An X-ray imaging system (XI) configured for phase contrast and/or dark-field imaging The system comprises an X-ray source (XS) operable to cause X-radiation to emanate from a focal spot (SF) of the source (XS) and an X-ray sensitive detector (D) operable to SMF detect the X-radiation after interaction of said X-radiation with an object to be imaged, if present, between the X-ray source and the detector (D). A control logic (CL) is operable to cause the X-ray imaging apparatus to operate in any one of two modes, an object image acquisition mode and a scattering measurement mode. When in scattering measurement mode, the X-radiation receivable at the detector comprises a higher proportion of scattering radiation than in X-radiation receivable when the system is in object image acquisition mode.

Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.

A sample inspection system and a corresponding method for inspecting a sample is provided. The sample inspection system includes a beam former, a beam modulator an energy resolving detector and a collimator. The beam former is adapted to receive an electromagnetic radiation from an electromagnetic source to generate a primary beam of electromagnetic radiation. The beam modulator is provided at a distance from the beam former to define a sample chamber. The collimator is provided between the beam modulator and the energy resolving detector. The collimator has a plurality of channels adapted to receive diffracted or scattered radiation. Upon incidence of the primary beam onto the beam modulator, the beam modulator provides a reference beam of diffracted or scattered radiation. The energy resolving detector is arranged to detect the reference beam.

An observation apparatus and method that avoids drawbacks of a Lorentz method and observes a weak scatterer or a phase object with in-focus, high resolution, and no azimuth dependency, by a Foucault method observation using a hollow-cone illumination that orbits and illuminates an incident electron beam having a predetermined inclination angle, an electron wave is converged at a position (height) of an aperture plate downstream of a sample, and a bright field condition in which a direct transmitted electron wave of the sample passes through the aperture plate, a dark field condition in which the transmitted electron wave is shielded, and a Schlieren condition in which approximately half of the transmitted wave is shielded as a boundary condition of both of the above conditions are controlled, and a spatial resolution of the observation image is controlled by selecting multiple diameters and shapes of the opening of the aperture plate.

Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.

A sample inspection system contains a source of electromagnetic radiation and an apparatus that includes a beam former, a collimator and an energy resolving detector. The beam former is adapted to receive electromagnetic radiation from the source to provide a polygonal shell beam formed of at least three walls of electromagnetic radiation. The collimator has a plurality of channels adapted to receive diffracted or scattered radiation at an angle. The energy resolving detector is arranged to detect radiation diffracted or scattered by a sample upon incidence of the polygonal shell beam onto the sample and transmitted by the collimator.

An x-ray system, comprising: a backscatter detector, comprising: an x-ray conversion material; a plurality of sensors configured to generate electrical signals in combination with the x-ray conversion material in response to incident x-rays; and a collimator disposed on the x-ray conversion material and including a plurality of partitions extending away from the x-ray conversion material and the sensors and forming a plurality of openings, each opening corresponding to one of the sensors.

A sample inspection system and a corresponding method for inspecting a sample is provided. The sample inspection system includes a beam former, a beam modulator an energy resolving detector and a collimator. The beam former is adapted to receive an electromagnetic radiation from an electromagnetic source to generate a primary beam of electromagnetic radiation. The beam modulator is provided at a distance from the beam former to define a sample chamber. The collimator is provided between the beam modulator and the energy resolving detector. The collimator has a plurality of channels adapted to receive diffracted or scattered radiation. Upon incidence of the primary beam onto the beam modulator, the beam modulator provides a reference beam of diffracted or scattered radiation. The energy resolving detector is arranged to detect the reference beam.

Embodiments of the present disclosure disclose a combined scanning X-ray generator, a composite inspection apparatus and an inspection method. The combined scanning X-ray generator includes: a housing; an anode arranged in the housing, the anode including a first end of the anode and a second end of the anode opposite the first end of the anode; a pencil beam radiation source arranged at the first end of the anode and configured to emit a pencil X-ray beam; and a fan beam radiation source arranged at the second end of the anode and configured to emit a fan X-ray beam; wherein the pencil beam radiation source and the fan beam radiation source are operated independently.

In one aspect, a process for characterizing a range of materials based on the scattering and stopping of incident cosmic ray charged particles passing through each material includes: determining a scattering metric and a stopping metric for each material within the range of materials exposed to cosmic ray charged particles; computing a ratio of the scattering metric to the stopping metric to obtain a scattering-to-stopping ratio for each material within the range of materials for the material; and establishing a scattering-stopping relationship for the range of materials based on the determined pairs of the scattering-to-stopping ratio and the associated scattering metric for the range of materials.