A robot system has first and second joint control units that respectively calculate first and second current values to be supplied to first and second motors based on deviations between first and second operation targets for the motors that are input from a higher device and actual operation of output shafts of the motor, and control operation of the output shafts by supplying current to the motors based on the current values, and an error estimation unit estimating an error in operation of a second joint due to bending and/or twisting of a robot arm based on the first current value and the actual operation of the output shaft of the first motor, in which the second joint control unit calculates the second current value to control the rotation angle of the output shaft of the second motor in a manner compensating for an angle error of the second joint.

Method for positioning and orienting a first object relative to a second object. Method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first and second objects in a desired position and orientation relative to the other one of the first and second objects. One or both of the first and second objects may be an interposer, such as a silicon or glass interposer.

Method for positioning and orienting a first object relative to a second object. The method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first object and the second object in a desired position and orientation relative to the other one of the first object and the second object.

A motor control device includes circuitry which reads a command value in synchronization with a control period, reads an output of an encoder connected to a motor, controls an output current to the motor based on the command value and the output of the encoder, and offsets a timing for reading the output of the encoder with respect to a timing for reading the command value.

An encoder includes a disc and a sensor. The disc has a circular surface with a central axis and is rotatable around the central axis. The disc has a slit row provided on the circular surface. The slit row includes slits arranged in a circumferential direction of the circular surface around the central axis and in a radial direction of the circular surface. The sensor is provided opposite to the slit row on circular surface. The sensor has a first light receiver and a second light receiver. The first light receiver is configured to output a first light receiving signal as the slit row rotates along the circumferential direction when the disc rotates around the central axis. The second light receiver is configured to output a second light receiving signal as the slit row moves along the radial direction when the disc rotates around the central axis.

A waveform display device includes a position information acquisition unit configured to acquire, from a controller for controlling a machine tool, position information indicating a position of a driving axis of the machine tool during machining of a workpiece, a machine information acquisition unit configured to acquire machine information indicating axis configuration of the machine tool, a machining point coordinate calculation unit configured to calculate a coordinate of a machining point of a tool installed to the machine tool, on the basis of the position information and the machine information, a reference surface setting unit configured to set a targeted machining surface of the workpiece as a reference surface, a distance calculation unit configured to calculate distance from each of a plurality of the machining to the reference surface, and a waveform display unit configured to display the calculated distances of the plurality of machining points in a wave form.

An encoder includes a disc and a sensor. The disc has a circular surface with a central axis and is rotatable around the central axis. The disc has a slit row provided on the circular surface. The slit row includes slits arranged in a circumferential direction of the circular surface around the central axis and in a radial direction of the circular surface. The sensor is provided opposite to the slit row on circular surface. The sensor has a first light receiver and a second light receiver. The first light receiver is configured to output a first light receiving signal as the slit row rotates along the circumferential direction when the disc rotates around the central axis. The second light receiver is configured to output a second light receiving signal as the slit row moves along the radial direction when the disc rotates around the central axis.

The present disclosure provides a control method for an electronically controlled servo mechanism as well as an apparatus and a robot thereof. The method is for an electronically controlled servo mechanism including a servo having a PI controller, which includes: obtaining related parameter(s) of the PI controller before tuning, where the related parameters includes a proportional coefficient and an integral coefficient; obtaining a current rotational angle of an output shaft of the servo, and calculating an angular deviation between the obtained current rotational angle and an expected rotational angle of an output shaft of the servo; and tuning the related parameter(s) of the PI controller based on the proportional coefficient, the integral coefficient, and the angular deviation. In such a manner, the parameter(s) of the PI controller are tuned to make it equivalent to a P controller, thereby avoiding the large oscillation caused by external interference.

For improved control and planning of a movement of the object in relation to a transport unit of a transport system, the transport unit is moved along a predefined transport trajectory with respect to a reference coordinate system. Embodiments provide a synchronous phase, in which a movement of an object point of the object along an object path with respect to a transport unit coordinate system, different from the reference coordinate system, is predefined during the synchronous phase. The transport unit coordinate system containing the transport unit is moved along the transport trajectory. At least one path point of the object path is converted from the transport unit coordinate system to a base coordinate system in order to control the movement of the object point along the object path with respect to the base coordinate system.

A waveform display device includes a position information acquisition unit configured to acquire, from a controller for controlling a machine tool, position information indicating a position of a driving axis of the machine tool during machining of a workpiece, a machine information acquisition unit configured to acquire machine information indicating axis configuration of the machine tool, a machining point coordinate calculation unit configured to calculate a coordinate of a machining point of a tool installed to the machine tool, on the basis of the position information and the machine information, a reference surface setting unit configured to set a targeted machining surface of the workpiece as a reference surface, a distance calculation unit configured to calculate distance from each of a plurality of the machining to the reference surface, and a waveform display unit configured to display the calculated distances of the plurality of machining points in a wave form.