A system for controlling an operation of a machine including a plurality of actuators assisting one or multiple tools to perform one or multiple tasks, in response to receiving an acoustic mixture of signals generated by the tool performing a task and by the plurality of actuators actuating the tool, submit the acoustic mixture of signals into a neural network trained to separate from the acoustic mixture a signal generated by the tool performing the task from signals generated by the actuators actuating the tool to extract the signal generated by the tool performing the task from the acoustic mixture of signals, analyze the extracted signal to produce a state of performance of the task, and execute a control action selected according to the state of performance of the task.

In an embodiment, a method includes determining a given material to manipulate to achieve a goal state. The goal state can be one or more deformable or granular materials in a particular arrangement. The method further includes, for the given material, determining, a respective outcome for each of a plurality of candidate actions to manipulate the given material. The determining can be performed with a physics-based model, in one embodiment. The method further can include determining a given action of the candidate actions, where the outcome of the given action reaching the goal state is within at least one tolerance. The method further includes, based on a selected action of the given actions, generating a first motion plan for the selected action.

Implementations described herein generally relate to a method for detecting anomalies in time-series traces received from sensors of manufacturing tools. A server feeds a set of training time-series traces to a neural network configured to derive a model of the training time-series traces that minimizes reconstruction error of the training time-series traces. The server extracts a set of input time-series traces from one or more sensors associated with one or more manufacturing tools configured to produce a silicon substrate. The server feeds the set of input time-series traces to the trained neural network to produce a set of output time series traces reconstructed based on the model. The server calculates a mean square error between a first input time series trace of the set of input time series traces and a corresponding first output time series trace of the set of output time-series traces. The server declares the sensor corresponding to the first input time-series trace as having an anomaly when the mean square error exceeds a pre-determined value.

The current disclosure describes techniques for managing vertical alignment or overlay in semiconductor manufacturing using machine learning. Alignments of interconnection features in a fan-out WLP process are evaluated and managed through the disclosed techniques. Big data and neural networks system are used to correlate the overlay error source factors with overlay metrology categories. The overlay error source factors include tool related overlay source factors, wafer or die related overlay source factors and processing context related overlay error source factors.

Example implementations described herein are directed to a system for manufacturing dispatching using reinforcement learning and transfer learning. The systems and methods described herein can be deployed in factories for manufacturing dispatching for reducing job-due related costs. In particular, example implementations described herein can be used to reduce massive data collection and reduce model training time, which can eventually improve dispatching efficiency and reduce factory cost.

A method of generating training spectra for training of a neural network includes generating a plurality of theoretically generated initial spectra from an optical model, sending the plurality of theoretically generated initial spectra to a feedforward neural network to generate a plurality of modified theoretically generated spectra, sending an output of the feedforward neural network and empirically collected spectra to a discriminatory convolutional neural network, determining that the discriminatory convolutional neural network does not discriminate between the modified theoretically generated spectra and empirically collected spectra, and thereafter, generating a plurality of training spectra from the feedforward neural network.

Vehicle navigation control systems in autonomous driving rely on accurate predictions of objects within the vicinity of the vehicle to appropriately control the vehicle safely through its surrounding environment. Accordingly this disclosure provides methods and devices which implement mechanisms for obtaining contextual variables of the vehicle's environment for use in determining the accuracy of predictions of objects within the vehicle's environment.

A method may include obtaining acquired process data regarding a plant process that is performed by a plant system. The method may further include obtaining from a process model, simulated process data regarding the plant process. The method may further include determining drift data for the process model based on a difference between the acquired process data and the simulated process data. The drift data may correspond to an amount of model drift associated with the process model. The method may further include determining whether the drift data satisfies a predetermined criterion. The method further includes determining, in response to determining that the drift data fails to satisfy the predetermined criterion, a model update for the process model.

A robot for object manipulation may include sensors, a robot appendage, actuators configured to drive joints of the robot appendage, a planner, and a controller. Object path planning may include determining poses. Object trajectory optimization may include assigning a set of timestamps to the poses, optimizing a cost function based on an inverse kinematic (IK) error, a difference between an estimated required wrench and an actual wrench, and a grasp efficiency, and generating a reference object trajectory based on the optimized cost function. Grasp sequence planning may be model-based or deep reinforcement learning (DRL) policy based. The controller may implement the reference object trajectory and the grasp sequence via the robot appendage and actuators.

A tactile sensing system of a robot may include: a plurality of piezoelectric elements disposed at an object, and including a transmission (TX) piezoelectric element and a reception (RX) piezoelectric element; and at least one processor configured to: control the TX piezoelectric element to generate an acoustic wave having a chirp spread spectrum (CSS) at every preset time interval, along a surface of the object; receive, via the RX piezoelectric element, an acoustic wave signal corresponding to the generated acoustic wave; select frequency bands from a plurality of frequency bands of the acoustic wave signal; and estimate a location of a touch input on the surface of the object by inputting the acoustic wave signal of the selected frequency bands into a neural network configured to provide a touch prediction score for each of a plurality of predetermined locations on the surface of the object.