A manufacturing process monitoring apparatus capable of determining a manufacturing process is anomaly, without requiring any threshold value for determining the as anomaly is provided. The manufacturing process monitoring apparatus includes a data conversion unit configured to convert process data of a manufacturing facility, a feature value analysis unit configured to analyze the converted data based on information on feature values, a data restoration unit configured to restore data for each of a plurality of categories based on the information on the feature values and information on the analyzed result, a similarity calculation unit configured to calculate a similarity for each of the plurality of categories based on the data used when being analyzed and the restored data, a category determination unit configured to determine a category of the data based on the similarity for each of the plurality of categories, a category classification unit configured to classify the category to which the process data belongs, and a process state diagnostic unit configured to diagnose a state of the manufacturing process based on a result of comparison between the determined category and the classified category.

A manufacturing process monitoring apparatus capable of determining a manufacturing process is anomaly, without requiring any threshold value for determining the as anomaly is provided. The manufacturing process monitoring apparatus includes a data conversion unit configured to convert process data of a manufacturing facility, a feature value analysis unit configured to analyze the converted data based on information on feature values, a data restoration unit configured to restore data for each of a plurality of categories based on the information on the feature values and information on the analyzed result, a similarity calculation unit configured to calculate a similarity for each of the plurality of categories based on the data used when being analyzed and the restored data, a category determination unit configured to determine a category of the data based on the similarity for each of the plurality of categories, a category classification unit configured to classify the category to which the process data belongs, and a process state diagnostic unit configured to diagnose a state of the manufacturing process based on a result of comparison between the determined category and the classified category.

An operating state acquisition apparatus 20a includes a detector 21a retrofitted to be mounted on a production equipment 31 disposed on a manufacturing line L1, or retrofitted to be disposed in a vicinity of the production equipment 31, the detector outputting a detection signal indicating an operating state of the production equipment. The operating state acquisition apparatus 20a includes a transmitter 21a configured to transmit a detection signal to a management apparatus 10.

A non-transitory computer-readable medium stores instructions that, when executed by a processor, cause the processor to receive, via the processor, a characteristic of data to be collected from an operational technology (OT) device disposed within an OT network associated with an industrial automation system configured to perform an industrial automation process, determine, via the processor, that the characteristic exceeds a threshold value, and deploy, via the processor, in response to determining that the characteristic exceeds the threshold value, a container to a compute surface within the OT network that is disposed within a threshold distance of the OT device. The container is configured to receive the data from the OT device and process the received data.

A non-transitory computer-readable medium stores instructions that, when executed by a processor, cause the processor to receive, via the processor, a characteristic of data to be collected from an operational technology (OT) device disposed within an OT network associated with an industrial automation system configured to perform an industrial automation process, determine, via the processor, that the characteristic exceeds a threshold value, and deploy, via the processor, in response to determining that the characteristic exceeds the threshold value, a container to a compute surface within the OT network that is disposed within a threshold distance of the OT device. The container is configured to receive the data from the OT device and process the received data.

A method for automatically collecting semiconductor manufacturing parameters of a manufacturing equipment is provided. The method includes reporting semiconductor manufacturing parameters obtained by self-monitoring of the manufacturing equipment and obtaining storage locations in an electronic data capture corresponding to reported semiconductor manufacturing parameters and transporting the reported semiconductor manufacturing parameters and corresponding storage locations. The method further includes receiving the reported semiconductor manufacturing parameters and the corresponding storage location and storing each reported semiconductor manufacturing parameters automatically into the electronic data capture of a manufacturing execution system according to the corresponding storage location.

An operating state acquisition apparatus 20a includes a detector 21a retrofitted to be mounted on a production equipment 31 disposed on a manufacturing line L1, or retrofitted to be disposed in a vicinity of the production equipment 31, the detector outputting a detection signal indicating an operating state of the production equipment. The operating state acquisition apparatus 20a includes a transmitter 21a configured to transmit a detection signal to a management apparatus 10.