A device for determining an effective piezoelectric coefficient of a thin film of a material of a sample, includes a source of x-rays incident on the sample; a detector of x-rays diffracted by the sample; a device for positioning the x-ray source and the x-ray detector with respect to the sample; a voltage source making contact with the sample; a device for controlling the voltage source so as to apply an electric field to the sample during an electrical cycle, the electric field generating a strain of the sample and a stress on the sample; a device for measuring a diffraction peak of the x-rays as a function of the electric field applied to the sample during the electrical cycle; a processing device configured to determine the piezoelectric coefficient.

A device for determining an effective piezoelectric coefficient of a thin film of a material of a sample, includes a source of x-rays incident on the sample; a detector of x-rays diffracted by the sample; a device for positioning the x-ray source and the x-ray detector with respect to the sample; a voltage source making contact with the sample; a device for controlling the voltage source so as to apply an electric field to the sample during an electrical cycle, the electric field generating a strain of the sample and a stress on the sample; a device for measuring a diffraction peak of the x-rays as a function of the electric field applied to the sample during the electrical cycle; a processing device configured to determine the piezoelectric coefficient.

This invention is about a detection device based on the piezoelectric property of geological minerals. The device has a vibration detector for compressing geological minerals to generate charges, so as to detect vibration and a physiotherapy jacket for carrying out quantitative physiotherapy on a human body by detecting the amount of charges. The system has the advantages of: being simple in structure, comprising the vibration detector and the physiotherapy jacket, using the piezoelectric property of geological minerals such as quartz and tourmaline, so as to realize detection of environmental vibration indoors, underground or in the field, and improving the safety factor of geological exploration operations.

A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.

A method for monitoring polarization quality of a piezoelectric film is described. In this method, a detection step is performed on a piezoelectric film by using a detection device with a non-contact method during a polarization process of the piezoelectric film, to obtain a static electricity information or a transmittance information. A determination step is performed by using the static electricity information or the transmittance information to determine a polarization degree of the piezoelectric film.

Provided is a method for inspecting a piezoelectric element in which voltage is applied to a piezoelectric element and evaluation of the electrical characteristics of the piezoelectric element is performed. The method includes a first step in which the piezoelectric element is held on a flat plate-shaped slightly adhesive sheet and a second step in which voltage is applied to the piezoelectric element held on the slightly adhesive sheet and evaluation of the electrical characteristics of the piezoelectric element is performed.

A micropositioning device for a piezoelectric actuator includes a means for controlling an electric field applied to the piezoelectric actuator so as to deform the piezoelectric material, and means for simultaneous measurement of a variation of electric charge accumulated on the piezoelectric actuator resulting from the deformation; and means for acquiring measurements of the variation of electric charge, for processing these acquisitions and for estimating a displacement (x, y, z) of the piezoelectric actuator and/or an applied force.

A micropositioning device for a piezoelectric actuator includes a means for controlling an electric field applied to the piezoelectric actuator so as to deform the piezoelectric material, and means for simultaneous measurement of a variation of electric charge accumulated on the piezoelectric actuator resulting from the deformation; and means for acquiring measurements of the variation of electric charge, for processing these acquisitions and for estimating a displacement (x, y, z) of the piezoelectric actuator and/or an applied force.

In certain aspects, a method for reducing coupling coefficient variation includes receiving one or more measured coupling coefficients of one or more acoustic resonators, determining a coupling coefficient change based on the one or more measured coupling coefficients, and determining a change in a dimension of a lateral feature based on the determined coupling coefficient change.

In certain aspects, a method for reducing coupling coefficient variation includes receiving one or more measured coupling coefficients of one or more acoustic resonators, determining a coupling coefficient change based on the one or more measured coupling coefficients, and determining a change in a dimension of a lateral feature based on the determined coupling coefficient change.