A method for producing a microoptoelectromechanical component and a corresponding microoptoelectromechanical component. The microoptoelectromechanical component is equipped with a base substrate comprising a cavity which is formed therein and is closed by a covering substrate, an optical waveguide on the covering substrate above the cavity, which optical waveguide comprises a sheathed waveguide core, an electrical contact element in the region of the surrounding covering substrate, wherein a contact pad formed by an electrically conductive polysilicon layer is arranged underneath the electrical contact element, wherein the optical waveguide and the covering substrate located thereunder are divided into a stationary portion and a deflectable portion, which can be docked to the stationary portion by electrically deflecting the corresponding portion of the covering wafer.

An ultra-broadband silicon waveguide micro-electro-mechanical systems (MEMS) photonic switch is provided, which is mainly composed of three parts: input waveguides, a waveguide crossing with a nano-gap, and output waveguides. The waveguide crossing is composed of two identical orthogonal elliptical cylinders. Four ports of the waveguide crossing respectively extend to form single-mode strip waveguides to serve as input/output waveguides. The center of the waveguide crossing is fully etched with a nano-gap. The two symmetrical port waveguides are fully etched with nano-grooves. The lower cladding near the waveguide crossing and the nano-grooves is penetrated and etched. The width of the nano-gap is adjusted through adjusting a voltage applied across both ends of the waveguide crossing, so that a guided-mode directly passes through or is totally reflected. In the disclosure, a propagation path of the photonic switch is switched through adjusting the voltage applied to the waveguide crossing.

An optical connection box includes, a plurality of first optical connectors to which a plurality of first optical paths are respectively connected, a plurality of second optical connectors that respectively include an operation unit protruding from a peripheral edge side position further from a position of the plurality of first optical connectors on a first surface of the optical connection box, and that are respectively connected to a plurality of receptacle optical connectors which are disposed in the plurality of second optical paths, a plurality of relay optical fibers in which any one of the plurality of first optical connectors is disposed in the first terminal and any one of the plurality of second optical connectors is disposed in the second terminal, and a fitting structure with respect to a substrate in which the receptacle optical connectors are disposed.

An ultra-broadband silicon waveguide micro-electro-mechanical systems (MEMS) photonic switch is provided, which is mainly composed of three parts: input waveguides, a waveguide crossing with a nano-gap, and output waveguides. The waveguide crossing is composed of two identical orthogonal elliptical cylinders. Four ports of the waveguide crossing respectively extend to form single-mode strip waveguides to serve as input/output waveguides. The center of the waveguide crossing is fully etched with a nano-gap. The two symmetrical port waveguides are fully etched with nano-grooves. The lower cladding near the waveguide crossing and the nano-grooves is penetrated and etched. The width of the nano-gap is adjusted through adjusting a voltage applied across both ends of the waveguide crossing, so that a guided-mode directly passes through or is totally reflected. In the disclosure, a propagation path of the photonic switch is switched through adjusting the voltage applied to the waveguide crossing.

A method for producing a microoptoelectromechanical component and a corresponding microoptoelectromechanical component. The microoptoelectromechanical component is equipped with a base substrate comprising a cavity which is formed therein and is closed by a covering substrate, an optical waveguide on the covering substrate above the cavity, which optical waveguide comprises a sheathed waveguide core, an electrical contact element in the region of the surrounding covering substrate, wherein a contact pad formed by an electrically conductive polysilicon layer is arranged underneath the electrical contact element, wherein the optical waveguide and the covering substrate located thereunder are divided into a stationary portion and a deflectable portion, which can be docked to the stationary portion by electrically deflecting the corresponding portion of the covering wafer.

A polishing apparatus capable of accurately measuring a film thickness by regulating a quantity of light illuminating a wafer is disclosed. The polishing apparatus includes: a light source; an illuminating fiber having distal ends arranged at different locations in the polishing table; and a light-receiving fiber having distal ends arranged at the different locations in the polishing table. The illuminating fiber includes a first illuminating fiber and a second illuminating fiber. A first dimmer is attached to the first illuminating fiber and the second illuminating fiber, and a second dimmer is attached to at least one of the first illuminating fiber and the second illuminating fiber.

A polishing apparatus capable of accurately measuring a film thickness by regulating a quantity of light illuminating a wafer is disclosed. The polishing apparatus includes: a light source; an illuminating fiber having distal ends arranged at different locations in the polishing table; and a light-receiving fiber having distal ends arranged at the different locations in the polishing table. The illuminating fiber includes a first illuminating fiber and a second illuminating fiber. A first dimmer is attached to the first illuminating fiber and the second illuminating fiber, and a second dimmer is attached to at least one of the first illuminating fiber and the second illuminating fiber.

An endoscope system has observation modes making observations with lights having optical characteristics different from each other. The system includes an endoscope including an insertion section provided with an illumination window, a light guide arranged in the insertion section, and including an entrance end on which the lights enter and a plurality of light guide areas that guide the lights entered on the entrance end, and an entrance area switching unit that switches between the light guide areas through which the entered lights are guided by switching between areas on which the lights enter at the entrance end in accordance with an observation mode.

A passive optical fiber switch includes: a housing defining a plurality of ports configured to receive fiber optic connectors; a substrate positioned within the housing, the substrate defining a plurality of waveguide paths; and an arm positioned relative to one of the plurality of ports such that the arm moves as a fiber optic connector is positioned in the one port, movement of the arm causing the waveguide paths to shift to break a normal through configuration.

An endoscope system has observation modes making observations with lights having optical characteristics different from each other. The system includes an endoscope including an insertion section provided with an illumination window, a light guide arranged in the insertion section, and including an entrance end on which the lights enter and a plurality of light guide areas that guide the lights entered on the entrance end, and an entrance area switching unit that switches between the light guide areas through which the entered lights are guided by switching between areas on which the lights enter at the entrance end in accordance with an observation mode.