The present invention relates to a multi-channel lidar sensor module capable of measuring at least two target objects using one image sensor. The multi-channel lidar sensor module according to an embodiment of the present invention includes at least one pair of light emitting units configured to emit laser beams and a light receiving unit formed between the at least one pair of emitting units and configured to receive at least one pair of reflected laser beams which are emitted from the at least one pair of light emitting units and reflected by target objects.

One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

A solid-state lidar device comprises a laser generator, an optical lens arrangement having a focal length and providing a rear focal plane, a solid-state sensing array positioned at the rear focal plane of the optical lens arrangement having a first sensor and a second sensor spaced from each other by a first sensor distance and at least one processor. The processor is configured to obtain a measured distance of the target from a pulsed time-of-flight measurement utilizing the laser generator and at least one of the first sensor and the second sensor of the solid-state sensing array and obtain at least one spatial coordinate for the target from the measured distance using a calibration parameter indicative of the ratio of the first sensor distance and the focal length.

A solid-state lidar device comprises a laser generator, an optical lens arrangement having a focal length and providing a rear focal plane, a solid-state sensing array positioned at the rear focal plane of the optical lens arrangement having a first sensor and a second sensor spaced from each other by a first sensor distance and at least one processor. The processor is configured to obtain a measured distance of the target from a pulsed time-of-flight measurement utilizing the laser generator and at least one of the first sensor and the second sensor of the solid-state sensing array and obtain at least one spatial coordinate for the target from the measured distance using a calibration parameter indicative of the ratio of the first sensor distance and the focal length.

Provided are an apparatus for acquiring a depth image, a method for fusing depth images, and a terminal device. The apparatus for acquiring a depth image includes an emitting module, a receiving module, and a processing unit. The emitting module is configured to emit a speckle array to an object, where the speckle array includes p mutually spaced apart speckles. The receiving module includes an image sensor. The processing unit is configured to receive the pixel signal and generate a sparse depth image based on the pixel signal, align an RGB image at a resolution of a*b with the sparse depth image, and fuse the aligned sparse depth image with the RGB image using a pre-trained image fusion model to obtain a dense depth image at a resolution of a*b.

Provided are an apparatus for acquiring a depth image, a method for fusing depth images, and a terminal device. The apparatus for acquiring a depth image includes an emitting module, a receiving module, and a processing unit. The emitting module is configured to emit a speckle array to an object, where the speckle array includes p mutually spaced apart speckles. The receiving module includes an image sensor. The processing unit is configured to receive the pixel signal and generate a sparse depth image based on the pixel signal, align an RGB image at a resolution of a*b with the sparse depth image, and fuse the aligned sparse depth image with the RGB image using a pre-trained image fusion model to obtain a dense depth image at a resolution of a*b.

Examples described herein provide a method that includes performing a first scan of an object to generate first scan data. The method further includes detecting a defect on a surface of the object by analyzing the first scan data to identify a region of interest containing the defect by comparing the first scan data to reference scan data. The method further includes performing a second scan of the region of interest containing the defect to generate second scan data, the second scan data being higher resolution scan data than the first scan data. The method further includes combining the first scan data and the second scan data to generate a point cloud of the object.

Examples described herein provide a method that includes performing a first scan of an object to generate first scan data. The method further includes detecting a defect on a surface of the object by analyzing the first scan data to identify a region of interest containing the defect by comparing the first scan data to reference scan data. The method further includes performing a second scan of the region of interest containing the defect to generate second scan data, the second scan data being higher resolution scan data than the first scan data. The method further includes combining the first scan data and the second scan data to generate a point cloud of the object.

A setpoint adjustment apparatus for a displacement meter (10) includes a determiner (343) to determine whether a measurement value acquired by an acquirer (341) in measurement of a reference workpiece using an applying setpoint, to be used in measurement of the reference workpiece, is within the range of a desired measurement value (352), and a changer (345) to change the applying setpoint. When the measurement value is within the range of the desired measurement value (352), the applying setpoint used in acquisition of the measurement value is employed as an applying setpoint for inspection of a measurement target (1). When the measurement value is out of this range, the applying setpoint used in acquisition of the measurement value is changed to a different applying setpoint, and whether the measurement value from the reference workpiece using this applying setpoint is within the range of the desired measurement value (352) is determined.

A detector (110) for an optical detection of at least one object (112) is proposed. The detector (110) comprises: —at least one transfer device (120), wherein the transfer device (120) comprises at least two different focal lengths (140) in response to at least one incident light beam (136); —at least two longitudinal optical sensors (132), wherein each longitudinal optical sensor (132) has at least one sensor region (146), wherein each longitudinal optical sensor (132) is designed to generate at least one longitudinal sensor signal in a manner dependent on an illumination of the sensor region (146) by the light beam (136), wherein the longitudinal sensor signal, given the same total power of the illumination, is dependent on a beam cross-section of the light beam (136) in the sensor region (146), wherein each longitudinal optical sensor (132) exhibits a spectral sensitivity in response to the light beam (136) in a manner that two different longitudinal optical sensors (132) differ with regard to their spectral sensitivity; wherein each optical longitudinal sensor (132) is located at a focal point (138) of the transfer device (120) related to the spectral sensitivity of the respective longitudinal optical sensor (132); and —at least one evaluation device (150), wherein the evaluation device (150) is designed to generate at least one item of information on a longitudinal position and/or at least one item of information on a color of the object (112) by evaluating the longitudinal sensor signal of each longitudinal optical sensor (132). Thereby, a simple and, still, efficient detector for an accurate determining of a position and/or a color of at least one object in space is provided.