The present invention provides an over the air, OTA, power sensor (1, 20, 50) for measuring power of a wireless signal (2, 21) with at least two different polarizations, the OTA power sensor (1, 20, 50) comprising a first power sensor (3, 4, 22, 23, 51, 52) for every polarization, every power sensor comprising a signal detector (5, 6, 25, 26, 27) for detecting the wireless signal (2, 21), wherein the signal detectors (5, 6, 25, 26, 27) are single polarized and wherein the polarization planes (7, 8, 28-30) of the signal detectors (5, 6, 25, 26, 27) are arranged at an angle of more than zero degree to each other and wherein the main radiation vectors (9, 10, 31-33) of the signal detectors (5, 6, 25, 26, 27) are parallel to each other, and the first power sensors (3, 4, 22, 23, 51, 52) each comprising a power measurement device (11, 12, 43-45), which is configured to measure the power of the detected wireless signal (2, 21) and output a respective measurement signal (13, 14, 46-48, 55-58). Further, the present patent application provides a respective method.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

The invention provides an in-line power monitor for an RF transmission line that is capable of being calibrated in-line during live conditions at the exact power level and frequency where it is used. This device uses forward and reflected directional couplers and a non-directional coupler to sample the RF voltage on the transmission line. The RF voltage of the forward and reflected channels are each split into two paths, one going to a test port and the other leading to additional circuitry which prepares the signals of the forward and reflected channels for output to power displays. Additionally, the monitor allows the user to compensate for any voltage offsets introduced by various circuitry components. Further, the monitor also allows to user to individually calibrate the output of the forward and reflected channels by applying an adjustable gain ratio correction to each channel.

The invention provides an in-line power monitor for an RF transmission line that is capable of being calibrated in-line during live conditions at the exact power level and frequency where it is used. This device uses forward and reflected directional couplers and a non-directional coupler to sample the RF voltage on the transmission line. The RF voltage of the forward and reflected channels are each split into two paths, one going to a test port and the other leading to additional circuitry which prepares the signals of the forward and reflected channels for output to power displays. Additionally, the monitor allows the user to compensate for any voltage offsets introduced by various circuitry components. Further, the monitor also allows to user to individually calibrate the output of the forward and reflected channels by applying an adjustable gain ratio correction to each channel.

An electrostatic encoder (40) detects the rotation angle of a rotor (42) with great accuracy based on the change in the capacitance between electrodes arranged on a stator (41) and the rotor (42). Detection electrodes (44a to 44d) and transmission electrodes (45a to 45d) are arranged circumferentially and alternately on the stator (41). Detection signals (phase A, phase B) amplitude-modulated based on the rotation of the rotor (42) and having a mutual phase difference of 90 degrees are output from adjacent ones of the detection electrodes. Modulated signals (V1, V2) are generated by demodulating the detection signals having a mutual phase difference of 90 degrees. Applying resolver-digital (RD) conversion processing to the modulated signals allows obtaining the rotation angle of the rotor.

An integrated circuit (IC) is provided with a plurality of diode based mm-wave peak voltage detectors (PVD)s. During a testing phase, a multi-point low frequency calibration test is performed on one or more of the PVDs to determine and store a set of alternating current (AC) coefficients. During operation of the IC, a current-voltage sweep is performed on a selected one of the PVDs to determine a process and temperature direct current (DC) coefficient. A peak voltage produced by the PVD in response to a high frequency radio frequency (RF) signal is measured to produce a first measured voltage. An approximate power of the RF signal is calculated by adjusting the first measured voltage using the DC coefficient and the AC coefficient.

An integrated circuit (IC) is provided with a plurality of diode based mm-wave peak voltage detectors (PVD)s. During a testing phase, a multi-point low frequency calibration test is performed on one or more of the PVDs to determine and store a set of alternating current (AC) coefficients. During operation of the IC, a current-voltage sweep is performed on a selected one of the PVDs to determine a process and temperature direct current (DC) coefficient. A peak voltage produced by the PVD in response to a high frequency radio frequency (RF) signal is measured to produce a first measured voltage. An approximate power of the RF signal is calculated by adjusting the first measured voltage using the DC coefficient and the AC coefficient.

An integrated circuit (IC) is provided with a plurality of diode based mm-wave peak voltage detectors (PVD)s. During a testing phase, a multi-point low frequency calibration test is performed on one or more of the PVDs to determine and store a set of alternating current (AC) coefficients. During operation of the IC, a current-voltage sweep is performed on a selected one of the PVDs to determine a process and temperature direct current (DC) coefficient. A peak voltage produced by the PVD in response to a high frequency radio frequency (RF) signal is measured to produce a first measured voltage. An approximate power of the RF signal is calculated by adjusting the first measured voltage using the DC coefficient and the AC coefficient.

An integrated circuit (IC) is provided with a plurality of diode based mm-wave peak voltage detectors (PVD)s. During a testing phase, a multi-point low frequency calibration test is performed on one or more of the PVDs to determine and store a set of alternating current (AC) coefficients. During operation of the IC, a current-voltage sweep is performed on a selected one of the PVDs to determine a process and temperature direct current (DC) coefficient. A peak voltage produced by the PVD in response to a high frequency radio frequency (RF) signal is measured to produce a first measured voltage. An approximate power of the RF signal is calculated by adjusting the first measured voltage using the DC coefficient and the AC coefficient.

Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.