A gas-detecting apparatus includes a pump module connected to a first input and a second input to intake air, a sensor module including at least one unit sensor configured to output a sensing signal in response to gas present in the air, and a control module configured to detect the gas using the sensing signal. The control module controls the pump module to intake second air by opening the second input when gas is detected in first air introduced through the first input, and determines that gas is detected when a concentration of gas detected in the second air is lower than a concentration of gas detected in the first air.

A method is provided for operating a gas concentration monitoring system as well as a gas-measuring device, a central unit, a gas concentration monitoring system as well as computer program product. The safety of persons or the safety of a situation is determined with respect to at least one hazardous gas. The concentration of the gas is provided to a memory and analysis device. A measured value rating number is determined for a preset period of use. A number of instances, of the measured concentration values exceeding of a preset gas concentration limit value is input. A safety code is determined from at least one of: the measured concentration values, the measured value rating numbers and from the a total number of instances in which a gas concentration limit value was exceeded.

An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

A system for assessing an indoor space for favorable conditions for the transmission of a viral particle is disclosed. A set of sensors measure a set of environmental parameters, and a processor is configured to combine the measured set of environmental parameters into a single scale of numerical or descriptive value representing the favorability of viral transmission in the indoor space.

A system for assessing an indoor space for favorable conditions for the transmission of a viral particle is disclosed. A set of sensors measure a set of environmental parameters, and a processor is configured to combine the measured set of environmental parameters into a single scale of numerical or descriptive value representing the favorability of viral transmission in the indoor space.

Systems, apparatuses, and methods for monitoring an environment are provided. One system includes a monitoring unit positioned within an environment and including an acoustic sensor configured to generate detected acoustic data regarding acoustics in the environment, and a controller having one or more processors and one or more non-transitory memory devices that store instructions for controlling the one or more first processors to receive and store the detected acoustic data, determine, based on the detected acoustic data, whether a noise is above a threshold, and determine, based on the detected acoustic data and that the noise is above the threshold, an estimated source of the noise.

A process and a system for monitoring at least one concentration of a gas in a monitored area includes generating data by a mobile gas measuring device (3a), whose position in the monitored area is determined or is known and transmitting the data directly or indirectly to a central data processing unit (1). The data are compared with at least one limit value, and an information signal is outputted by the at least one mobile gas measuring device and/or by the central data processing unit in case of an undershooting or overshooting of the limit value. The monitored area is divided into at least two zones (8) and zone-specific parameters are assigned to the zones. A functionality of the mobile gas measuring device is set and/or changed based on the current position of the gas measuring device and based on at least one of the zone-specific parameters.

The present invention relates to A method to detect a specific chemical substance in an environment, the method comprising:—providing a sensing layer adapted to sense the specific chemical substance;—providing a substrate layer, the substrate layer comprising a single-use wireless transmitter;—attaching the sensing layer to the substrate layer so as to form a sensing module;—detecting the amount of the specific chemical substance in the environment by means of the sensing layer;—if the amount of the specific chemical substance is above or below a first threshold, sending data representative of the sensed specific chemical substance to a receiving device using the wireless transmitter. The invention also relates to a sensing module and a kit to measure the specific chemical substance.

A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

Embodiments relate generally to systems and methods for gas detection. A method may comprise operating a gas detector with a first alarm setting comprising a first predefined threshold; receiving sensed data of oxygen content in the ambient air; when the sensed data is below the first predefined threshold, activating an alarm; generating an acknowledgement request asking if the gas detector has entered an inert work zone; receiving a response from the user acknowledging that the gas detector has entered an inert work zone; deactivating the alarm; changing the alarm settings of the gas detector to a second alarm setting comprising a second predefined threshold; continuing to receive sensed data of oxygen content in the ambient air; when the sensed data is above the second predefined threshold, activating an alarm; and generating an acknowledgement request for the user asking if the gas detector has entered a normal operation work zone.