An optical phase modulator comprises a cascaded array of optical resonators, wherein each of the optical resonators has an input port and an output port. A plurality of waveguides are coupled between the optical resonators and are configured to provide cascaded optical communication between the optical resonators. Each of the waveguides is respectively coupled between the output port of one optical resonator and the input port of an adjacent optical resonator. A transmission electrode is positioned adjacent to the optical resonators, with the transmission electrode configured to apply a drive voltage across the optical resonators. The optical phase modulator is operative to co-propagate an input optical wave with the drive voltage, such that a resonator-to-resonator optical delay is matched with a resonator-to-resonator electrical delay.

An optical waveguide structure forms an MZI in proximity to an electro-optic material. A first (second) electrical input port is configured to receive a first (second) drive signal. The second drive signal has a negative amplitude relative to the first drive signal. A first (second) transmission line is configured to propagate a first (second) electromagnetic wave over at least a portion of a first (second) optical waveguide arm to apply an optical phase modulation. A drive signal interconnection structure is configured to provide a first electrical connection between the first electrical input port and an electrode shared by the transmission lines, and a second electrical connection between the second electrical input port and respective electrodes of the transmission lines; and is configured to preserve relative phase shifts between the drive signals. Input impedances at the first and second electrical input ports are substantially equal to each other.

There is provided an optical waveguide device including a substrate, an optical waveguide formed on the substrate, and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, and a first conductive layer on the first base layer, and a conductor pattern including a second base layer made of a second material different from the first material and a second conductive layer on the second base layer is formed in a region other than a path from an input end to an output end of the optical waveguide, in a region on the substrate.

An apparatus includes a lithium niobate (LN) layer, and a planar electro-optical modulator having at least one hybrid optical core segment formed of a portion of the LN layer and an optical guiding rib. The optical guiding rib may be located in a top silicon layer of a silicon photonics (SiP) chip, to which a thin-film LN chip is flip-chip mounted, and may be coupled to optical waveguide cores in a first silicon core layer of the SiP chip. One or more drive electrodes are disposed between a substrate of the SiP chip and the LN layer. In some embodiments hybrid optical core segments may include silicon nitride core segments and may form an MZM configured to be differentially or dual-differentially driven.

A first transmission line comprises a first pair of electrodes receiving an electrical drive comprising first and second drive signals, which are loaded by a first series of p-n junctions applying optical phase modulation to respective optical waves propagating over a first section of the first and second optical waveguide arms of an MZI. A second transmission line comprises a second pair of electrodes configured to receive the electrical drive after an electrical signal delay. The second pair of electrodes are loaded by a second series of p-n junctions applying optical phase modulation to the respective optical waves propagating over a second section of the first and second optical waveguide arms after propagation over the first section. An electrode extension structure provides the electrical drive to the second pair of electrodes, and comprises an unloaded transmission line portion imposing the electrical signal delay based on an optical signal delay.

A velocity mismatch between optical signals and microwave electrical signals in electro-optic devices, such as modulators, may be compensated by utilizing different lengths of bends in the optical waveguides as compared to the microwave electrodes to match the velocity of the microwave signal propagating along the coplanar waveguide to the velocity of the optical signal. To ensure the electrode bends do not affect the light in the optical waveguide bends, the electrode may have to be rerouted, e.g. above or below, the optical waveguide layer. To ensure that the pair of optical waveguides have the same optical length, a waveguide crossing may be used to cross the first waveguide through the second waveguide.

Structures for an optical power modulator and methods of fabricating a structure for an optical power modulator. A first waveguide core includes first and second sections. A second waveguide core includes a first section laterally adjacent to the first section of the first waveguide core and a second section laterally adjacent to the second section of the first waveguide core. An interconnect structure is formed over the first waveguide core and the second waveguide core. The interconnect structure includes first and second transmission lines. The first transmission line is physically connected within the interconnect structure to the first section of the first waveguide core. The second transmission line includes a first section physically connected within the interconnect structure to the second section of the first waveguide core and a second section adjacent to the first transmission line.

An electro-optical modulator device is provided. The electro-optical modulator device comprises at least one electro-optical modulator having a first and a second optical waveguide and an electrode arrangement for applying a voltage across the optical waveguide, wherein the electrode arrangement comprises a plurality of first waveguide electrodes and a plurality of second waveguide electrodes arranged on top of the first and the second optical waveguide, respectively, wherein the first and second waveguide electrodes are capacitively coupled to one another; and at least one driver unit for supplying a voltage to the electrode arrangement; and an electrical connection between the driver unit and the electrode arrangement. The electrical connection between the driver unit and the electrode arrangement comprises a flexible coplanar strip line.

An electro-optical modulator is provided. The electro-optical modulator comprises at least one optical waveguide, an electrode arrangement for applying a voltage across the optical waveguide. The electrode arrangement comprises a first and a second electrical line and at least two terminating resistors terminating the first and the second electrical line. The electrode arrangement comprises at least one capacitive structure that capacitively couples, but galvanically separates the two terminating resistors. The capacitive structure comprises at least two electrically conductive layers physically arranged at a position between the first and the second electrical line, wherein the at least two layers are separated by at least one dielectric layer.

The present invention provides an optical modulator including a substrate and a phase modulation portion on the substrate. The phase modulation portion includes an optical waveguide comprised of a first clad layer, a semiconductor layer that is laminated on the first clad layer and has a refraction index higher than the first clad layer and a second clad layer that is laminated on the semiconductor layer and has a refraction index lower than the semiconductor layer, a first traveling wave electrode, and a second traveling wave electrode. The semiconductor layer includes a rib that is formed in the optical waveguide in an optical axis direction and is a core of the optical waveguide, a first slab that is formed in the optical axis direction in one side of the rib, a second slab that is formed in the optical axis direction in the other side of the rib, a third slab that is formed in the first slab in the optical axis direction at the opposite side to the rib, and a fourth slab that is formed in the second slab in the optical axis direction at the opposite side to the rib. The first slab is formed to be thinner than the rib and the third slab, and the second slab is formed to be thinner than the rib and the fourth slab.