The apparatus for inspecting the electrostatic chuck for substrate processing includes the electrostatic chuck including a ceramic layer and an electrode layer coupled to an inside of the ceramic layer, an ultrasonic sensor unit disposed on the electrostatic chuck, allowing an ultrasonic wave to be incident into the electrostatic chuck, and converting a reflected signal reflected through the electrostatic chuck into an ultrasonic voltage signal, and an ultrasonic inspection unit to divide the ceramic layer and the electrode layer, based on a size value of the ultrasonic voltage signal.

A method for super-resolution photoacoustic microscopy of an object. The method includes optically exciting the object according to a plurality of excitation patterns utilizing a digital micromirror device (DMD), receiving a plurality of acoustic waves propagated from the object due to optically exciting the object, reconstructing each of a plurality of photoacoustic (PA) images from a respective acoustic wave of the plurality of acoustic waves, and obtaining a super-resolution PA image of the object from the plurality of PA images by applying a frequency domain reconstruction method to the plurality of PA images. Each of the plurality of acoustic waves are associated with a respective excitation pattern of the plurality of excitation patterns.

The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.

The invention relates to a wafer chuck for handling a wafer, in particular in a wafer process device, further preferably in a scanning acoustic microscope, with a fixing device for the wafer, wherein the fixing device has a free space for receiving the wafer and a holder with multiple wafer contact fingers, which are movable relative to the holder for a wafer. The wafer contact fingers are arranged annularly around the free space for the wafer, preferably in one plane. The wafer contact fingers can be moved in the direction of the free space for the wafer or can be moved away from the free space for the wafer. One actuation device for the wafer contact fingers is provided and, when the actuation device is actuated, the wafer contact fingers are moved or can be moved simultaneously.

The present document relates to a method to determine dimensions of features of a subsurface topography of a sample, the features having a spatial periodicity. The subsurface topography is obtained using scanning probe microscopy. The method includes obtaining measurement values of an acoustic output signal in at least N locations and generating a location dependent subsurface topography signal. The method further comprises providing an autocorrelation matrix by performing a cross-correlation of the subsurface topography signal in respect of each further location to yield the autocorrelation matrix having size N*N. Thereafter, the method includes performing an Eigenvalue decomposition for obtaining Eigenvalues of the matrix, and selecting a subset of Eigenvalues having the largest values. From these a frequency estimation function is constructed and at least one output value indicative of the spatial periodicity is obtained therefrom. The document also describes a scanning probe microscopy system and a computer program product.

In a method and apparatus for automated inspection, an image is acquired of an object under inspection and a difference image is generated showing the difference between the acquired image and a reference image of a defect-free object of the same type. Characteristics of the difference image, or detected isolated regions of the difference image, are passed to an automated defect classifier to classify defects in the object under inspection. The characteristics of the difference image may be pixels of the difference image or features determined therefrom. The features may be extracted using a neural network, for example. The automated defect classifier is trained using difference images and may be further trained, in operation, based on operator classifications and using simulated images of defects identified by an operator.

A system and methods of nondestructive testing are described. The system includes an immersion ultrasonic probe and a laser vibrometer. The immersion ultrasonic probe and a sample are immersed in a fluid contained in an immersion tank and the laser vibrometer is disposed outside of the immersion tank. A tightly focused ultrasonic beam from the immersion ultrasonic probe and a laser beam from the laser vibrometer are both transmitted upon a sample, the laser beam being transmitted through the wall of the immersion tank. Since the ultrasonic beam is tightly focused and the laser beam samples only a small area impinged by the ultrasonic beam, microscopic resolution is obtained.

An Oblique Backscatter Ultrasound imaging system includes a transceiver that has an US source and a plurality of US detectors configured in receive signals off axis from the US source. While the system is arranged in a reflective configuration, the device produces transmissive contrast signals to yield improved images. The transceiver can be mounted to a movable stage or robotic arm to enable it to scan the surface of a target. Alternatively, scanning can be performed by 1D or 2D phased-array transmission or detection.

A system and method for using a microscope to at least haptically observe a specimen in a fluid is provided. In one embodiment of the present invention, an audio frequency modulation sensing (AFMS) device is used to convert an optical signal from the specimen into an electrical signal. A haptic feedback device is then used to convert the electrical signal in at least vibrations, thereby providing a user with haptic feedback associated with the optical signal from the specimen. In another embodiment, a second electrical signal can be provided to a second haptic feedback (e.g., shaker, piezo electric, electric current inducing, etc.) device in the fluid, thereby allowing for bidirectional haptic feedback between the user and the specimen. In other embodiments, aural data can be extracted from the electrical signal and presented to the user either alone in in synchronization with video data (e.g., from a video camera).

A diffuse acoustic confocal imager device for use with a data analyzer for providing a three dimensional and state information on an object based on an at least one phase image, the device comprising a coherent acoustic source for producing an acoustic confocal beam ranging from about 0.5 megahertz to about 100 megahertz, an acoustic coherent beam focuser for focusing the acoustic coherent beam to a virtual source, an acoustic detector for detecting an at least one diffusely scattered beam from the virtual source and a vector network analyzer, which is for measuring a phase of the acoustic confocal beam and a phase of the at least one diffusely scattered beam to provide the at least one phase image, the vector network analyzer in electronic communication with each of the coherent acoustic source and the acoustic detector. A method of detecting and treating diseases such as prostate cancer and ovarian cancer is also provided.