Improvements in thin film sensors are disclosed. These can be used for aircraft applications. Dielectric isolation washers can be provided between a pressure sensor and an exterior metal housing of a sensor assembly. In this manner, high voltage inputs from a lightning strike or other source that reach the sensor housing are not transmitted to the sensor. Dielectric washers, insulators, and potting compounds can thus isolate a metal thin film pressure sensor from adjacent metal components (e.g., using non-conducting insulating materials like Torlon, zirconia and nylon). Besides their high dielectric strength, these materials exhibit compressive strength and resistance to wear, creep and corrosion. Desirable thicknesses for these components are provided. The described thin film pressure sensor embodiments can attain a dielectric rating of 1500 VAC.

A laser processing system that can effectively blow out a material of a workpiece melted by a laser beam by effectively utilizing an assist gas emitted from a nozzle. The laser processing system comprises a nozzle including an emission opening configured to emit a jet of an assist gas along an optical axis of a laser beam, the nozzle being configured to forming a maximum point of velocity of the jet at a position away from the emission opening; a measuring instrument configured to measure the velocity of the jet; and a position acquisition section configured to acquire information representing a position of the maximum point based on output data of the measuring instrument.

The inventive concept provides a wafer type sensor unit which acquires data on a wind direction and a wind velocity of an air flow during processing, the wafer type sensor unit supported by a supporting unit of a substrate processing apparatus. The unit comprising a wafer-shaped circuit board and a hot-wired wind velocity sensor placed apart from an upper surface of the circuit board.

The inventive concept provides a wafer type sensor unit which acquires data on a wind direction and a wind velocity of an air flow during processing, the wafer type sensor unit supported by a supporting unit of a substrate processing apparatus. The unit comprising a wafer-shaped circuit board and a hot-wired wind velocity sensor placed apart from an upper surface of the circuit board.

A sensor component and a mobile communication device including a sensor component are disclosed. In an embodiment a sensor component includes a subcomponent configured to sense a gas level including a resistive heater and a gas sensitive element disposed on the resistive heater; a package enclosing a cavity and accommodating the subcomponent, the package including a first opening in a position facing the gas sensitive element of the subcomponent and a second opening configured to allow a flow of gas to enter the package through the first opening and exit the package through the second opening; and an evaluation circuit configured to generate an output signal indicative of a speed of the flow of gas in response to electrical power to be supplied to the resistive heater.

A sensor component and a mobile communication device including a sensor component are disclosed. In an embodiment a sensor component includes a subcomponent configured to sense a gas level including a resistive heater and a gas sensitive element disposed on the resistive heater; a package enclosing a cavity and accommodating the subcomponent, the package including a first opening in a position facing the gas sensitive element of the subcomponent and a second opening configured to allow a flow of gas to enter the package through the first opening and exit the package through the second opening; and an evaluation circuit configured to generate an output signal indicative of a speed of the flow of gas in response to electrical power to be supplied to the resistive heater.

An object of the present invention is to provide a sensor unit that can detect a wide range of physical quantity changes with a higher degree of freedom than in the conventional art and is capable of reporting detection information, and a multiple-type sensor using the sensor unit. A flow sensor in the present invention includes a board, a sensor that is arranged on the board and detects a physical quantity change, a plurality of external connection terminals that are electrically connected to the sensor, and a reporting part that reports detection information of the sensor to the outside. In the present invention, a wide range of physical quantity changes can be detected with a higher degree of freedom. Connecting a plurality of sensor units enables use for various applications.

An object of the present invention is to provide a sensor unit that can detect a wide range of physical quantity changes with a higher degree of freedom than in the conventional art and is capable of reporting detection information, and a multiple-type sensor using the sensor unit. A flow sensor in the present invention includes a board, a sensor that is arranged on the board and detects a physical quantity change, a plurality of external connection terminals that are electrically connected to the sensor, and a reporting part that reports detection information of the sensor to the outside. In the present invention, a wide range of physical quantity changes can be detected with a higher degree of freedom. Connecting a plurality of sensor units enables use for various applications.

A method for measuring a windspeed vector is described. A true airspeed vector of a flying machine is measured while the machine is in flight using one or more nanowires on the flying machine. Each nanowire is configured to measure a value of local air velocity relative to the flying machine. A velocity of the flying machine relative to the ground is measured while the machine is in flight, and then (a) the true airspeed vector is subtracted from (b) the velocity of the flying machine relative to the ground. Other applications are also described.

A method for measuring a windspeed vector is described. A true airspeed vector of a flying machine is measured while the machine is in flight using one or more nanowires on the flying machine. Each nanowire is configured to measure a value of local air velocity relative to the flying machine. A velocity of the flying machine relative to the ground is measured while the machine is in flight, and then (a) the true airspeed vector is subtracted from (b) the velocity of the flying machine relative to the ground. Other applications are also described.