This application discloses a vector sensor zero-point calibration method, device, and, apparatus, an electronic device, and a non-volatile computer-readable storage medium. The calibration method includes: acquiring reference data during two measurements of a reference vector performed by a vector sensor; acquiring a zero-point offset M.sub.0 of the vector sensor according to the reference data; acquiring original data R.sub.k of any vector measured by the vector sensor; and acquiring valid data V.sub.k according to the zero-point offset M.sub.0 and the original data R.sub.k. With the calibration method in this application, the valid data V.sub.k is obtained after a zero-point error of the original data R.sub.k is eliminated, which is more closely approximated to an actual value of a to-be-measured vector.

Provided is an acceleration sensor capable of realizing a simultaneous operation method of signal detection and servo control in place of a time-division processing method, by an MEMS process in which a manufacturing variation is large.

The acceleration sensor is an MEMS capacitive acceleration sensor and has capacitive elements for signal detection and capacitive elements for servo control different from the capacitive elements for the signal detection. A voltage to generate force in a direction reverse to a detection signal of acceleration by the capacitive elements for the signal detection is applied to the capacitive elements for the servo control. Further, the acceleration sensor includes a variable capacity unit compensating for a mismatch of capacity values of the capacitive elements for the servo control at an ASIC side, detects a leak signal due to the mismatch of the capacity values in an ASIC, controls a capacity value of the variable capacity unit, on the basis of a detection result, compensates for an influence of the mismatch of the capacity values, and executes a normal signal detection/servo control simultaneous operation.

A differential gradiometer comprising a substrate with at least a pair of resonators disposed thereon, wherein each of the at least a pair of resonators is sensitive to environmental factors which produces differential strains between the resonators, a first one of said pair of resonators being connected with a circuit for forming a first oscillator, the second one of said pair of resonators being connected with another circuit for forming a non-linear oscillator, an output of the first oscillator being applied to the non-linear oscillator for generating a comb of frequencies, wherein an addition oscillator is locked to the nth tooth of the comb thereby increasing the sensitivity of the gradiometer by a factor of n.

A system and method of effectively measuring a change in a gradient of a magnetic field. The systems include a first magnet and a second magnet mechanically coupled together and aligned along a polarization axis. The first magnet and the second magnet are positioned such that a pair of like magnetic poles of the first magnet and the second magnet face in opposite directions. Further, the first magnet and the second magnet are configured to move along the polarization axis in response to a magnetic field. A sensing system is configured to measure a change in a gradient of the magnetic field based on the movement of the first magnet and second magnet along the polarization axis in response to the magnetic field.

An electromagnetic gradiometer that includes multiple torsionally operated MEMS-based magnetic and/or electric field sensors with control electronics configured to provide magnetic and/or electric field gradient measurements. In one example a magnetic gradiometer includes a first torsionally operated MEMS magnetic sensor having a capacitive read-out configured to provide a first measurement of a received magnetic field, a second torsionally operated MEMS magnetic sensor coupled to the first torsionally operated MEMS magnetic sensor and having the capacitive read-out configured to provide a second measurement of the received magnetic field, and control electronics coupled to the first and second torsionally operated MEMS magnetic sensors and configured to determine a magnetic field gradient of the received magnetic field based the first and second measurements from the first and second torsionally operated MEMS electromagnetic sensors.

A method for calibrating a sensor system, including: providing at least one first sensor unit and one second sensor unit, providing first correction data for the first sensor unit on the basis of measuring signals of the first sensor unit, providing second correction data for the first sensor unit, in the case of an activated second sensor unit, on the basis of measuring signals of the first sensor unit and on the basis of measuring signals of the second sensor unit, determining a first quality parameter for the first correction data and a second quality parameter for the second correction data, determining present correction data for measuring signals of the first sensor unit based on the correction data having the highest of the two determined quality parameters, and calibrating the first sensor unit by correcting first measuring signals on the basis of the present correction data.

A method is disclosed. In one example, the method includes bonding a first panel of a first material to a base panel in a first gas atmosphere, wherein multiple hermetically sealed first cavities encapsulating gas of the first gas atmosphere are formed between the first panel and the base panel. The method further includes bonding a second panel of a second material to at least one of the base panel and the first panel, wherein multiple second cavities are formed between the second panel and the at least one of the base panel and the first panel.

A method for measuring a magnetic field with a micro-sensor system includes applying a direct current (I.sub.Th) to a curved micro-beam to control a stiffness of the curved micro-beam; placing the micro-sensor system into an external magnetic field (B); selecting with a controller, based on an expected value of the external magnetic field (B), a given resonant frequency of the micro-beam; measuring with a resonant frequency tracking device the given resonant frequency of the micro-beam; and calculating in the controller the external magnetic field (B), based on (1) the measured resonant frequency, (2) the applied current (I.sub.Th), and (3) calibration data stored in the controller. The calibration data is indicative of a dependency between a change of the selected resonant frequency and the external magnetic field.

An electromagnetic gradiometer that includes multiple torsionally operated MEMS-based magnetic and/or electric field sensors with control electronics configured to provide magnetic and/or electric field gradient measurements. In one example a magnetic gradiometer includes a first torsionally operated MEMS magnetic sensor having a capacitive read-out configured to provide a first measurement of a received magnetic field, a second torsionally operated MEMS magnetic sensor coupled to the first torsionally operated MEMS magnetic sensor and having the capacitive read-out configured to provide a second measurement of the received magnetic field, and control electronics coupled to the first and second torsionally operated MEMS magnetic sensors and configured to determine a magnetic field gradient of the received magnetic field based the first and second measurements from the first and second torsionally operated MEMS electromagnetic sensors.

Aspects of this disclosure relate to one or more particles that move within a container in response to a magnetic field. A measurement circuit is configured to output an indication of the magnetic field based on position of the one or more particles.