Patent classifications
G01N2223/34
Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
An X-ray system includes, first and second X-ray channels (XCs), a spot sizer and a processor. The first XC is configured to: (i) direct a first X-ray beam for producing a spot on a surface of a sample, and (ii) produce a first signal responsively to a first X-ray radiation received from the surface. The spot sizer is positioned at a distance from the surface and is shaped and positioned to set the spot size by passing to the surface a portion of the first X-ray beam. The second XC is configured to: (i) direct a second X-ray beam to the surface, and (ii) produce a second signal responsively to a second X-ray radiation received from the surface, and the processor is configured to: (i) perform an analysis of the sample based on the first signal, and (ii) estimate the size of the spot based on the second signal.
METHOD FOR OPERATING AN X-RAY DEVICE
A method and device for operating an x-ray device including an x-ray emitter and an x-ray detector are provided. An alternating magnetic field is produced and emitted at the x-ray emitter. At least two sensors are included for capturing at least one physical variable correlating with the alternating magnetic field. An alignment of the x-ray detector relative to the x-ray emitter is determined based on the measurement.
Abnormality Detection Device and Fixing Structure
There is provided an abnormality detection device and a fixing structure which are suitable for detecting an abnormality of a fastener such as a bolt or a nut. An abnormality detection device detects an abnormality of a fixing structure including a bolt, a nut, and a washer which include a conductor and fix steel plates to each other, and a spacer which includes an insulator and is disposed between the steel plates and the washer, the abnormality detection device including: a transmission antenna that radiates electromagnetic waves to the fixing structure; a reception antenna that receives electromagnetic waves reflected by the fixing structure; and an abnormality detector that changes a frequency of the electromagnetic waves radiated from the transmission antenna to acquire frequency characteristics of standing waves received by the reception antenna and detects an abnormality of the fixing structure by comparing the frequency characteristics with frequency characteristics in a normal state.
Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
An X-ray system includes, first and second X-ray channels (XCs), a spot sizer and a processor. The first XC is configured to: (i) direct a first X-ray beam for producing a spot on a surface of a sample, and (ii) produce a first signal responsively to a first X-ray radiation received from the surface. The spot sizer is positioned at a distance from the surface and is shaped and positioned to set the spot size by passing to the surface a portion of the first X-ray beam. The second XC is configured to: (i) direct a second X-ray beam to the surface, and (ii) produce a second signal responsively to a second X-ray radiation received from the surface, and the processor is configured to: (i) perform an analysis of the sample based on the first signal, and (ii) estimate the size of the spot based on the second signal.
Method for operating an x-ray device
A method and device for operating an x-ray device including an x-ray emitter and an x-ray detector are provided. An alternating magnetic field is produced and emitted at the x-ray emitter. At least two sensors are included for capturing at least one physical variable correlating with the alternating magnetic field. An alignment of the x-ray detector relative to the x-ray emitter is determined based on the measurement.
X-RAY COMPUTED TOMOGRAPHY (CT) SCANNER
An X-ray computed tomography (CT) scanner includes a plurality of X-Ray sources and detectors mounted about an opening where scanning takes place. The X-Ray sources and detectors are arranged to oscillate back and forth in opposing first and second rotational directions about the opening, or in the same rotational direction about the opening, in order to generate a cross-sectional image of an object located within the opening.
Abnormality detection device and fixing structure
An abnormality detection device and a fixing structure which are suitable for detecting an abnormality of a fastener such as a bolt or a nut are disclosed. An abnormality detection device detects an abnormality of a fixing structure, which includes a conductor and which fix steel plates to each other, and a spacer which includes an insulator and which is disposed between the steel plates and the washer. The abnormality detection device includes a transmission antenna that radiates electromagnetic waves to the fixing structure, a reception antenna that receives electromagnetic waves reflected by the fixing structure, and an abnormality detector that changes a frequency of the electromagnetic waves radiated from the transmission antenna to acquire frequency characteristics of standing waves received by the reception antenna. The abnormality of the fixing structure is detected by comparing the frequency characteristics with frequency characteristics in a normal state.
GENERATION OF FUSED ENVIRONMENTAL AND COMPOSITIONAL INFORMATION
A compositional visualization system comprises a sensor to collect contextual information, a particle generator to generate a first stream of one or more types of particles, and a detector to receive a second stream of one or more detectable products. The second stream is generated by interaction of the first stream with the environment. The system further comprises computer-executable instructions to cause the system to transform the received second stream into compositional data, and merge the compositional data with the contextual information to generate a merged digital representation. The merged digital representation can be displayed at one or more devices and can also be used directly to drive autonomous robotic systems.