Patent classifications
G03B27/02
Resist placing method and resist placing program
According to one embodiment, a resist placing method sets first and second grating vectors of a drop grating on which to place a resist drop. At this time, the first and second grating vectors are set based on information about a grid, which is a minimum grating unit for which the resist drop can be dropped, such that the thickness of a resist film after imprinting is within a predetermined range. In this case, the first and second grating vectors are set to be in directions different from both first and second minimum grating vectors of the grid. Then, the resist drop is placed in the drop grating.
Exposure apparatus
The invention provides an exposure apparatus (100) including a formation module (122) which forms charged particle beams with different irradiation positions on a specimen. The formation module (122) includes: a particle source (20) which emits the charged particle beams from an emission region (21) in which a width in a longitudinal direction is different from and a width in a lateral direction orthogonal to the longitudinal direction; an aperture array device (60) provided with openings (62) arranged in an illuminated region (61) in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction; illumination lenses (30, 50) provided between the particle source (20) and the aperture array device (60); and a beam cross-section deformation device (40) which is provided between the particle source (20) and the aperture array device (60), and deforms a cross-sectional shape of the charged particle beams into an anisotropic shape by an action of a magnetic field or an electric field.
Handheld imaging device incorporating multi-core image processor
A handheld imaging device includes an image sensor for sensing an image; a processor for processing the sensed image; a plurality of processing units provided in the processor, the plurality of processing units connected in parallel by a crossbar switch to form a multi-core processing unit for the processor; and an image sensor interface for converting signals from the image sensor to a format readable by the plurality of processing units, the image sensor interface sharing a wafer substrate with the processor. A transfer of data from the image sensor interface to the plurality of processing units is conducted entirely on the shared wafer substrate.
Handheld imaging device incorporating multi-core image processor
A handheld imaging device includes an image sensor for sensing an image; a processor for processing the sensed image; a plurality of processing units provided in the processor, the plurality of processing units connected in parallel by a crossbar switch to form a multi-core processing unit for the processor; and an image sensor interface for converting signals from the image sensor to a format readable by the plurality of processing units, the image sensor interface sharing a wafer substrate with the processor. A transfer of data from the image sensor interface to the plurality of processing units is conducted entirely on the shared wafer substrate.
Handheld imaging device with VLIW image processor
A handheld imaging device includes an image sensor for sensing an image: a Very Long Instruction Word (VLIW) processor for processing the sensed image; a plurality of processing units provided in the VLIW processor, the plurality of processing units connected in parallel by a crossbar switch to form a multi-core processing unit for the VLIW processor; and an image sensor interface for receiving signals from the image sensor and converting the signals to a format readable by the VLIW processor, the image sensor interface sharing a wafer substrate with the VLIW processor. A transfer of data from the image sensor interface to the VLIW processor is conducted entirely on the shared wafer substrate.
Handheld imaging device with VLIW image processor
A handheld imaging device includes an image sensor for sensing an image: a Very Long Instruction Word (VLIW) processor for processing the sensed image; a plurality of processing units provided in the VLIW processor, the plurality of processing units connected in parallel by a crossbar switch to form a multi-core processing unit for the VLIW processor; and an image sensor interface for receiving signals from the image sensor and converting the signals to a format readable by the VLIW processor, the image sensor interface sharing a wafer substrate with the VLIW processor. A transfer of data from the image sensor interface to the VLIW processor is conducted entirely on the shared wafer substrate.
Multi-core image processor for portable device
A portable handheld device including a CPU for processing a script; a multi-core processor for processing an image; an input buffer for receiving data for processing by the multi-core processor, the input buffer being provided under the control of the multi-core processor to send data thereto; and an output buffer for receiving data processed by the multi-core processor, the output buffer being provided under the control of the multi-core processor to receive data therefrom. The multi-core processor comprises a plurality of micro-coded processing units. The CPU is configured with authority to clear and query the input and output buffers.
Multi-core image processor for portable device
A portable handheld device including a CPU for processing a script; a multi-core processor for processing an image; an input buffer for receiving data for processing by the multi-core processor, the input buffer being provided under the control of the multi-core processor to send data thereto; and an output buffer for receiving data processed by the multi-core processor, the output buffer being provided under the control of the multi-core processor to receive data therefrom. The multi-core processor comprises a plurality of micro-coded processing units. The CPU is configured with authority to clear and query the input and output buffers.