A microscope system has an illumination optical system comprising a multi-mode optical fibre having an egress for emitting a laser beam. The egress is located in a plane that is conjugate to the microscope sample plane. The illumination optical system is configured such that the laser beam is incident at the objective lens laterally displaced from the principal optical axis of the objective lens in order that the objective lens delivers the laser beam to the sample plane at an angle that is oblique to the principal optical axis. Utilization of a multi-mode optical fibre for laser delivery in oblique illumination microscopy, such as TIRF microscopy, solves problems associated with using single-mode optical fibres such as alignment and uniformity of illumination.

A fluorescence microscopy inspection system includes light sources able to emit light that causes a specimen to fluoresce and light that does not cause a specimen to fluoresce. The emitted light is directed through one or more filters and objective channels towards a specimen. A ring of lights projects light at the specimen at an oblique angle through a darkfield channel. One of the filters may modify the light to match a predetermined bandgap energy associated with the specimen and another filter may filter wavelengths of light reflected from the specimen and to a camera. The camera may produce an image from the received light and specimen classification and feature analysis may be performed on the image.

A process is provided for imaging a surface of a specimen with an imaging system that employs a BD objective having a darkfield channel and a bright field channel, the BD objective having a circumference. The specimen is obliquely illuminated through the darkfield channel with a first arced illuminating light that obliquely illuminates the specimen through a first arc of the circumference. The first arced illuminating light reflecting off of the surface of the specimen is recorded as a first image of the specimen from the first arced illuminating light reflecting off the surface of the specimen, and a processor generates a 3D topography of the specimen by processing the first image through a topographical imaging technique. Imaging apparatus is also provided as are further process steps for other embodiments.

An optical measurement unit for a scanning device, a scanning device, and a method for operating a scanning device, for high throughput sample analysis of biological samples are disclosed. An illumination system is used to emit light of at least two different illumination wavelength ranges, and an imaging system is used to detect light of at least two different detection wavelength ranges, in order to detect electromagnetic radiation within a field of view for determining the positioning of a sample within the field of view.

A structured illumination microscope includes: a first illumination optical system configured to irradiate, from a first direction, a sample with activating light for activating a fluorescent substance included in the sample; a second illumination optical system configured to irradiate, from a second direction that is different from the first direction, the sample with interference fringes of exciting light for exciting the fluorescent substance; a control unit configured to control a direction and a phase of the interference fringes; an imaging optical system configured to form an image of the sample irradiated with the interference fringes; an imaging element configured to take the image formed by the imaging optical system to generate a first image; and a demodulation unit configured to generate a second image by using a plurality of the first images generated by the imaging element.

A microscope comprising an illumination assembly, an image capture device and a processor can be configured to selectively identify regions of a sample comprising artifacts or empty space. By selectively identifying regions of the sample that have artifacts or empty space, the amount of time to generate an image of the sample and resources used to generate the image can be decreased substantially while providing high resolution for appropriate regions of the computational image. The processor can be configured to change the imaging process in response to regions of the sample that comprises artifacts or empty space. The imaging process may comprise a higher resolution process to output higher resolution portions of the computational image for sample regions comprising valid sample material, and a lower resolution process to output lower resolution portions of the computational image for sample regions comprising valid sample material.

The invention relates to an optical coherence microscopy system for fast, phase resolved imaging by means of optical coherence microscopy with decoupled illumination and detection apertures, producing a dark-field effect with an enhanced optical contrast. The setup uses a light source with an appropriate temporal coherence, an interferometer and an array detector combined with a spectrometer. The dark-field effect is produced by optical filter means in the illumination and detection paths, positioned in conjugated planes of the sample microscope objective. These optical means comprise for example refractive or diffractive elements, amplitude or phase masks, or programmable spatial light modulators. The object is scanned via a scanning unit allowing a point scan of the object.

A microscope (10) for detecting images of an object (14) located in an object plane (12) is described, comprising a microscope stand (18); a microscope objective (20); a light source (22) integrated into the microscope stand (18); and a beam splitter (24), integrated into the microscope objective (20), for coupling in a coaxial incident illumination.

A defect observation apparatus includes a storage unit configured to store defect information about defects detected by an external inspection apparatus; a first imaging unit configured to capture an image of a defect using a first imaging condition and a second imaging condition; a control unit configured to correct positional information on the defect using the image captured with the first imaging unit; and a second imaging unit configured to capture an image of the defect based on the corrected positional information.

A process is provided for imaging a surface of a specimen with an imaging system that employs a BD objective having a darkfield channel and a bright field channel, the BD objective having a circumference. The specimen is obliquely illuminated through the darkfield channel with a first arced illuminating light that obliquely illuminates the specimen through a first arc of the circumference. The first arced illuminating light reflecting off of the surface of the specimen is recorded as a first image of the specimen from the first arced illuminating light reflecting off the surface of the specimen, and a processor generates a 3D topography of the specimen by processing the first image through a topographical imaging technique. Imaging apparatus is also provided as are further process steps for other embodiments.