geometric model and the material model; measure at least one additional test HAR structure with the optical metrology tool; and determine a profile of the at least one additional test HAR structure based on the composite model and metrology data from the optical metrology tool associated with the at least one HAR test structure.

Described herein are examples of industrial radiography systems that enable rotation of a part about a custom axis that is offset from an actual rotation axis of a rotatable fixture that retains the part. This may be valuable in situations where it is difficult, impractical, and/or impossible to align the center of the part with the center of the rotatable fixture. In some examples, the custom axis rotation may be implemented on existing radiography machines, without requiring physical alteration of the radiography machines, integration of new components into the radiography machines, and/or risk of instability to the part and/or radiography machines.

There are described herein methods and system for generating an inspection image of an object from radiographic imaging. The method comprises obtaining a plurality of digital images of the object positioned between a radiation source and a photon beam detector, the digital images taken at different object-detector distances or source-detector distances to create unique grain diffraction patterns in each one of the digital images, and forming the inspection image from image features common to the digital images at a common scale and removing the unique grain diffraction patterns.

Disclosed is an X-ray image processing apparatus including a data obtaining unit generating first to N-th images indicating an internal structure of an object and an image processing unit receiving the first to N-th images from the data obtaining unit, detecting a movement of the object, and generating a final image from the first to N-th images based on the movement of the object. The data obtaining unit actively controls an X-ray pulse irradiated based on the movement of the object.

An example scan procedure generation system includes: a display; a processor; and a computer readable storage medium comprising computer readable instructions which, when executed, cause the processor to: output, via the display, a first visual representation of an arrangement of a radiation source, a radiation detector, a workpiece positioner, and a workpiece; and based on positions and orientations of the radiation source, the radiation detector, the workpiece positioner, and the workpiece, generate a scanning procedure for execution by a physical scanner having a physical radiation source, a physical radiation detector, and a physical workpiece positioner, wherein the generated scanning procedure comprises a plurality of movements of one or more of the physical radiation source, the physical radiation detector, and the physical workpiece positioner and a plurality of image captures to capture a plurality of scan images of a physical workpiece corresponding to the workpiece in the first virtual representation.

There is provided an acquiring method of a projection image of a sample whose shape is uneven with respect to a rotation center, the method comprising the steps of setting the sample S0 at a position of the rotation center C0 provided between an X-ray source 116a and a detector 117, and acquiring the projection image of the sample S0 at each different rotation angle for each different magnification ratio over a rotation angle of 180° or more by rotating the sample S0 around the rotation center C0, and by relatively changing a separation distance between the X-ray source and the rotation center, or a separation distance between the rotation center and the detector in an optical axis direction according to the shape of the sample S0 and the rotation angle of the sample S0.