Patent classifications
G
G05
G05B
2219/00
G05B2219/30
G05B2219/32
G05B2219/32278
G05B2219/32278
Method and manufacturing system
09630927
·
2017-04-25
·
·
A method is provided. The method includes: assigning a buffer to a first wafer lot comprising a plurality of wafers according to a first trigger event associated with an equipment; and assigning a transporter to a second wafer lot comprising a plurality of wafers according to a second trigger event associated with the equipment.