A system for resonantly enhanced frequency conversion includes a nonlinear crystal for frequency converting a pump laser beam, and mirrors forming a ring resonator for the pump laser beam such that a closed propagation path of the pump laser beam, inside the ring resonator, passes through the nonlinear crystal. The mirrors include an adaptive mirror, a curved-mirror pair positioned in a first segment of the propagation path spanning between the adaptive mirror and the nonlinear crystal, and an input coupler for coupling the pump laser beam into the ring resonator. The curved-mirror pair forms an imaging system having conjugate planes at the adaptive mirror and the nonlinear crystal. The input coupler is positioned in a second segment of the propagation path that spans between the adaptive mirror and the nonlinear crystal and does not include deflection by the curved-mirror pair.

A nonlinear crystal including stacked strontium tetraborate SrB.sub.4O.sub.7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.

A system is provided for generating a laser beam via non-linear effects, including: a monofrequency continuous-wave laser source; and an external resonant cavity referred to as a microchip cavity. The microchip cavity is composite insofar as it is a unitary assembly of a plurality of materials g: at least one nonlinear crystal; an entrance mirror; a concave mirror deposited on a material fixed to the nonlinear crystal—the material on which the concave mirror is deposited is different from the constituent material of the nonlinear crystal; a first thermoelectric module for controlling the temperature of the nonlinear crystal; and at least one second thermoelectric module for controlling at least the temperature of the material on which the concave mirror is deposited.

A high-efficiency non-collinearly phase matched parametric oscillator is provided, wherein a laser pumps a nonlinear optical material with a plural number of flat reflection surfaces that zigzag at least one parametrically generated off-axis radiation about the pump laser beam axis via multiple reflections from the surfaces. The off-axis zigzag oscillation of the radiation establishes parametric oscillation and improves energy coupling among mixing waves in a monolithic nonlinear optical material. Preferably the pump laser has a transverse beam size covering the area of the zigzagging parametrically generated radiation. To further enhance the performance of the off-axis zigzag parametric oscillator, the other parametrically generated radiation can be seeded by an external laser source or resonated in a cavity. The present invention also includes a double-side pumped off-axis zigzag parametric oscillator installed inside a standing-wave pump-laser cavity.

A method of creating difference frequency (DF) laser pulses (1) by difference frequency generation (DFG) comprises the steps of providing ultrashort laser pulses (2) having a spectral bandwidth corresponding to a Fourier limit of below 50 fs and containing first spectral components and second spectral components having larger frequencies than the first spectral components, and driving a DFG process by the ultrashort laser pulses (2) in an optically non-linear crystal (10), wherein the DF laser pulses (1) are generated in the crystal (10) by difference frequencies between the first and second spectral components, resp., said difference frequencies comprising third spectral components being lower in frequency than the first and second spectral components, wherein at least one enhancement cavity (20) with resonator mirrors (Mil to Ml4) spanning a beam path (22) is provided and the crystal (10) is placed in the beam path (22) of the enhancement cavity (20), the ultrashort laser pulses (2) are input coupled and coherently added in the at least one enhancement cavity (20), at least one circulating ultrashort laser pulse (3) is created in the at least one enhancement cavity (20), which drives the DFG process in the crystal (10) for generating the DF laser pulses (1), and the at least one enhancement cavity (20) is adapted for recycling the at least one ultrashort laser pulse (3) passing through the crystal (10). Furthermore, a photonic source (100) for creating DF laser pulses (1) is described, including one or more enhancement cavities.

The invention relates to a method for modulating the resonant frequency of an optical resonator (1) in accordance with a periodic, not necessarily harmonic, modulation signal (U.sub.mod(t)). Fast modulation of an optical resonator is intended to be made possible in which the current resonant frequency follows the modulation signal (U.sub.mod(t)) as precisely as possible, and specifically at a fundamental frequency of the modulation signal in the kHz range. To do this, the invention proposes the following method steps: deriving an error signal (E(t)) from a light field circulating in the resonator (1), wherein the error signal (E(t)) indicates the deviation of the optical frequency of the light field from a target value, deriving a first actuating signal (S.sub.1(t)) from the error signal (E(t)) by means of a controller (6), generating a second actuating signal (S.sub.2(t)), which has actuating-signal components at one or more harmonics (f.sub.mod, 2f.sub.mod, . . . ) of the fundamental frequency (f.sub.mod) of the modulation signal (U.sub.mod(t)), and applying a superposition signal made up of the first and the second actuating signal (S.sub.1(t), S.sub.2(t)) to an actuator (3) that changes the optical path length of the resonator (1). In other words, the invention makes use of a combination of control and narrow-band feed-forward control tuned to the spectrum of the modulation signal (U.sub.mod(t)) and of the error signal (E(t)) to modulate the resonant frequency. Preferably, the feed-forward control used for generating the second actuating signal (S.sub.2(t)) is automatically adapted in accordance with the error signal (E(t)). In addition, the invention relates to an accordingly configured optical system.

A nonlinear crystal including stacked Strontium tetraborate SrB.sub.4O.sub.7 (SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency converting stage of a laser assembly to generate laser output light having a wavelength in the range of 125 nm to 183 nm. One or more fundamental light beams having fundamental wavelengths between 1 and 1.1 μm are doubled and/or summed using multiple intermediate frequency conversion stages to generate one or more intermediate light beam frequencies (e.g., second through eighth harmonics, or sums thereof), and then the final frequency converting stage utilizes the nonlinear crystal to either double a single intermediate light beam frequency or to sum two intermediate light beam frequencies to generate the desired laser output light at high power and photon energy levels. A method and inspection system incorporating the laser assembly is also described.

A device for generating laser radiation comprises a temperature-controlled optical setup comprising an optically non-linear solid state medium arranged in a resonator and an active region. The outgoing laser radiation is generated from a pump beam introduced into the optically non-linear solid state medium. A first temperature actuator and a second temperature actuator configured to independently adjust temperature values in the active region of the optically non-linear solid state medium. The first temperature actuator is configured regulate a length of the resonator by setting a first temperature value within a first portion of the active region. The second temperature actuator is configured to match phases of wavelengths generated by the outgoing laser radiation and phases of wavelengths of the pump beam radiation by setting a second temperature value within a second portion of the active region.

An optical frequency comb light source and an optical frequency comb generation method, where the light source includes a laser diode, a coupler, a Kerr nonlinear device, a beam splitter, and a phase shifter. The laser diode is connected to one input port of the coupler, and the other input port of the coupler is connected to an output port of the phase shifter. An output port of the coupler is connected to an input port of the Kerr nonlinear device. An output port of the Kerr nonlinear device is connected to an input port of the beam splitter. One output port of the beam splitter is connected to an input port of the phase shifter. The other output port of the beam splitter is configured to output a plurality of optical frequency combs. A multi-wavelength light source with relatively high power may be provided.

An optical parametric oscillator (OPO) including a thin film waveguide including a material having a second order nonlinear susceptibility generating an electromagnetic wave in response to pump electromagnetic wave inputted into the thin film waveguide. The electromagnetic wave has a first wavelength or first set of wavelengths longer than a second wavelength or second set of wavelengths of the pump electromagnetic wave. The thin film waveguide has a thickness on the order of the first wavelength or the first set of wavelengths in the thin film waveguide so as to guide the output electromagnetic wave along the thin film waveguide.