An interlock switch is turned on to close a power supply line when a cover is closed, and turned off to open the power supply line when the cover is opened. A time constant circuit is connected to a node side of the interlock switch in the power supply line. A switch control unit determines that a user is intentionally turning on and off the interlock switch and turns off a switch Q1 when a smoothed voltage obtained by smoothing a voltage difference between voltage dividing nodes becomes larger than a threshold value.

An information collection device includes a power supply unit that supplies power to operate the information collection device; an input unit that is connected to a sensor capable of detecting a state of the substrate processing apparatus and inputs sensor data indicating the state of the substrate processing apparatus detected by the sensor, a relay unit that relays transmission of the sensor data; and a control unit that collects the sensor data input by the input unit through the relay unit.