A holder system for a scanning probe microscope, including a holder and a fixer. The holder includes a holder top surface, and a holder sidewall. The holder top surface is configured to hold a sample. The holder sidewall extends from the holder top surface. The fixer includes a fixer fixing portion, and a fixer connecting portion. The fixer fixing portion is configured to affix the sample to the holder top surface. The fixer connecting portion is connected to the fixer fixing portion, and is affixed to the holder sidewall. An area to-be-tested of the sample is exposed to the fixer fixing portion.

A holder system for a scanning probe microscope, including a holder and a fixer. The holder includes a holder top surface, and a holder sidewall. The holder top surface is configured to hold a sample. The holder sidewall extends from the holder top surface. The fixer includes a fixer fixing portion, and a fixer connecting portion. The fixer fixing portion is configured to affix the sample to the holder top surface. The fixer connecting portion is connected to the fixer fixing portion, and is affixed to the holder sidewall. An area to-be-tested of the sample is exposed to the fixer fixing portion.

A surface analysis device is provided with a sample stage for placing a sample thereon, a cantilever to be arranged to face the sample stage, and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to a measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the stage in a direction intersecting with the first direction.

A surface analysis device is provided with a sample stage for placing a sample thereon, a cantilever to be arranged to face the sample stage, and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to a measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the stage in a direction intersecting with the first direction.

The present invention discloses a method of preparing a specimen for scanning capacitance microscopy, comprising the steps of: providing a sample including at least one object to be analyzed; manually grinding the sample from an edge of the sample toward a target region containing the object to be analyzed gradually, and stopping at a distance of dl from a longitudinal section of the at least one object to be analyzed in the target region to form a grinding stopping surface; cutting the grinding stopping surface by a plasma focused ion beam equipped with a scanning electron microscopy toward the target region and stopping at a distance of d2 from the longitudinal section to form a cutting stopping surface, wherein 0<d2<d1; and manually grinding to polish the cutting stopping surface and gradually remove the part of the sample between the longitudinal section and the cutting stopping surface to expose the longitudinal section of the at least one object to be analyzed, and complete the preparation of a specimen for scanning capacitance microscopy.

The present invention discloses a method of preparing a specimen for scanning capacitance microscopy, comprising the steps of: providing a sample including at least one object to be analyzed; manually grinding the sample from an edge of the sample toward a target region containing the object to be analyzed gradually, and stopping at a distance of dl from a longitudinal section of the at least one object to be analyzed in the target region to form a grinding stopping surface; cutting the grinding stopping surface by a plasma focused ion beam equipped with a scanning electron microscopy toward the target region and stopping at a distance of d2 from the longitudinal section to form a cutting stopping surface, wherein 0<d2<d1; and manually grinding to polish the cutting stopping surface and gradually remove the part of the sample between the longitudinal section and the cutting stopping surface to expose the longitudinal section of the at least one object to be analyzed, and complete the preparation of a specimen for scanning capacitance microscopy.

A holder system for a scanning probe microscope, including a holder and a fixer. The holder includes a holder top surface, and a holder sidewall. The holder top surface is configured to hold a sample. The holder sidewall extends from the holder top surface. The fixer includes a fixer fixing portion, and a fixer connecting portion. The fixer fixing portion is configured to affix the sample to the holder top surface. The fixer connecting portion is connected to the fixer fixing portion, and is affixed to the holder sidewall. An area to-be-tested of the sample is exposed to the fixer fixing portion.

A holder system for a scanning probe microscope, including a holder and a fixer. The holder includes a holder top surface, and a holder sidewall. The holder top surface is configured to hold a sample. The holder sidewall extends from the holder top surface. The fixer includes a fixer fixing portion, and a fixer connecting portion. The fixer fixing portion is configured to affix the sample to the holder top surface. The fixer connecting portion is connected to the fixer fixing portion, and is affixed to the holder sidewall. An area to-be-tested of the sample is exposed to the fixer fixing portion.

An apparatus, including: a scanning probe microscope head with a frame configured to fit within an insert of a cryostat, and a scanner, a probe and a sample holder all disposed within the frame; and a coarse motor assembly disposed within the frame and comprising: a positionable component; and coarse motors. The coarse motors are configured to move the positionable component relative to the frame along an X axis, a Y axis, and a Z axis. The apparatus further includes a universal electrical base connection with half of a plug/socket arrangement. The plug/socket arrangement is configured to provide electrical communication between the scanning probe microscope head and a base which has a second half of the plug/socket arrangement when the scanning probe microscope head is lowered onto the base.

An apparatus, including: a scanning probe microscope head with a frame configured to fit within an insert of a cryostat, and a scanner, a probe and a sample holder all disposed within the frame; and a coarse motor assembly disposed within the frame and comprising: a positionable component; and coarse motors. The coarse motors are configured to move the positionable component relative to the frame along an X axis, a Y axis, and a Z axis. The apparatus further includes a universal electrical base connection with half of a plug/socket arrangement. The plug/socket arrangement is configured to provide electrical communication between the scanning probe microscope head and a base which has a second half of the plug/socket arrangement when the scanning probe microscope head is lowered onto the base.