A substrate mapping device 4 maps a plurality of substrates 10 inside a container where the substrates 10 are accommodated so as to be arrayed in a given arrayed direction. The substrate mapping device 4 includes a sensor 16 configured to detect a state of the substrate 10, a manipulator 14 configured to move the sensor 16, and a control device 18 configured to control the manipulator 14 to move the sensor 16 along a mapping course. The control device 18 sets a first mapping position and a second mapping position different in the position in the arrayed direction of the substrates 10 from the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.

A substrate mapping device 4 maps a plurality of substrates 10 inside a container where the substrates 10 are accommodated so as to be arrayed in a given arrayed direction. The substrate mapping device 4 includes a sensor 16 configured to detect a state of the substrate 10, a manipulator 14 configured to move the sensor 16, and a control device 18 configured to control the manipulator 14 to move the sensor 16 along a mapping course. The control device 18 sets a first mapping position and a second mapping position different in the position in the arrayed direction of the substrates 10 from the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.

In an offline teaching device in the related art, in the case of changing a teaching program, even in the case of performing the same change at each teaching point, it is necessary to perform the change with respect to each teaching point. The offline teaching device of the present disclosure has a selection function, a first change function, a second change function, a welding line storage function, and a teaching program storage function. The selection function causes one welding line among a plurality of welding lines stored in the welding line storage function to be selected. The first change function causes content of a welding conditions configuring the welding line selected with the selection function to be changed. The second change function causes the welding conditions of entire instructions in the teaching program having the same welding line identification information as welding line identification information that is assigned to the welding line selected with the selection function to be changed to the same content as content changed with the first change function.

In an offline teaching device in the related art, in the case of changing a teaching program, even in the case of performing the same change at each teaching point, it is necessary to perform the change with respect to each teaching point. The offline teaching device of the present disclosure has a selection function, a first change function, a second change function, a welding line storage function, and a teaching program storage function. The selection function causes one welding line among a plurality of welding lines stored in the welding line storage function to be selected. The first change function causes content of a welding conditions configuring the welding line selected with the selection function to be changed. The second change function causes the welding conditions of entire instructions in the teaching program having the same welding line identification information as welding line identification information that is assigned to the welding line selected with the selection function to be changed to the same content as content changed with the first change function.

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

A robot system with a hand-guiding function is disclosed. The robot system selects the hand-guiding function or non-hand-guiding function of an enable device by a mode option mechanism during the operation of a teach mode or an automatic mode. When selecting the hand-guiding function, the enable device has both the enabling and the hand-guiding function to easily hand-guiding the robot to operate.

A robot system with a hand-guiding function is disclosed. The robot system selects the hand-guiding function or non-hand-guiding function of an enable device by a mode option mechanism during the operation of a teach mode or an automatic mode. When selecting the hand-guiding function, the enable device has both the enabling and the hand-guiding function to easily hand-guiding the robot to operate.

A robot system with a hand-guiding function is disclosed. The robot system selects the hand-guiding function or non-hand-guiding function of an enable device by a mode option mechanism during the operation of a teach mode or an automatic mode. When selecting the hand-guiding function, the enable device has both the enabling and the hand-guiding function to easily hand-guiding the robot to operate.

A robot system with a hand-guiding function is disclosed. The robot system selects the hand-guiding function or non-hand-guiding function of an enable device by a mode option mechanism during the operation of a teach mode or an automatic mode. When selecting the hand-guiding function, the enable device has both the enabling and the hand-guiding function to easily hand-guiding the robot to operate.