A method includes determining queue times associated with operations of a sequence recipe. The operations are associated with production of substrates in a substrate processing system. The method further includes generating a schedule based on the queue times. The method further includes transmitting the schedule to a controller of the substrate processing system. The controller is to control the substrate processing system to produce the substrates based on the schedule.

A method includes identifying a bottleneck operation of a plurality of operations in a sequence recipe. The plurality of operations are associated with transporting and processing a plurality of substrates in a substrate processing system. The method further includes determining, based on the bottleneck operation, a takt time for the plurality of substrates. The takt time is an amount of time between a first substrate entering the substrate processing system and a second substrate entering the substrate processing system. The method further includes determining a plurality of queue times. Each of the plurality of queue times corresponds to a respective operation of the plurality of operations. The method further includes causing, based on the takt time and the plurality of queue times, the plurality of substrates to be processed by the substrate processing system.

A method predicts an expected waiting time for a route having a plurality of production operations in manufacturing. The method includes receiving a sorted list of production operations characterizing a route for manufacturing a lot, and defining a starting time point of a lot production start time. The method further includes, for each production operation in the sorted list, (i) sampling feature values for a plurality of features by sampling from a database of collected feature values for operation measured feature values based on the starting time point, wherein the features characterize a property and/or a state of the lot and/or a property and/or a state of a factory for manufacturing the lot, and (ii) predicting an expected waiting time of each production operation based on the sampled feature values. The expected waiting time of each production operation is accumulated to determine the expected waiting time for the route.

A substrate processing apparatus includes first processors, second processors, a transfer module and a controller. Each of the first processors is configured to perform a first processing on a substrate. Each of the second processors is configured to perform a second processing on the substrate on which the first processing is performed. The transfer module is configured to transfer the substrate to the first processors and the second processors. The controller is configured to control the first processors, the second processors and the transfer module. The controller controls a start timing for a first transfer processing of transferring the substrates to the first processor such that a timing of a second transfer processing of transferring the substrate having a liquid film formed thereon to the second processor from the first processor and a timing when another substrate is transferred by the transfer module are not overlapped with each other.

A method includes identifying a bottleneck operation of a plurality of operations in a sequence recipe. The plurality of operations are associated with transporting and processing a plurality of substrates in a substrate processing system. The method further includes determining, based on the bottleneck operation, a takt time for the plurality of substrates. The takt time is an amount of time between a first substrate entering the substrate processing system and a second substrate entering the substrate processing system. The method further includes determining a plurality of queue times. Each of the plurality of queue times corresponds to a respective operation of the plurality of operations. The method further includes causing, based on the takt time and the plurality of queue times, the plurality of substrates to be processed by the substrate processing system.

A component mounting line control system controls a component mounting line. The component mounting line includes a component mounting device and a board retrieving unit. The component mounting line control system includes an acquirer and a controller. The acquirer acquires information from the board retrieving unit. The controller controls the component mounting device based on the information acquired by the acquirer. The controller lengthens a time taken for a manufacturing process in the component mounting device in a case where the acquirer acquires first warning information, which indicates that a board accommodation limit is about to be reached, from the board retrieving unit.

A wafer-processing apparatus includes: multiple discrete units of reactors disposed on the same plane; a wafer-handling chamber having a polygonal shape having multiple sides corresponding to and being attached to the multiple discrete units, respectively, and one additional side for a load lock chamber; a load lock chamber attached to the one additional side of the wafer-handling chamber; multiple discrete gas boxes for controlling gases corresponding to and being connected to the multiple discrete units, respectively; and multiple discrete electric boxes for controlling electric systems corresponding to and being detachably connected to the multiple discrete units, respectively, wherein the gas boxes and the electric boxes are arranged alternately as viewed from above under the multiple discrete units, and the electric boxes can be pulled out outwardly without being disconnected from the corresponding units so that sides of the gas boxes are accessible.

Methods, systems, and apparatus, including medium-encoded computer program products, for synchronizing the manufacture of objects using two or more separate tools include, in at least one aspect, determining tasks to be performed in a shared build volume to manufacture a 3D object, assigning the tasks to respective queues, ordering the tasks within each queue of assigned tasks based on a spatial dimension extent, generating wait times within the queues in accordance with timing dependencies, identifying which of the queues of assigned tasks takes a most amount of time in accordance with temporal dimension extents and the wait times, creating at least one variant of the queues of assigned tasks, repeating the ordering, the adding, and the identifying to reduce a total time of manufacturing, and providing a finalized version of the queues of assigned tasks for conducting synchronized activities of manufacturing in the shared build volume.

A substrate processing apparatus includes first processors, second processors, a transfer module and a controller. Each of the first processors is configured to perform a first processing on a substrate. Each of the second processors is configured to perform a second processing on the substrate on which the first processing is performed. The transfer module is configured to transfer the substrate to the first processors and the second processors. The controller is configured to control the first processors, the second processors and the transfer module. The controller controls a start timing for a first transfer processing of transferring the substrates to the first processor such that a timing of a second transfer processing of transferring the substrate having a liquid film formed thereon to the second processor from the first processor and a timing when another substrate is transferred by the transfer module are not overlapped with each other.

A scheduling method includes a first step where a controller prepares the schedule so that a preliminary processing process and a substrate processing process are performed in that order by a processing unit in common, a second step where, when an abnormality occurs in a substrate processing apparatus in a period from the start of the preliminary processing process to before the start of the substrate processing process, the controller stops the substrate processing process at the processing unit designated in the first step, and a third step where, when the abnormality is resolved, the controller prepares the schedule so that a post-resolution preliminary processing process and the substrate processing process are performed in that order at the processing unit designated in the first step.