A MEMs and/or NEMs measurement system includes a resonant assembly comprising: an input and an output, a plurality of N optical resonators Ri indexed i each having a resonance wavelength λr,i, at least one waveguide to which the optical resonators are coupled, at least one element coupled to each resonator Ri, an emission device, a modulation device, an injection device configured to superpose the N light beams to form an input beam and to inject the beam as input to the resonant assembly, at least one detector configured to detect a light beam arising from the beam at the output of the resonant assembly and to generate an output signal, a demodulation device comprising at least N synchronous-detection demodulation modules.

Provided are an optical waveguide capable of propagating light, and a position sensor and an optical circuit board including the same. The optical waveguide includes cores each partially formed in an S-shape. The S-shaped portion includes a first curved portion upstream as seen in the direction of light propagation, and a second curved portion downstream as seen in the direction of light propagation and curved in a direction opposite to the first curved portion. The first curved portion and the second curved portion are connected to each other via a straight portion having a length in the range of from 0 mm to 30 mm. One of the width of the exit of the first curved portion and the width of the entrance of the second curved portion is smaller than the width of a core portion upstream of the S-shaped portion.

Provided are an optical waveguide capable of propagating light, and a position sensor and an optical circuit board including the same. The optical waveguide includes cores each partially formed in an S-shape. The S-shaped portion includes a first curved portion upstream as seen in the direction of light propagation, and a second curved portion downstream as seen in the direction of light propagation and curved in a direction opposite to the first curved portion. The first curved portion and the second curved portion are connected to each other via a straight portion having a length in the range of greater than 0 mm to 30 mm. One of the width of the exit of the first curved portion and the width of the entrance of the second curved portion is smaller than the width of a core portion upstream of the S-shaped portion.

A sensor device includes a semiconductor platform with a sensor element, a top casing element and a bottom casing element. The top casing element contacts the bottom casing element to form a rigid casing defining a cavity, and the top casing element furthermore contacts the semiconductor platform so that the semiconductor platform is positioned in the cavity and so that a selected region of the semiconductor platform, including the sensor element is contactable by the environment. Furthermore, the top casing element, the bottom casing element, and the selected region of the semiconductor platform are arranged so that the cavity is hermetically sealed.

A photonic integrated circuit including at least one integrated optical gain section having a peak gain at a first frequency; and at least one nonlinear sub-circuit which is coupled to the optical gain section either evanescently or through edge coupling, wherein the nonlinear sub-circuit further comprises at least one nonlinear component comprising at least one of a waveguide or a resonator comprising second-order nonlinearity enabling generation of frequency components at least one octave below or above the first frequency, and the nonlinear sub-circuit is configured to provide at least one of nonlinear interferometry wherein the interferometer output depends on the input intensity to the nonlinear sub-circuit, or spectral broadening by extending the spectrum outside the gain spectrum of the gain section.

A MEMs and/or NEMs measurement system includes a resonant assembly comprising: an input and an output, a plurality of N optical resonators Ri indexed i each having a resonance wavelength r,i, at least one waveguide to which the optical resonators are coupled, at least one element coupled to each resonator Ri, an emission device, a modulation device, an injection device configured to superpose the N light beams to form an input beam and to inject the beam as input to the resonant assembly, at least one detector configured to detect a light beam arising from the beam at the output of the resonant assembly and to generate an output signal, a demodulation device comprising at least N synchronous-detection demodulation modules.