Electrostatic discharge (ESD) test systems include a FET-based pulse generator using pairs of back-to-back FETs coupled to produce an ESD pulse based on discharging a capacitor that is coupled in series with a device under test (DUT). A number of FETs can be selected based on an intended ESD test voltage magnitude.

In a pulse edge detection circuit, a measurement circuit has a comparator provided therein which compares a voltage with a reference voltage and outputs a pulse signal. An RSFF puts a signal in a high level at a timing at which detecting a rise edge due to a change of the pulse signal to the high level. In such manner, a set signal of an RSFF becomes inactive and a reset signal of the RSFF becomes active, and a fall edge of the pulse signal becomes detectable. When a fall edge is generated due to a change of the pulse signal from the high level to the low level, the set signal of the RSFF becomes active, and a signal becomes high level.

In a pulse edge detection circuit, a measurement circuit has a comparator provided therein which compares a voltage with a reference voltage and outputs a pulse signal. An RSFF puts a signal in a high level at a timing at which detecting a rise edge due to a change of the pulse signal to the high level. In such manner, a set signal of an RSFF becomes inactive and a reset signal of the RSFF becomes active, and a fall edge of the pulse signal becomes detectable. When a fall edge is generated due to a change of the pulse signal from the high level to the low level, the set signal of the RSFF becomes active, and a signal becomes high level.

The invention relates to devices and methods of characterising a single unknown pulse signal. They create multiple replica of the original that may be more reliably measured, by dividing the signal through nodes and using different signal pathways that may apply a temporal delay. The device and methods have multiple fields of application, most notably with the internal confinement fusion industry.

The invention relates to devices and methods of characterising a single unknown pulse signal. They create multiple replica of the original that may be more reliably measured, by dividing the signal through nodes and using different signal pathways that may apply a temporal delay. The device and methods have multiple fields of application, most notably with the internal confinement fusion industry.

A apparatus, method, system and medium are provided. The apparatus includes: a buffer chain, including N first buffers connected end to end, N first AND gates with one input connected to a pulse signal and the other input connected to an output of a corresponding first buffer, and N flip-flops coupled with outputs of respective first AND gates; a path time delay adjustment circuit, with an input receiving a pulse signal, and an output connected to an input terminal of the first buffer; a control apparatus, controlling the time delay produced by the adjustment circuit to be reduced by at least one step from a preset time delay during each adjustment until an output of a P.sup.th flip-flop flips; a measuring device measuring the pulse signal's width according to an output of each flip-flop, the time delay of each first buffer and the time delay of the adjustment circuit.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.

Methods and apparatus are described for detecting anomalies in a clock signal. Example methods include sensing a clock signal that exhibits alternating phases during normal operation; responsive to sensing the start of a first phase, generating a pulse; and if the pulse terminates before sensing the end of the first phase, asserting a clock stopped detection signal. Example clock anomaly detection apparatus includes a clock signal input for coupling to a clock signal that, during normal operation, oscillates between first and second clock states. An anomaly detection output is asserted if the clock signal remains in the first clock state longer than a first phase expected duration or remains in the second clock state longer than a second phase expected duration.

An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.