A computer-implemented method of maintaining a transport system in a manufacturing facility including: measuring one or more pose-related properties of a plurality of transportation devices at a plurality of manufacturing stations in the manufacturing facility, at which manufacturing stations one or more workpieces are processed; determining a statistical characteristic for each of the plurality of transportation devices based on the pose-related properties; determining a sequence for maintaining one or more transportation devices based on the statistical characteristics; and optionally performing one or more maintenance procedures based on the sequence.

A method and a device for planning and/or controlling and/or simulating the operation of a construction machine, in particular in the form of a crane, using a structure data model which contains digital information on a structure to be erected and/or to be worked on. A construction machine which can be linked to such a structure data model and/or can be controlled using such a structure data model. A construction machine data model which contains digital information on different construction machine models is linked to the structure data model or the BIM, characteristics of the available construction machines are already taken into consideration during the planning process, a simulator for training construction machine tasks is configured using the structure data model, and the controller of the construction machine is adapted to the structure data model with respect to specific control functions.

The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.

Disclosed is a substrate treating apparatus including a coating module, an exposure module, a plurality of developing modules, and a transfer unit that performs transfer of a substrate between the modules. The plurality of developing modules include a plurality of post-exposure bake units that perform a bake process on a substrate on which an exposure process is completely performed in the exposure module. The substrate treating apparatus further includes a controller that controls the transfer of the substrate by the transfer unit. When transferring a substrate from the exposure module to the plurality of post-exposure bake units, the controller performs control to select a post-exposure bake unit in which the least delay time occurs, among the plurality of post-exposure bake units and to transfer the substrate to the selected post-exposure bake unit.

A method and a device for planning and/or controlling and/or simulating the operation of a construction machine, in particular in the form of a crane, using a structure data model which contains digital information on a structure to be erected and/or to be worked on. A construction machine which can be linked to such a structure data model and/or can be controlled using such a structure data model. A construction machine data model which contains digital information on different construction machine models is linked to the structure data model or the BIM, characteristics of the available construction machines are already taken into consideration during the planning process, a simulator for training construction machine tasks is configured using the structure data model, and the controller of the construction machine is adapted to the structure data model with respect to specific control functions.

A substrate processing method is provided. The substrate processing method includes placing a substrate storage container storing a substrate on a load port; automatically determining a type of the substrate stored in the placed substrate storage container; by referring to a storage unit that stores a parameter data set related to a transport condition for each substrate type, controlling transport of the substrate stored in the substrate storage container based on the parameter data set corresponding to the automatically determined type of the substrate to process the substrate, and, after automatically determining the type of the substrate, and before transporting the substrate stored in the substrate storage container, performing mapping based on conditions set in the parameter data set to detect an abnormality of the substrate stored in the substrate storage container.

A method and a device for planning and/or controlling and/or simulating the operation of a construction machine, in particular in the form of a crane, using a structure data model which contains digital information on a structure to be erected and/or to be worked on. A construction machine which can be linked to such a structure data model and/or can be controlled using such a structure data model. A construction machine data model which contains digital information on different construction machine models is linked to the structure data model or the BIM, characteristics of the available construction machines are already taken into consideration during the planning process, a simulator for training construction machine tasks is configured using the structure data model, and the controller of the construction machine is adapted to the structure data model with respect to specific control functions.

The present invention provides various aspects for supporting multilevel fabricators. In some examples, the multilevel fabricators may include a cleanspace region for moving work material. In some examples, panels of filters may be positioned to support the cleanspace. In some embodiments existing processing equipment and automation are placed into the new environment. In other embodiments the processing equipment is placed and new automation equipment is used. Automated tool placement equipment may be used to place the equipment. In some examples, automated tool handling equipment may be used to remove and replace processing equipment into the multilevel fabricator.

A production apparatus includes a workbench, a movement apparatus, a conveyance apparatus, a motion detector, and a control unit. The movement apparatus configured to move the workpiece on the workbench to a predetermined delivery position. The conveyance apparatus configured to convey the workpiece moved to the predetermined delivery position to an adjacent production apparatus. The motion detector configured to detect conveyance motion of the conveyance apparatus of the adjacent production apparatus. The control unit configured to operate the movement apparatus to move the workpiece on the workbench to the predetermined delivery position. If conveyance motion of the conveyance apparatus of the adjacent production apparatus is detected by the motion detector, the control unit operates the conveyance apparatus to convey the workpiece to a delivery position of the adjacent production apparatus.

A method serves to operate a transport system, in particular a multi-carrier system, that comprises a plurality of linear motors that are arranged in a row and have a guide track, a plurality of transport elements that can be moved along the guide track by means of the linear motors, and a plurality of stations along the guide track, wherein each of the transport elements is associated with one of the stations. The method has the following steps: generating an instance for each of the transport elements, generating a list for each of the stations, wherein the instance for each of the transport elements associated with the respective station is associated with the list, and wherein, within the respective list, the instance of each transport element is linked to the instance of the transport element directly ahead of the observed transport element and to the instance of the transport element directly behind the observed transport element, transferring a transport element from a first station to a directly following second station and inserting the instance of this transport element into the list of the second station if a transport job that goes beyond the first station is present for the transport element, wherein the transfer of the instance takes place in an event-controlled manner and independently of a transfer point if a predetermined transfer condition is fulfilled, and controlling the linear motors to execute travel jobs of the transport elements.