Apparatuses, methods and storage medium associated with monitoring or assisting in monitoring of an equipment process are disclosed herein. In embodiments, an apparatus may comprise an analyzer to: receive a plurality of simulation results of a plurality of control limit and alert zone combinations for potential use with a control chart to monitor the equipment process, and calculate a plurality of performance metrics for each of the plurality of control limit and alert zone combinations, using the plurality of simulation results. The apparatus may further select an optimal combination of control limits and alert zones, based at least in part on the plurality of performance metrics, and configure an equipment process monitor with the selected optimal combination of control limits and alert zones for use with a control chart to monitor the equipment process. Other embodiments may be described or claimed.

A tool abnormality detection system corrects a monitoring range for a load on a tool in an M.sup.th cycle by using load data of at least one of 1.sup.st to (M1).sup.th cycles (where M is an integer of 2 or more), wherein processing work on a single workpiece corresponds to a single cycle, and the load data is data about the load on the tool in the cycle.

Apparatuses, methods and storage medium associated with monitoring or assisting in monitoring of an equipment process are disclosed herein. In embodiments, an apparatus may comprise an analyzer to: receive a plurality of simulation results of a plurality of control limit and alert zone combinations for potential use with a control chart to monitor the equipment process, and calculate a plurality of performance metrics for each of the plurality of control limit and alert zone combinations, using the plurality of simulation results. The apparatus may further select an optimal combination of control limits and alert zones, based at least in part on the plurality of performance metrics, and configure an equipment process monitor with the selected optimal combination of control limits and alert zones for use with a control chart to monitor the equipment process. Other embodiments may be described or claimed.