G
PHYSICS
G
PHYSICS
G01
MEASURING; TESTING
G01
MEASURING; TESTING
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223/00
Investigating materials by wave or particle radiation
2223/00
Investigating materials by wave or particle radiation
G01N2223/60
Specific applications or type of materials
G01N2223/60
Specific applications or type of materials
G01N2223/611
patterned objects; electronic devices
G01N2223/611
patterned objects; electronic devices