A computer-implemented method using a processing unit and including providing to or determining by the processing unit a totality of process variables which is available for processing for the plurality of actuators and/or sensors of a subunit, using the processing unit to determine a subset of process variables out of the totality of process variables processing, during production of a production lot, those process variables which belong to the determined subset of process variables for those process variables which do not belong to any of the determined subset of process variables, and processing a selected number of process variables. In addition, a production cell has a processing unit configured to carry out the computer-implemented method, and computer program is provided to implement such a method.

A monitoring apparatus according to the present invention includes: a detecting unit configured to detect that a monitored object is in a preset specific state based on a plurality of measured values measured from the monitored object; and a specifying unit configured to specify, among elements causing the measured values, the element related to detection of the specific state of the monitored object based on the measured values, and also specify the element based on preset properties of the elements of the measured values.

A plant inspection planning optimization apparatus includes: a plant operation estimation unit that estimates the variation of the operation of a plant; a degradation probability distribution estimation unit that estimates the probability distributions of the degradations of plural inspection-scheduled points of the plant with the use of the variation of the operation of the plant and the degradation state and the probability distribution of the parameter of an estimation model obtained at the previous inspection; an inspection point optimization unit that selects inspection points selected from the inspection-scheduled points in accordance with a selection index with the use of the probability distributions of the degradations of the plural inspection-scheduled points; and an output unit that provides the selected inspection points and inspection techniques.

An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.

The systems and methods disclosed herein include an assessment system and process for assessing an industrial machine and its various sections, sub-sections, and parts. In embodiments, the assessment system includes an assessment device that includes an assessment overviewer and a part assessor. The assessment overviewer provides an assessor with a selectable industrial machine schematic that illustrates the assessment status of each section of the industrial machine, such as by changing the appearance of each section based its assessment status. The part assessor provides a part assessment interface with engineering instructions and a part grading user interface that provides for a comparison of digital images to complete the part grading.

Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.

Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.

The systems and methods disclosed herein include an assessment system and process for assessing an industrial machine and its various sections, sub-sections, and parts. In embodiments, the assessment system includes an assessment device that includes an assessment overviewer and a part assessor. The assessment overviewer provides an assessor with a selectable industrial machine schematic that illustrates the assessment status of each section of the industrial machine, such as by changing the appearance of each section based its assessment status. The part assessor provides a part assessment interface with engineering instructions and a part grading user interface that provides for a comparison of digital images to complete the part grading.

Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.

An electronic device manufacturing system that includes a process tool, an evaluation system, and a communication node. The communication node is configured to obtain one or more attributes from the evaluation system and identify a data collection plan that is based on the one or more attributes. The communication node is further configured to register with the process tool to receive data according to the data collection plan and receive, from the process tool, data according to the data collection plan. The communication node is further configured to send the received data to the evaluation system.