An apparatus for inspecting a semiconductor device according to an embodiment includes an X-ray irradiation unit configured to make monochromatic X-rays obliquely incident on the semiconductor device, which is an object at a predetermined angle of incidence, a detection unit configured to detect observed X-rays observed from the object using a plurality of two-dimensionally disposed photodetection elements, an analysis apparatus configured to generate X-ray diffraction images obtained by photoelectrically converting the observed X-rays, and a control unit configured to change an angle of incidence and a detection angle of the X-rays, in which the analysis apparatus acquires an X-ray diffraction image every time the angle of incidence is changed, extracts a peak X-ray diffraction image, X-ray intensity of which becomes maximum for each of pixels and compares the peak X-ray diffraction image among the pixels to thereby estimate a stress distribution of the object.

The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over said sample. A first detector is used for detecting emissions of a first type from the sample in response to the beam scanned over the sample. Using spectral information of detected emissions of the first type, a plurality of mutually different phases are assigned to said sample. An image representation of said sample is provided, wherein said image representation contains different color hues. The color hues are selected from a pre-selected range of consecutive color hues in such a way that the selected color hues comprise mutually corresponding intervals within said pre-selected range of consecutive color hues.

Provided is a method for determining an atom using four-color X-ray equipment capable of determining which group an atom having a greatest atomic number among atoms constituting a material belongs on the periodic table.

In an approach to X-ray inspection image display systems, a colorized X-ray inspection image is received comprising a monochrome X-ray inspection image that is colorized in accordance with an X-ray inspection system false colorization scheme. The colorized X-ray inspection image is filtered by performing pixel shading on the colorized X-ray inspection image to generate a custom colorized X-ray inspection image having a custom false colorization scheme that is different from the X-ray inspection system false colorization scheme.

An image processing apparatus generates a plurality of attenuation rate images using a plurality of radiation images corresponding to a plurality of different radiation energies obtained by irradiating an object with radiation, corrects the radiation images or the attenuation rate images so as to reduce an error of an attenuation rate caused depending on at least one of a dose of the radiation, a thickness of the object, and energy of the radiation, and generates a material characteristic image by energy subtraction processing using the plurality of attenuation rate images after the correction.

An apparatus for inspecting a semiconductor device according to an embodiment includes an X-ray irradiation unit configured to make monochromatic X-rays obliquely incident on the semiconductor device, which is an object at a predetermined angle of incidence, a detection unit configured to detect observed X-rays observed from the object using a plurality of two-dimensionally disposed photodetection elements, an analysis apparatus configured to generate X-ray diffraction images obtained by photoelectrically converting the observed X-rays, and a control unit configured to change an angle of incidence and a detection angle of the X-rays, in which the analysis apparatus acquires an X-ray diffraction image every time the angle of incidence is changed, extracts a peak X-ray diffraction image, X-ray intensity of which becomes maximum for each of pixels and compares the peak X-ray diffraction image among the pixels to thereby estimate a stress distribution of the object.

A method for generating an x-ray image in color includes selecting three-sets of x-ray images in gray scale acquired with x-rays having different energy spectra, assigning basic colors RGB to the three-sets, and displaying the x-ray image in color with RGB signals generated. A system for generating an x-ray image in color includes an x-ray generator configured to generate at least three sets of x-rays with different energy spectra, an x-ray detector, a controller, a computer, and a color display. The computer is configured to generate three sets of x-ray images from output data of the x-ray detector acquired for x-rays with different energy spectra, assign RGB and display an x-ray image in color. A non-transitory computer readable medium stores an instruction, when the instruction is executed by a processor, cause the processor to perform the method for generating an x-ray image in color.

Provided are a defect display device and method capable of displaying a radiographic image of an industrial product (object) such as a casting so as to support the determination of the severity of the industrial product without interference with the interpretation of the radiographic image. The defect display device includes an image acquisition unit that acquires a radiographic image captured with radiation transmitted through an object, a defect information acquisition unit that acquires defect information indicating defects in the object detected from the radiographic image, a display unit that displays the radiographic image on a screen, an input unit that accepts an instruction input from a user, and a display control unit that generates, based on the defect information, a contour corresponding to a distribution of a plurality of defects among the defects in the object, displays the contour on the screen, and changes display of the contour in accordance with a generation condition of contour accepted through the input unit.

The invention relates to a method of examining a sample using a charged particle microscope, comprising the steps of providing a charged particle beam, as well as a sample, and scanning said charged particle beam over said sample. A first detector is used for detecting emissions of a first type from the sample in response to the beam scanned over the sample. Using spectral information of detected emissions of the first type, a plurality of mutually different phases are assigned to said sample. An image representation of said sample is provided, wherein said image representation contains different color hues. The color hues are selected from a pre-selected range of consecutive color hues in such a way that the selected color hues comprise mutually corresponding intervals within said pre-selected range of consecutive color hues.

A method for generating an x-ray image in color includes selecting three-sets of x-ray images in gray scale acquired with x-rays having different energy spectra, assigning basic colors RGB to the three-sets, and displaying the x-ray image in color with RGB signals generated. A system for generating an x-ray image in color includes an x-ray generator configured to generate at least three sets of x-rays with different energy spectra, an x-ray detector, a controller, a computer, and a color display. The computer is configured to generate three sets of x-ray images from output data of the x-ray detector acquired for x-rays with different energy spectra, assign RGB and display an x-ray image in color. A non-transitory computer readable medium stores an instruction, when the instruction is executed by a processor, cause the processor to perform the method for generating an x-ray image in color.