A first drive operates directly on a machine element, whereas a second drive operates on a machine element via a speed-changing device. A position controller receives a position setpoint value and a position actual value of the machine element and determines therefrom a speed setpoint value for the machine element. A first determining device receives the speed setpoint value and determines a resulting speed setpoint value using the speed setpoint value. A first speed controller determines a first force setpoint value from the resulting speed setpoint value and the speed actual value of the machine element and controls the first drive depending on the first force setpoint value. A second speed controller determines a second force setpoint value from the resulting speed setpoint value and the speed actual value of the second drive and controls the second drive depending on the force setpoint value.

A first drive operates directly on a machine element, whereas a second drive operates on a machine element via a speed-changing device. A position controller receives a position setpoint value and a position actual value of the machine element and determines therefrom a speed setpoint value for the machine element. A first determining device receives the speed setpoint value and determines a resulting speed setpoint value using the speed setpoint value. A first speed controller determines a first force setpoint value from the resulting speed setpoint value and the speed actual value of the machine element and controls the first drive depending on the first force setpoint value. A second speed controller determines a second force setpoint value from the resulting speed setpoint value and the speed actual value of the second drive and controls the second drive depending on the force setpoint value.

A substrate processing unit 14 includes processing modules 2 each performing a process on a substrate, and a substrate transfer device 121 is provided between a mounting unit 11 and the processing modules. A parameter storage unit 3 stores sets of transfer parameter 33 where an operating speed of the substrate transfer device corresponds to a processing number of substrates per a unit time. A parameter selecting unit 4 compares a processing number of substrates per a unit time determined based on a recipe 31 corresponding to the process, with those corresponding to the transfer parameters and selects a transfer parameter corresponding to the minimum processing number of substrates among the processing numbers of substrates equal to or larger than that determined based on the recipe. A transfer control units 151 to 153 control the substrate transfer device based on a set value of the selected transfer parameter.