The objective of the present invention is to acquire maintenance information easily when an alarm is generated. This control device for controlling an industrial machine is provided with: a monitoring unit which monitors the industrial machine to detect an abnormality in the industrial machine; an information acquiring unit which acquires alarm information relating to an alarm pertaining to the abnormality detected by the monitoring unit, and maintenance information relating to maintenance for dealing with the abnormality; and a display control unit which causes the acquired alarm information and maintenance information to be displayed on a display device.

An information processing apparatus executes a simulation of a state of a process which is being performed in a semiconductor manufacturing apparatus, by using a simulation model of the semiconductor manufacturing apparatus. The information processing apparatus includes: a physical sensor data acquisition unit that acquires physical sensor data measured in the semiconductor manufacturing apparatus that is performing the process according to process parameters; a simulation execution unit that executes the simulation by the simulation model according to the process parameters, thereby outputting virtual sensor data; a simulation result determination unit that performs a pre-detection of a part of the semiconductor manufacturing apparatus that needs to be replaced, based on a difference between the physical sensor data and the virtual sensor data; and a part order unit that orders the part of the semiconductor manufacturing apparatus based on a result of the pre-detection.

A resource allocation system for a production facility stores: a production schedule assigning production tasks to machines of the production facility, each production task comprising a production time window during which a machine is occupied with the production task; a maintenance schedule assigning maintenance tasks to service resources, each maintenance task comprising a maintenance time window during which a machine is occupied with the maintenance task; and a maintenance plan comprising maintenance rules for generating maintenance tasks, the maintenance rules at least comprising a scheduling rule from which a time after which a machine has to be maintained is derivable. The resource allocation system is configured for determining maintenance tasks for machines based on the maintenance rules, wherein the time window of a maintenance task for a machine is determined from a previous maintenance task, the scheduling rule for the machine and the production tasks for the machine, such that the time window of the maintenance task does not overlap with the production tasks.

An information processing apparatus executes a simulation of a state of a process which is being performed in a semiconductor manufacturing apparatus, by using a simulation model of the semiconductor manufacturing apparatus. The information processing apparatus includes: a physical sensor data acquisition unit that acquires physical sensor data measured in the semiconductor manufacturing apparatus that is performing the process according to process parameters; a simulation execution unit that executes the simulation by the simulation model according to the process parameters, thereby outputting virtual sensor data; a simulation result determination unit that performs a pre-detection of a part of the semiconductor manufacturing apparatus that needs to be replaced, based on a difference between the physical sensor data and the virtual sensor data; and a part order unit that orders the part of the semiconductor manufacturing apparatus based on a result of the pre-detection.