A parameter design assistance device (2) includes storage (24) and a controller (25). The storage (24) stores therein a recipe for controlling a substrate processing device (81). The controller (25) acquires one or more level values for each of control factors. The level values indicate conditions according to which the substrate processing device (1) is to process a substrate (11). The controller (25) generates, through statistical technique, combination information representing combinations of the level values acquired. The controller (25) creates an evaluation recipe for each of the combinations of the level values based on the combination information and the recipe stored in the storage (24). When the evaluation recipe includes a parameter corresponding to a control factor, the controller (25) sets a corresponding level value for the control factor as a parameter value of the parameter.

A recipe management system includes a versioning system that tracks the revision history of templates and their child instances. Modifications to templates and instances create new records with new primary key identifiers and version identifiers. However, each new version of a template or instance has the same root identifier as the prior versions. When a template is modified, a flag is set in its child instances, but they are not modified automatically. When an instance is modified, it has no effect on the parent template. At runtime, a recipe model is loaded to an equipment model to execute a recipe on a piece of equipment. Only approved versions of equipment models are used during execution, even if newer versions exist. During execution, new equipment models can be created. The recipe management system includes an execution engine that can be hosted as a standalone executable or in a system platform.

A method includes identifying first parameters of a first processing chamber of a semiconductor fabrication facility. The first parameters include first input parameters and first output parameters. The method further includes identifying second parameters of a second processing chamber of the semiconductor fabrication facility. The second parameters include second input parameters and second output parameters. The method further includes generating, by a processing device based on the first parameters and the second parameters, composite parameters comprising composite input parameters and composite output parameters. Semiconductor fabrication is based on the composite parameters.

A recipe management system includes a versioning system that tracks the revision history of templates and their child instances. Modifications to templates and instances create new records with new primary key identifiers and version identifiers. However, each new version of a template or instance has the same root identifier as the prior versions. When a template is modified, a flag is set in its child instances, but they are not modified automatically. When an instance is modified, it has no effect on the parent template. At runtime, a recipe model is loaded to an equipment model to execute a recipe on a piece of equipment. Only approved versions of equipment models are used during execution, even if newer versions exist. During execution, new equipment models can be created. The recipe management system includes an execution engine that can be hosted as a standalone executable or in a system platform.

Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.

A parameter design assistance device (2) includes storage (24) and a controller (25). The storage (24) stores therein a recipe for controlling a substrate processing device (81). The controller (25) acquires one or more level values for each of control factors. The level values indicate conditions according to which the substrate processing device (1) is to process a substrate (11). The controller (25) generates, through statistical technique, combination information representing combinations of the level values acquired. The controller (25) creates an evaluation recipe for each of the combinations of the level values based on the combination information and the recipe stored in the storage (24). When the evaluation recipe includes a parameter corresponding to a control factor, the controller (25) sets a corresponding level value for the control factor as a parameter value of the parameter.

Methods, apparatus, systems and articles of manufacture are disclosed herein to implement flexible bioreactor control systems. An example apparatus disclosed herein includes a processor coupled to a memory, the processor programmed to determine whether the map value included in the process task object is a valid map value, the process task object to correspond to a task executed by a bioreactor, a control device or a measurement device of the bioreactor control system configuration, in response to determining the map value is a valid map value, decode the map value to identify the source location of a first input of the process task object, pull a value from the source location to update the input value of the process task object, and facilitate execution of the process task with the input value.

Methods, apparatus, systems and articles of manufacture are disclosed herein to implement flexible bioreactor control systems. An example apparatus disclosed herein includes a processor coupled to a memory, the processor programmed to determine whether the map value included in the process task object is a valid map value, the process task object to correspond to a task executed by a bioreactor, a control device or a measurement device of the bioreactor control system configuration, in response to determining the map value is a valid map value, decode the map value to identify the source location of a first input of the process task object, pull a value from the source location to update the input value of the process task object, and facilitate execution of the process task with the input value.

A recipe management system includes a versioning system that tracks the revision history of templates and their child instances. Modifications to templates and instances create new records with new primary key identifiers and version identifiers. However, each new version of a template or instance has the same root identifier as the prior versions. When a template is modified, a flag is set in its child instances, but they are not modified automatically. When an instance is modified, it has no effect on the parent template. At runtime, a recipe model is loaded to an equipment model to execute a recipe on a piece of equipment. Only approved versions of equipment models are used during execution, even if newer versions exist. During execution, new equipment models can be created. The recipe management system includes an execution engine that can be hosted as a standalone executable or in a system platform.

A biopharmaceutical manufacturing control system and associated methods are disclosed herein.