Disclosed sensors can include at least one resonator (in some embodiments, at least two resonators) and various other structures that may be formed in association with the resonators. The at least one resonator in embodiments can include a bottom electrode, a piezoelectric layer, and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode.

Devices that includes a first portion, the first portion including at least one fluid channel; a fluid actuator; an analysis sensor disposed within the fluid channel; a conductivity sensor disposed within the fluid channel; and an introducer; a second portion, the second portion comprising: at least one well, the well containing at least one material, wherein one of the first or second portion is moveable with respect to the other, wherein the introducer is configured to obtain at least a portion of the material from the at least one well and deliver it to the fluid channel, and wherein the fluid actuator is configured to move at least a portion of the material in the fluid channel.

A solid mount resonator sensor has a substrate. An anti-reflector stack is disposed proximate the substrate. The anti-reflector stack includes one or more acoustic interference layers. A first electrode is disposed proximate the anti-reflector stack. A second electrode having a first surface facing towards the first electrode and an opposing second surface facing away from the first electrode. A substantially quarter-wave piezoelectric material layer is disposed between the first and second electrodes.

A sensor module includes a sensor configured to detect a specific substance in a sample, a first channel, and a second channel The first channel supplies a first fluid as the sample to the sensor. The second channel supplies a second fluid different from the first fluid to the sensor. The second channel includes a second fluid buffer tank for holding the second fluid for a fixed time interval.

A connector assembly and method of attaching the same to one or more biosensor module boards. The connector assembly includes a body portion defining a first surface and a second surface opposite the first surface. The connector assembly also includes a coaxial RF connector positioned in the body portion and extending between the first surface and the second surface. The coaxial RF connector includes a ground ring, an RF pin positioned within the ground ring, and dielectric therebetween. The connector assembly is configured to be coupled to an RF detection board such that the coaxial RF connector is operably coupled thereto. The connector assembly is also configured to be connected to a biosensor module board such that the coaxial RF connector is operably connected thereto.

A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

A fluidic device and a method of preventing isolation material from bleed-out therein is described herein. The fluidic device includes a bulk acoustic wave resonator structure defining at least one surface area region on which a functionalization material is disposed and the resonator structure includes a repelling area. The fluidic device also includes isolation material disposed on the resonator structure and away from the at least one surface area region. The repelling area is configured to prevent the isolation material from extending into the at least one surface area region. Further, an electronic board may be operably attached to the resonator structure and the isolation material may be disposed in a gap therebetween to electrically isolate electrical contacts and form a fluidic channel.

A gas detection device according to an embodiment of the present invention includes a casing and a plurality of sensor elements. The casing includes a gas introducing port, a first chamber that communicates with the introducing port, a second chamber that communicates with the first chamber, a flow limiter that limits a flow of gas from the first chamber to the second chamber, and a gas exhausting portion that communicates with the second chamber. The plurality of sensor elements are disposed within the second chamber and have different detection sensitivities depending on a gas type.

Examples of the disclosure relate to a transducer array. The transducer array includes a monolithic crystal, a first array of electrodes provided on a first surface of the monolithic crystal, and a second array of electrodes provided on a second surface of the monolithic crystal. The second surface is an opposing surface to the first surface. The transducer array also comprises a plurality of oscillators wherein the plurality of oscillators include sections of the monolithic crystal that are positioned between opposing portions of an electrode from the first array and portions of an electrode from the second array.

A gas sensor (100,200) includes at least one sensor device including a surface acoustic wave (SAW) device (110) or a quartz crystal microbalance (QCM) device (210), and a layer of metal organic framework (MOF) material (120,220) disposed on each of the at least one sensor device. The at least one sensor device is structured to sense a change in mass of the MOF material.