An optical scanning device includes a substrate and a plurality of movable mirror elements. The substrate includes a main surface. The plurality of movable mirror elements are two-dimensionally arranged on the main surface of the substrate. The plurality of movable mirror elements are capable of operating independently of each other and capable of forming a diffraction grating. Each of the plurality of movable mirror elements includes a beam, a movable mirror, and a pillar. The beam is bendable in a direction perpendicular to the main surface. The movable mirror includes a movable plate and a mirror film disposed on the movable plate. The pillar connects the movable plate and the beam to each other.

A scanner is provided with a plurality of elementary scanners each able to scan a different surface by means of a light beam. Each elementary scanner comprises a beam, for example a vibrating beam, on or in which a phase-controlled array is formed, intended to extract, at a face of the beam, a light beam able to be emitted by a light source. At least one beam of one of the elementary scanners, referred to as the first scanner, has, at rest, a deflection different from that of the beams of the other elementary scanners. This arrangement enables the first scanner to scan a surface, referred to the first surface, different from that scanned by the other elementary scanners. The optical scanner according to the present invention makes it possible to cover a relatively large surface while keeping appreciable compactness.

A tunable laser based light source for Li-Fi communication comprising a laser (1), a first optical element (3), and a second optical element (4). The first optical element (3) is configured to reflect and/or refract a scanning beam (2) emitted from the laser (1). The second optical element (4) is configured to broaden the scanning beam (2) reflected/ refracted by the first optical element (3). The scanning beam (2) is configured to scan a scanning area extending with a first scanning length in a broadening direction (SI) and a second scanning length in a scanning direction (S2). The second optical element (4) is configured to broaden the scanning beam (2) in the broadening direction (S1) to a width larger than the first scanning length, and the laser (1) and the first optical element (3) are configured to cooperate to enable the scanning beam (2) to be swept along the scanning direction (S2).

A method, an apparatus, and a computer program product for modulating optics in a display are provided. An apparatus forms a plurality of zone plates in a liquid crystal using electric fields. Each zone plate has a center, and the centers are aligned along a first axis of the display. The apparatus moves the plurality of zone plates in a first direction along a second axis of the display different from the first axis of the display, while maintaining alignment of the centers of the plurality of zone plates along the first axis. Such movement is provided through repositioning of electric fields through the liquid crystal.

Systems and methods for multiplying the resolution and field-of-view of pixelated displays in accordance with various embodiments of the invention are illustrated. One embodiment includes an apparatus having an image projector for directing light from a pixelated image source into unique angular directions, an image processor electrically connected to the image projector for computing native images of the image source corresponding to first and second field-of-view portions and for computing shifted images in a predefined direction corresponding to the first and second field-of-view portions for sequential display by the image projector, a first set of gratings having a native configuration for propagating the light of the native image and at least one shifted configuration for propagating the light of at least one shifted image, and a second set of gratings having a first configuration for projecting the first field-of-view portion and a second configuration for projecting the second field-of-view portion.

The spatial phase modulation element is a so-called grating light valve for modulating the phase of light by displacing the ribbons. If the measurement light beam Lm (measurement light) is incident on such a spatial phase modulation element, the measurement light beam Lm is emitted in a direction corresponding to the displacement mode of the ribbons. That is, an emission direction of the measurement light beam Lm can be changed, and the measurement light beam Lm can be scanned across the object J by controlling the displacement mode of the ribbons. At this time, the measurement light beam Lm phase-modulated by the spatial phase modulation element is projected to the object J after being shaped into a linear beam. That is, the linear measurement light beam Lm is scanned across the object J.

Disclosed are an amplitude monitoring system, a focusing and leveling apparatus and a defocus detection method. The defocus detection method comprises the steps of: adjusting amplitude of a scanning mirror (201) to a theoretical amplitude value and recording corresponding theoretical output voltage values of a photodetector (309) (S1); adjusting the amplitude of the scanning mirror (201) and sampling real-time amplitude values θi of the scanning mirror (201) and real-time output voltage values of the photodetector (309) to calculate compensated real-time demodulation results Si, and recording real-time defocus amounts Hi of a wafer table (305) (S2); subsequent to stepwise displacement of the wafer table (305), establishing a database based on the compensated real-time demodulation results Si and the real-time defocus amounts Hi of the wafer table (305) (S3); and in an actual measurement, sampling in real time an actual amplitude value θk of the scanning mirror (201) and actual output voltage values of the photodetector (309) to calculate a compensated real-time demodulation result Sk, and finding an actual defocus amount Hk of the wafer table (305) by searching the database using a linear interpolation method (S4). Such a focusing and leveling apparatus and defocus detection method avoid degraded stability of the scanning mirror due to long-time operation, which may lead to low wafer surface defocus measurement accuracy of the focusing and leveling apparatus.

The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional beam scanners. An embodiment in accordance with the present disclosure includes a light source and a MEMS-based scanning element for steering at least a portion of the light provided by the light source in at least one dimension as an output light signal, as well as one or more optical elements for collimating and/or redirecting light within a sealed chamber defined by the elements of a housing. In some embodiments, the one or more optical elements include a reflective lens that collimates the light provided by the light source while simultaneously correcting phase-front error imparted by the scanning element while steering the output beam.

A spatial light modulator and a beam steering apparatus including the same are provided. The spatial light modulator includes a first reflective layer; a cavity layer provided on the first reflective layer; and a reflective layer including a plurality of unit lattice structures that are provided on the cavity layer are and spaced apart from each other. Each of the plurality of unit lattice structures has a polycrystalline structure, and at least one grain of the polycrystalline structure has a column shape and a height equal to a height of the plurality of unit lattice structures.

The present invention concerns a method for generating a pattern of light, this method comprising the following steps: a) emitting an input laser pulse (P1), b) deflecting the input laser pulse (P1) by a first deflector (22) to obtain a first laser pulse, c) deflecting the first laser pulse (P3) by a second deflector (24) to obtain a second laser pulse (P4), and d) focusing the pulse (P4) by an optical element characterized in that: —the first deflector (22) shapes the first laser pulse (P3) according to a first function, —the second deflector (24) shapes the second laser pulse (P4) according to a second function, and —the first function f(x) and the second function g(y) are computed and/or optimized to obtain the desired pattern of light.