Provided is a substrate processing apparatus capable of efficiently resuming processing of unprocessed substrates after an error occurs during processing of substrates. In the substrate processing apparatus that executes a recipe defining an order of processing substrates and manages process status of the substrates, the process status are changed to a processing state so as to execute the recipe, are changed to a paused state when unprocessed substrates are present among the substrates to be processed according to the recipe, due to an error occurring during the execution of the recipe, and are changed from the paused state to the processing state to resume the execution of the recipe so as to process the unprocessed substrates when the error is canceled and a operation is performed to resume the execution of the recipe.

A task resumption system including processing circuitry that receives a task resumption specification for task resumption by a device when the device, which sequentially performs multiple tasks, stops during processing, acquires a current state of the device, acquires a resume state corresponding to the task resumption of the device, causes the device to transition from the current state to the resume state, and causes the device to resume the task according to the resume state.

A program restart assisting apparatus acquires time series data of a physical amount detected in machining, detects a change point on which a machining state of the machining is changed based on the acquired data, and records the change point of the machining state as a restartable point. Then, the program restart assisting apparatus selects a restart execution point from among the recorded restartable points, with the result that an appropriate restartable point can be easily selected.

A laser machining apparatus includes: a laser beam emission device; a visible laser beam emission device; a scanner; and a controller. The controller is configured to perform: generating machining data including coordinate data representing a machining pattern to be machined on a workpiece; machining the workpiece with a laser beam according to the machining data by controlling the laser beam emission device and the scanner; generating, in response to receiving a resuming command after the machining has been halted at a stopping position, a guide pattern based on a stopping point coordinate and the machining data, the guide pattern being used for resuming the machining from the stopping position, the stopping point coordinate indicating the stopping position and being determined by the coordinate data; and projecting the guide pattern onto the workpiece with a visible laser beam by controlling the visible laser beam emission device and the scanner.

A task resumption system including processing circuitry that receives a task resumption specification for task resumption by a device when the device, which sequentially performs multiple tasks, stops during processing, acquires a current state of the device, acquires a resume state corresponding to the task resumption of the device, causes the device to transition from the current state to the resume state, and causes the device to resume the task according to the resume state.

A laser machining apparatus includes: a laser beam emission device; a visible laser beam emission device; a scanner; and a controller. The controller is configured to perform: generating machining data including coordinate data representing a machining pattern to be machined on a workpiece; machining the workpiece with a laser beam according to the machining data by controlling the laser beam emission device and the scanner; generating, in response to receiving a resuming command after the machining has been halted at a stopping position, a guide pattern based on a stopping point coordinate and the machining data, the guide pattern being used for resuming the machining from the stopping position, the stopping point coordinate indicating the stopping position and being determined by the coordinate data; and projecting the guide pattern onto the workpiece with a visible laser beam by controlling the visible laser beam emission device and the scanner.

A program restart assisting apparatus acquires time series data of a physical amount detected in machining, detects a change point on which a machining state of the machining is changed based on the acquired data, and records the change point of the machining state as a restartable point. Then, the program restart assisting apparatus selects a restart execution point from among the recorded restartable points, with the result that an appropriate restartable point can be easily selected.

A numerical control apparatus includes a program storage, a display device, an automatic-operation control unit, a suspending operation unit, a program manipulation unit, and an automatic-operation monitoring unit. The automatic-operation monitoring unit monitors an execution state of the automatic-operation control unit. At a time of resumption of execution of an NC program after suspension of the execution of the NC program by the suspending operation unit, the automatic-operation monitoring unit checks whether a resumption block containing a character designated in the program manipulation unit immediately before the resumption is a preset resumable block or not. When the resumption block is the resumable block, processing in the automatic-operation control unit is resumed from the resumption block, while when the resumption block is not the resumable block, the processing is halted.