One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

A ranging system includes a first ranging unit with a first laser driver, a first control circuit generating a first trigger signal, and a first data interface with a first trigger transmitter transmitting the first trigger signal over a first data transmission line and a first calibration receiver receiving a first calibration signal over a second data transmission line. A second ranging unit includes a second laser driver, a second data interface with a second trigger receiver receiving the first trigger signal and a second calibration transmitter transmitting the first calibration signal, and a second control circuit generating the first calibration signal in response to receipt of the first trigger signal. The first control circuit determines an elapsed time between transmission of the first trigger signal and receipt of the first calibration signal. The determined elapsed time is used to synchronize activation of the first and second laser drivers.

A transmitter unit for emitting radiation into the surrounding area, including at least one semiconductor laser, which has at least one first emitter possessing a first section and a second section; and at least one control unit for controlling the semiconductor laser. The control unit is configured to apply a first supply variable to the first section of the at least one emitter, and to apply a second supply variable differing from the first supply variable, to the second section of the at least one emitter.

An autonomous vehicle having a LIDAR system that scans a field of view is described herein. With more specificity, a computing system of the autonomous vehicle defines a region of interest in the field of view for a scan of the field of view by the LIDAR system. The region of interest is a portion of the field of view. Based on the region of interest, the computing system transmits a control signal to the LIDAR system that causes the LIDAR system to emit first light pulses with a first intensity within the region of interest during the scan and second light pulses with a second intensity outside the region of interest during the scan. The first intensity is different from the second intensity to provide different ranges for distance measurements inside and outside the region of interest.

A LiDAR system has a field of view and includes a polarization-based waveguide splitter. The splitter includes a first splitter port, a second splitter port and a common splitter port. A laser is optically coupled to the first splitter port via a single-polarization waveguide. An objective lens optically couples each optical emitter of an array of optical emitters to a respective unique portion of the field of view. An optical switching network is coupled via respective dual-polarization waveguides between the common splitter port and the array of optical emitters. An optical receiver is optically coupled to the second splitter port via a dual-polarization waveguide and is configured to receive light reflected from the field of view. A controller, coupled to the optical switching network, is configured to cause the optical switching network to route light from the laser to a sequence of the optical emitters according to a temporal pattern.

It is intended to promote enhancement of performance of acquiring a depth image. A depth image acquiring apparatus includes a light emitting diode, a TOF sensor, and a filter. The light emitting diode irradiates modulated light toward a detection area becoming an area in which a depth image is to be acquired to detect a distance. The TOF sensor receives incident light into which the light irradiated from the light emitting diode is reflected by an object lying in the detection area to become, thereby outputting a signal used to produce the depth image. The filter passes more light having a wavelength in a predetermined pass bandwidth than light having a wavelength in a pass bandwidth other than the predetermined pass bandwidth of the light made incident toward the TOF sensor. In this case, at least one of the light emitting diode, the TOF sensor, or arrangement of the filter is controlled in accordance with a temperature of the light emitting diode or the TOF sensor. The present technique, for example, can be applied to a system for with international search report acquiring a depth image by using a TOF system.

A first light source outputs measurement light having a wavelength in infrared range. A second light source outputs guide light having a wavelength in visible range. A fiber coupler includes a first port into which the measurement light is input, a second port into which the guide light is input, and a third port outputting combined light formed by combining the measurement light and the guide light with each other. A measurement unit emits the combined light to a measurement object and receives return light reflected therefrom. A processing unit obtains information relating to a distance, a speed, or an oscillation of the measurement object, based on an interference signal of the return light and the reference light. The fiber coupler is formed by a single mode fiber that has a cutoff wavelength that is shorter than that of the measurement light and longer than that of the guide light.

A non-imaging concentrator is employed in an upside down configuration in which light enters a smaller aperture and exits a larger aperture. The input angle of light rays may be as large as 180 degrees, while the maximum exit angle is limited to the acceptance angle of the non-imaging concentrator. A dichroic filter placed at the larger aperture has a maximum angle of incidence equal to the acceptance angle of the non-imaging concentrator.

An apparatus includes a time-of-flight (TOF) sensor system that has an illuminator operable to emit pulses of light toward an object outside the apparatus. The illuminator is operable in a first mode in which the illuminator emits pulses having a first width and a second mode in which the illuminator emits pulses having a second width longer than the first width. The TOF sensor system further includes a photodetector operable to detect light produced by the illuminator and reflected by the object back toward the apparatus. An electronic control device is operable to control emission of light by the illuminator and is operable to estimate a distance to the object based on a time elapsed between an emission of one or more of the pulses by the illuminator and detection of the reflected light by the photodetector.

To provide a light-emitting apparatus capable of shaping light from a plurality of light-emitting elements into light with a plurality of shapes and a manufacturing method thereof. A light-emitting apparatus according to the present disclosure, including: a substrate; a plurality of light-emitting elements which are provided on a side of a first surface of the substrate; and a plurality of first lenses which are provided on a side of a second surface of the substrate and on which light emitted from the plurality of light-emitting elements is incident, wherein the plurality of first lenses include at least two types of lenses among a concave lens, a convex lens, and a flat lens.