A drive device comprises a drive unit, a source, a filter unit, and a determining unit.

A device for the spherical orientation of an optical element is provided comprising a support structure, the optical element having an optically useful surface adapted to interact with an incident light beam, a mechanism mounted on support structure and capable of rotating the optical element in space around a first and second rotation axis perpendicular to each other.

The mechanism comprises a first rotating assembly around the first rotation axis and a second rotating assembly around the second rotation axis, which first rotating assembly has a through cavity defined around the first rotation axis, the through cavity being adapted to be crossed by the light beam and facing the optical element.

The mechanism comprises at least a first electromagnetic actuator arranged to rotate the first rotating assembly and at least a second electromagnetic actuator arranged to rotate the second rotating assembly.

An optical scanning device includes a reflector, a rotator, a first torsion beam and a second torsion beam, a first support part, a second support part, a first elastic layer, and a second elastic layer. The first elastic layer is superposed on the first torsion beam. The second elastic layer is superposed on the second torsion beam. A vertical dimension of an active layer is smaller than a horizontal dimension of the active layer in a cross section orthogonal to a direction in which the rotator is interposed between the first torsion beam and the second torsion beam. A material of the first elastic layer and the second elastic layer is higher in fatigue life than metal.

A distance measurement apparatus of a scanning type provided with a two-dimensional micro electro mechanical system (MEMS) mirror that reflects a laser beam includes: a first detector that detects a mirror angle of the two-dimensional MEMS mirror and outputs an angular signal that indicates the mirror angle; and a processor that calculates an amplitude error and a phase error between amplitude and a phase of the angular signal and amplitude and a phase of a reference angle signal, and corrects a resonance drive waveform of a drive signal that drives, of two mutually orthogonal axes of the two-dimensional MEMS mirror, one axis on a resonance drive side on a basis of the amplitude error and the phase error.

An oscillator control system includes an oscillator structure configured to oscillate about first and second rotation axes according to a Lissajous pattern, wherein an oscillation about the second rotation axis imparts a cross-coupling error onto an oscillation about the first rotation axis, and wherein the cross-coupling error changes in accordance with a Lissajous position within the Lissajous pattern; and a driver circuit that includes a phase-locked loop (PLL) configured to regulate a driving signal that drives the oscillation about the first rotation axis. The PLL is configured to generate a PLL signal based on a phase error of the oscillation about the first rotation axis. The PLL includes a compensation circuit configured to receive the PLL signal and the Lissajous position within the Lissajous pattern, apply a compensation value to the PLL signal to generate a compensated PLL signal used for generating the driving signal based on the Lissajous position.

An optical element driving mechanism is provided and includes a movable portion and a fixed portion. The movable portion includes a carrier for carrying an optical member with a first optical axis. The fixed portion has a top surface, a first side surface and a second side surface. The top surface extends in a direction that is parallel to the first optical axis. The first side surface and the second side surface extend in a direction that is not parallel to the first optical axis from the edge of the top surface and face different sides of the optical member. The shortest distance between the optical member and the first side surface is shorter than the shortest distance between the optical member and the second side surface.

An actuator device includes a support part, a first movable part, a second movable part, a first connecting part connecting the first movable part to the second movable part, a second connecting part connecting the second movable part to the support part, a spiral coil provided to the second movable part, a first external terminal provided to the support part, and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring provided to the second movable part so as to straddle the coil and connected to the inner end of the coil and the lead wiring. The width of the straddle wiring is larger than the width of the coil, and the thickness of the straddle wiring is smaller than the thickness of the coil.

An actuator device includes a support part, a first movable part, a second movable part, a first connecting part connecting the first movable part to the second movable part, a second connecting part connecting the second movable part to the support part, a spiral coil provided to the second movable part, a first external terminal provided to the support part, and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring provided to the second movable part so as to straddle the coil and connected to the inner end of the coil and the lead wiring. The width of the straddle wiring is larger than the width of the coil, and the thickness of the straddle wiring is smaller than the thickness of the coil.

The present embodiment relates to a light output module comprising: a first lens part including at least one lens; a second lens part including at least one lens and disposed at a lower side of the first lens part; an actuator for moving the second lens part; a third lens part disposed at a lower side of the second lens part; and a light source disposed at a lower side of the third lens part, wherein the actuator comprises: a first housing receiving the second lens part and including at least one first magnet disposed therein; a second housing receiving the first housing and including at least one second magnet disposed therein; and a third housing including a first coil facing the first magnet and a second coil facing the second magnet, wherein the first housing is operated in a first direction, and the first housing and the second housing are operated in a second direction.

An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region in which the movable mirror is mounted, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. The mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.