An object of the present invention is to improve the accuracy of clustering by avoiding detection of false clusters when automatically clustering points on a scatter diagram. A surface analyzer according to a first aspect of the present invention includes a measurement unit (1-2, 4-8) configured to acquire a signal reflecting a quantity of a plurality of components or elements that are analysis targets at a plurality of positions on a sample (3), a scatter diagram generation unit (92) configured to generate a binary scatter diagram based on a measurement result by the measurement unit, a clustering unit (94) configured to perform clustering of points in the binary scatter diagram using a method of a density-based clustering, and a parameter adjustment unit (93) configured to adjust a distance threshold by utilizing distribution information on a signal value of the components or the elements on either axis in the binary scatter diagram, the distance threshold being one of parameters to be set in the density-based clustering.

Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.

Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.

A method of enhancing a resolution of an EDS image of a sample includes generating an EDS image of the sample, generating a non-EDS image of the sample generating, using a machine learning algorithm, an enhanced resolution EDS image of the sample based on the generated feature map and based on the first EDS image, where a resolution of the enhanced resolution EDS image is higher than a resolution of the first EDS image.

The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over said sample. A first detector is used for detecting emissions of a first type from the sample in response to the beam scanned over the sample. Using spectral information of detected emissions of the first type, a plurality of mutually different phases are assigned to said sample. An image representation of said sample is provided, wherein said image representation contains different color hues. The color hues are selected from a pre-selected range of consecutive color hues in such a way that the selected color hues comprise mutually corresponding intervals within said pre-selected range of consecutive color hues.

Methods and systems for imaging a sample with a charged particle microscope comprises after scanning a region of interest (ROI) of a sample with an electron beam and acquiring X-rays emitted from the sample, scanning the ROI with an ion beam and acquiring ion-induced photons emitted from the sample. A spatial distribution of multiple elements in the sample may be determined based on both the acquired X-rays and the acquired ion-induced photons.

Provided is a scatter diagram display device that creates a plurality of scatter diagrams based on mapping data acquired by an analyzer and displays a scatter diagram matrix in which the created plurality of scatter diagrams are arranged in a matrix on a display section, the scatter diagram display device including: a display condition acceptance section that accepts a designation of a display range of an item in each of the plurality of scatter diagrams, and a display control section that extracts all scatter diagrams having the item whose display range has been designated from the plurality of scatter diagrams and changes the display range of the item in the extracted scatter diagrams based on the designation of the display range.

This disclosure presents systems and processes to collect elemental composition of target fluid and solid material located downhole of a borehole. Waveguides can be utilized that include capillary optics to deliver emitted high energy into a container or a conduit and then to detect the high energy. A source waveguide can be used to emit the high energy into the target fluid and a detector waveguide can collect resulting measurements. Each waveguide can include a protective sheath and a pressure cap on the end of the capillary optics that are proximate the target fluid, to protect against abrasion and target fluid pressure. In other aspects, a pulsed neutron tool can be utilized in place of the waveguides to collect measurements. The collected measurements can be utilized to generate chemical signature results that can be utilized to determine the elemental composition of the target fluid or of the solid material.

A data processing device is applied to an X-ray system which irradiates an object with continuous X-rays and processes data detected by a photon counting X-ray detection device. An n-dimensional vector corresponding to each of “n” energy regions set a spectrum of the continuous X-rays is calculated for each detector pixel based on the data. For each search region virtually set up based on one or more detector pixels, the n-dimensional vectors at the detector pixels belonging to each search pixel are mutually vector added in the n-dimensional space. The n-dimensional representative vector representing each of the plurality of search regions is calculated. Based on the representative vectors and an unit region having a desired size virtually set in a material space with coordinate information of the degree of attenuation of the X-rays, the information indicating the amount, type and properties of the material of the object is obtained.

Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.