An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.

An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.

An X-ray diffraction apparatus includes: an X-ray source (110); a first incident path letting the generated X-ray beam pass therethrough; a second incident path letting the generated X-ray beam be reflected by a multilayer film mirror and letting the reflected X-ray beam pass therethrough in parallel with the X-ray beam having passed through the first incident path. A movement mechanism is provided moving the X-ray source (110) between the first incident path and the second incident path while preserving respective relative positions thereof. An incident slit (160) allows an X-ray beam to be incident on a sample S pass therethrough; and a sample support stage (165) supports the sample S at a position fixed relative to the incident slit (160).

Apparatus include a reflector positioned adjacent to a sample location that is situated to receive a charged particle beam (CPB) along a CPB axis from a CPB focusing assembly so that the reflector is situated to receive light emitted from a sample at the sample location based on a CPB-sample interaction or a photon-sample interaction and to direct the light to a photodetector, and a steering electrode situated adjacent to the reflector so as to direct secondary charged particles emitted from the sample based on the CPB-sample interaction away from the reflector and CPB axis. Methods and systems are also disclosed.

An imaging system and detector for obtaining x-ray images of a region of interest (ROI) within an object is provided that does not require movement of the detector and/or object/patient for alignment with the x-ray source. The detector is formed with an array of detector elements disposed on a substrate that has an area larger than the area of the objects/patients to be imaged. In use, the object/patient is positioned between the x-ray source and the detector and the x-ray source is targeted at the ROI. The control mechanism determines the area of the detector aligned with the x-ray source and ROI and operates the selected detector elements in the area struck by the x-rays from the source passing through the ROI of the object/patient. The control mechanism receives image data from the area of the detector formed by the detector elements in order to form images of the ROI.

Provided are an image acquisition device and an image acquisition method capable of acquiring the internal and external contours of a measured object with a high degree of accuracy. An image acquisition device 1 includes: a first X-ray source 10 that applies X-rays having a first focal point size; a first detector 20 that detects X-rays applied from the first X-ray source 10 and having passed through a measured object O; a first image generation means 30 that generates a first X-ray CT image on the basis of the X-rays detected by the first detector 20; a second X-ray source 40 that applies X-rays having a second focal point size smaller than the first focal point size; a second detector 50 that detects X-rays applied from the second X-ray source and having passed through the measured object O; a second image generation means 60 that generates a second X-ray CT image on the basis of the X-rays detected by the second detector 50; and an image correction means 70 that corrects the first X-ray CT image generated by the first image generation means 30 on the basis of the second X-ray CT image generated by the second image generation means 60.

An X-ray diffraction apparatus includes: an X-ray source (110); a first incident path letting the generated X-ray beam pass therethrough; a second incident path letting the generated X-ray beam be reflected by a multilayer film mirror and letting the reflected X-ray beam pass therethrough in parallel with the X-ray beam having passed through the first incident path. A movement mechanism is provided moving the X-ray source (110) between the first incident path and the second incident path while preserving respective relative positions thereof. An incident slit (160) allows an X-ray beam to be incident on a sample S pass therethrough; and a sample support stage (165) supports the sample S at a position fixed relative to the incident slit (160).

Apparatus include a reflector positioned adjacent to a sample location that is situated to receive a charged particle beam (CPB) along a CPB axis from a CPB focusing assembly so that the reflector is situated to receive light emitted from a sample at the sample location based on a CPB-sample interaction or a photon-sample interaction and to direct the light to a photodetector, and a steering electrode situated adjacent to the reflector so as to direct secondary charged particles emitted from the sample based on the CPB-sample interaction away from the reflector and CPB axis. Methods and systems are also disclosed.

An imaging system and detector for obtaining x-ray images of a region of interest (ROI) within an object is provided that does not require movement of the detector and/or object/patient for alignment with the x-ray source. The detector is formed with an array of detector elements disposed on a substrate that has an area larger than the area of the objects/patients to be imaged. In use, the object/patient is positioned between the x-ray source and the detector and the x-ray source is targeted at the ROI. The control mechanism determines the area of the detector aligned with the x-ray source and ROI and operates the selected detector elements in the area struck by the x-rays from the source passing through the ROI of the object/patient. The control mechanism receives image data from the area of the detector formed by the detector elements in order to form images of the ROI.

Provided are an image acquisition device and an image acquisition method capable of acquiring the internal and external contours of a measured object with a high degree of accuracy. An image acquisition device 1 includes: a first X-ray source 10 that applies X-rays having a first focal point size; a first detector 20 that detects X-rays applied from the first X-ray source 10 and having passed through a measured object O; a first image generation means 30 that generates a first X-ray CT image on the basis of the X-rays detected by the first detector 20; a second X-ray source 40 that applies X-rays having a second focal point size smaller than the first focal point size; a second detector 50 that detects X-rays applied from the second X-ray source and having passed through the measured object O; a second image generation means 60 that generates a second X-ray CT image on the basis of the X-rays detected by the second detector 50; and an image correction means 70 that corrects the first X-ray CT image generated by the first image generation means 30 on the basis of the second X-ray CT image generated by the second image generation means 60.