An optical arrangement is provided for converting an input laser beam into a linear output beam propagating along a propagation direction and having in a working plane and a linear beam cross section extending along a line direction and having a non-vanishing intensity. The optical arrangement includes a reshaping optical unit having an input aperture for receiving the input laser beam and an output aperture, and is configured to convert the input laser bean into a beam packet having a multiplicity of beam segments that emerges through the output aperture. In addition, a homogenization optical unit is included having a first lens array and a second lens array arranged downstream of the first lens array in the beam path, the homogenization optical unit configured to mix different beam segments of the beam packet along the line direction. A transformation lens is configured such to superpose the mixed beam segments so as to form the linear output beam, and a displacement device is configured to displace the second lens array relative to the first lens array.

A control method for a spatial light modulator for an exposure apparatus having a projection optical system having an optical elements a state of each of which is allowed to be changed, the method sets states of optical elements located in a first area to a first distribution in which a first optical element in a first state and a second optical element in a second state are distributed in a first distribution pattern so that one portion of a light from the optical elements located in the first area enters the projection optical system and setting states of optical elements located in a second area to a second distribution in which the first optical element and the second optical element are distributed in a second distribution pattern to reduce a deterioration of the pattern image caused by a light that enters the projection optical system from the first area.

A method of processing by controlling one or more beam characteristics of an optical beam may include: launching the optical beam into a first length of fiber having a first refractive-index profile (RIP); coupling the optical beam from the first length of fiber into a second length of fiber having a second RIP and one or more confinement regions; modifying the one or more beam characteristics of the optical beam in the first length of fiber, in the second length of fiber, or in the first and second lengths of fiber; confining the modified one or more beam characteristics of the optical beam within the one or more confinement regions of the second length of fiber; and/or generating an output beam, having the modified one or more beam characteristics of the optical beam, from the second length of fiber. The first RIP may differ from the second RIP.

An optical unit includes a first light source, a second light source, a rotary reflector that rotates about an axis of rotation while reflecting first light emitted from the first light source, and a projection lens that projects the first light reflected by the rotary reflector into a light illuminating direction of the optical unit to form a first light distribution pattern. The second light source is disposed such that second light emitted from the second light source enters the projection lens without being reflected by the rotary reflector. The projection lens is configured to project the second light into the light illuminating direction of the optical unit to form a second light distribution pattern such that the second light distribution pattern overlaps an end portion of the first light distribution pattern in a right-left direction.

A laser beam delivery apparatus for a microscope comprises first and second optical diffusers that are configured to move in a periodic manner with a respective different frequency. Each optical diffuser may comprise a spinning disk. The laser light is spatially randomized by the first spinning diffuser and its spatial pattern is further randomized by the second diffuser. The second diffuser prevents any spatial pattern from repeating after one revolution of the first diffuser, which prevents beating patterns from forming when the light is imaged through a spinning confocal disk and increases the uniformity in other cases.

The optical module disclosed herein has a first lens, a second lens and an array lens arranged sequentially along the main optical axis. The first lens shapes a beam along the first direction of the main optical axis. The second lens shapes the beam along the second direction of the main optical axis. The array of array lenses is arranged along the second direction. A laser beam enters the second lens after passing through the first lens. The second lens diffuses the laser beam along the second direction. After the laser beam is converted from a Gaussian distribution to a flat-top distribution in the second direction, the laser beam is emitted through the array lens. The first direction and the second direction are perpendicular to each other.

An illumination device includes a diffusion member having an anisotropic diffusion surface, a rotary shaft member configured to rotate the anisotropic diffusion surface while a coherent light beam from a light source is illuminated on the anisotropic diffusion surface, and an optical device that further diffuses a coherent light beam diffused on the anisotropic diffusion surface, wherein the coherent light beam diffused on the anisotropic diffusion surface is diffused in a form of line and the diffused coherent light beam in the form of line is configured to move to draw a locus of rotation in one direction in accordance with the rotation of the anisotropic diffusion surface.

Provided is an illumination system for providing an illumination beam. The illumination system includes at least one light source, a movable reflective element, a lens element, and a light uniformizing element. The light source is configured to emit at least one beam. The beam is reflected by the movable reflective element, and then passes through the lens element and the light uniformizing element to form an illumination beam. An optical effective area of the beam on the lens element is configured to be larger than that of the beam on the movable reflective element by motion of the movable reflective element. The optical effective area is an area of a union of each beam that irradiates the lens element or the movable reflective element at different times. A projection device is also provided. The illumination system and projection device provide a uniformized illumination beam and improve the projection effect.

An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. A deformable mirror is disposed in a path of the excitation laser. A controller is configured to adjust parameters of the excitation laser by controlling the deformable mirror based on a feedback parameter.

Disclosed is a laser head capable of dynamically regulating a laser spot by high frequency/ultrahigh frequency micro-vibration, including a laser transmitting device, a cavity, a special electromechanical module and a shielded nozzle. The laser transmitting device is disposed at the top of the cavity. A first protective glass and a collimating lens are sequentially disposed from top to bottom within the cavity. The special electromechanical module is disposed at the bottom of the cavity and connected to the cavity by means of a housing. A focusing lens is further disposed within the housing of the special electromechanical module, and a flat spring is disposed between the focusing lens and the special electromechanical module. The special electromechanical module can cause ultrahigh frequency micro-oscillation of the focusing lens. The shielded nozzle is disposed at the bottom of the special electromechanical module.